一种带有氧化铟锡电极的静电驱动蠕动微泵

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI:10.1109/NEMS.2013.6559875

Bonghwan Kim, K. Lee, M. Shannon

{"title":"一种带有氧化铟锡电极的静电驱动蠕动微泵","authors":"Bonghwan Kim, K. Lee, M. Shannon","doi":"10.1109/NEMS.2013.6559875","DOIUrl":null,"url":null,"abstract":"An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum flow rate of 27.19 μl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"64 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"An electrostatically driven peristaltic micropump with an indium tin oxide electrode\",\"authors\":\"Bonghwan Kim, K. Lee, M. Shannon\",\"doi\":\"10.1109/NEMS.2013.6559875\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum flow rate of 27.19 μl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.\",\"PeriodicalId\":308928,\"journal\":{\"name\":\"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"volume\":\"64 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-04-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2013.6559875\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2013.6559875","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

研制了一种以氧化铟锡(ITO)透明电极为电极的静电驱动双面蠕动微泵，用于气相色谱分析。为了验证泵的运动，制作了ITO-ITO微泵，为了测量流量，制作了ITO-Si微泵。微泵分别在玻璃基板上的ITO和聚酰亚胺膜上的硅基板上制备。在4 Hz和100 V DC下测得的最大流速为27.19 μl/min。微泵由4个电极操作，采用4相顺序驱动。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

An electrostatically driven peristaltic micropump with an indium tin oxide electrode

An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum flow rate of 27.19 μl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

自引率

0.00%

发文量