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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications 一种基于范德华力的非易失性存储器双稳态硅纳米纳米机电开关
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559793
B. Soon, N. Singh, J. Tsai, Chengkuo Lee
{"title":"A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications","authors":"B. Soon, N. Singh, J. Tsai, Chengkuo Lee","doi":"10.1109/NEMS.2013.6559793","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559793","url":null,"abstract":"We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"226 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133336453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Ice Fishing Micro channels with sub-micron pores 带有亚微米孔的冰钓微通道
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559909
J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai
{"title":"Ice Fishing Micro channels with sub-micron pores","authors":"J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai","doi":"10.1109/NEMS.2013.6559909","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559909","url":null,"abstract":"We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young's pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"234 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133351515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Bend waveguide with broad bandwidth and high transmission efficiency based on air-hole photonic crystal 基于空穴光子晶体的宽带高传输效率弯曲波导
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559736
Xiaoyuan Ren, Lishuang Feng, Zhili Lin
{"title":"Bend waveguide with broad bandwidth and high transmission efficiency based on air-hole photonic crystal","authors":"Xiaoyuan Ren, Lishuang Feng, Zhili Lin","doi":"10.1109/NEMS.2013.6559736","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559736","url":null,"abstract":"As one of the most competitive materials of the integrated optics, photonic crystals (PCs) have been investigated for more than 20 years since its conception was proposed. In this work, we established a novel structure of the bend waveguide which is composed of photonic crystal (PC) with triangular lattice of air-holes. By optimizing the bend structures, not only the transmission bandwidth of the whole waveguide is greatly improved, but also the transmission efficiency is enhanced. The transmission efficiencies of the wavelengths between 1504nm and 1586nm can reach more than 80%. The highest transmission efficiency 95% can be obtained for the wavelength of 1553nm. By simulating the transmission of the optimized bend waveguide, the light wave whose wavelength is 1553nm can propagate effectively.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134258729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Low frequency vibration energy harvesting from human motion using IPMC cantilever with electromagnectic transduction 利用带电磁转导的IPMC悬臂梁收集人体运动中的低频振动能量
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559812
K. Aw, Siva V. Praneeth
{"title":"Low frequency vibration energy harvesting from human motion using IPMC cantilever with electromagnectic transduction","authors":"K. Aw, Siva V. Praneeth","doi":"10.1109/NEMS.2013.6559812","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559812","url":null,"abstract":"This research aims as a proof of concept for a vibration energy harvester using human motion as the energy source. Human motion consists of burst of low frequency vibrational kinetic energy. The high acceleration burst is usually 1. 5 to 2 g when the foot strikes the ground and an ionic polymer metallic composite (IPMC) can be used to harvest this energy via two methods. The first method is via the bending of the IPMC causing the mobile cations to move and produces an output voltage pulse, hence capacitive transduction. Secondly, the IPMC in a beam form that resonate at the low vibration frequency due to its relatively low Young's modulus can scavenge additional secondary energy via external electromagnetic transduction to supplement the primary harvested energy via the IPMC capacitive transduction.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125632424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Effect of RF sputtering parameters on PZT crystal growth 射频溅射参数对PZT晶体生长的影响
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559851
Miao Yu, T. Giffney, K. Aw, Haixia Zhang
{"title":"Effect of RF sputtering parameters on PZT crystal growth","authors":"Miao Yu, T. Giffney, K. Aw, Haixia Zhang","doi":"10.1109/NEMS.2013.6559851","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559851","url":null,"abstract":"Lead zirconate titanate(PZT) due to its large polarization, large dielectric constant and good piezoelectric performance has become popular in a wide range of applications in MEMS field. The prevailing technique for PZT deposition is sol-gel method, but the stability of solution and repeated coating can't be precisely controlled. Sputtering technique is used in this work for its relatively simple fabrication process, uniform thickness. In this work, PZT films are sputtered on Pt/Ti/SiO2/Si substrate prior to annealing. PZT preferential orientation is highly depend on the sputtering parameters. X-ray diffraction(XRD) analysis has been performed to compare the crystal growth. TiO2 seed layer is also introduced in this work.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134345879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Label-free separation and sorting of human monocytes and T-cells by electrowetting and dielectrophoresis 人单核细胞和t细胞的电润湿和介质电泳无标记分离和分选
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559863
Cheng-Yeh Huang, M. Chiang, S. Fan, A. Ghaemmaghami, W. Hsu
{"title":"Label-free separation and sorting of human monocytes and T-cells by electrowetting and dielectrophoresis","authors":"Cheng-Yeh Huang, M. Chiang, S. Fan, A. Ghaemmaghami, W. Hsu","doi":"10.1109/NEMS.2013.6559863","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559863","url":null,"abstract":"We report a label-free separation and sorting approach based on electrowetting-on-dielectric (EWOD) and dielectrophoresis (DEP) to manipulate human monocyte (THP-1) and T-cell (Jurkat) lines in droplets without any impact on cell viability. In addition to separating cells, this device provides a platform to study cell-cell interactions and migration before the separation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134506805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Graphene as dry adhesive interacting with semiconductor substrates 石墨烯作为干胶粘剂与半导体衬底相互作用
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559872
Jun Sun, T. Xu, Feng Xu, Xiao Xie, Litao Sun
{"title":"Graphene as dry adhesive interacting with semiconductor substrates","authors":"Jun Sun, T. Xu, Feng Xu, Xiao Xie, Litao Sun","doi":"10.1109/NEMS.2013.6559872","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559872","url":null,"abstract":"Here we show by molecular dynamics that graphene could be utilized as dry adhesive interacting with semiconductor substrates. Various potential semiconductor substrates are introduced and present similar results. This work opens up a new prospect for the applications of graphene and would be valuable for the scientific studies of adhesion at nanoscale.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133684207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of copper nanowires by eelectrodeposition uusing anodic aluminum oxide template 阳极氧化铝模板电沉积制备铜纳米线
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559907
C. Chung, C. Yang, M. Liao, S. Li
{"title":"Fabrication of copper nanowires by eelectrodeposition uusing anodic aluminum oxide template","authors":"C. Chung, C. Yang, M. Liao, S. Li","doi":"10.1109/NEMS.2013.6559907","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559907","url":null,"abstract":"In this paper, effects of potential and output mode on copper nanowire arrays via porous anodic aluminum oxide template by electrochemical deposition method have been investigated. The copper nanowire arrays were fabricated using electrochemical deposition in 0.2 M CuSO4 by different potential modes including direct current (DC) and pulse. The nanostructure, morphology, chemical composition and phase of copper nanowire arrays were examined by scanning electron microscopy and grazing incidence X-ray diffraction. The results indicated that the copper nanowire arrays deposited by pulse mode revealed high aspect ratio despite high potential while that at higher DC potential was rather short due to the hydrogen generation in reduction reaction. The short duty cycle of 50% in pulse deposition can release the produced hydrogen for good nanowires formation.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"174 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133868468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fluid dynamics analysis of magnetically actuated ciliated nano/micro structures for flow mixing and propulsion applications 用于流体混合和推进应用的磁驱动纤毛纳米/微结构的流体动力学分析
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559800
Cheng-Yi Lin, Chia-Yun Chen, Y. Hu, Chia-Yuan Chen
{"title":"Fluid dynamics analysis of magnetically actuated ciliated nano/micro structures for flow mixing and propulsion applications","authors":"Cheng-Yi Lin, Chia-Yun Chen, Y. Hu, Chia-Yuan Chen","doi":"10.1109/NEMS.2013.6559800","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559800","url":null,"abstract":"A series of cilium-like micro structures with magnetic particles embedded were fabricated for precise flow manipulation through the magnetically driven control. A hydrodynamic analysis was performed to elucidate the underlying interaction between ciliated structures and the induced flow fields. To fabricate ciliated structures, the micromachining method together with a casting process was employed. These ciliated structures were actuated in a homogeneous magnetic field generated by an in-house magnetic coil system for various beating cycles inside a microchannel. Three representative signal waveforms were created to mimic the beating nature of cilia for different flow actuating functions, such as micromixing and micropropulsion. To investigate the flow structures of induced flow fields quantitatively, a numerical modeling method using Fluid-Structure-Interaction module was performed. In addition, a micro-particle image velocimetry (μPIV) experiment was conducted to characterize the nonreciprocal movement of ciliated structures for the quantification of hydrodynamic efficiency. By means of the presented analysis paradigms, a new flow manipulation strategy will be suggested to transport/agitate flows efficiently in microfluidics.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117253470","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes Al2O3/W异质结构纳米孔膜:从原生到可调纳米流体二极管
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559890
Songmei Wu, F. Wildhaber, A. Bertsch, J. Brugger, P. Renaud
{"title":"Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes","authors":"Songmei Wu, F. Wildhaber, A. Bertsch, J. Brugger, P. Renaud","doi":"10.1109/NEMS.2013.6559890","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559890","url":null,"abstract":"We present here Al2O3/W hetero-structured nanopore membranes which function as native and electrical field tunable nanofluidic diodes. A typical membrane is 100×100 μm2 in size with pore density of ~20/μm2. The nanopores are 26 nm in diameter and 400 nm in length. Owing to the opposite surface charge states of Al2O3 (positive) and W (negative with native oxide), the membrane exhibits clear rectification of ion current in electrolyte solutions. After thermal heating at 350°C for 2 hrs, approximately 10 nm WOx grows on the surface of W, forming a conformal and dense dielectric layer. The W layer allows the application of an electrical field to further modulate the ionic transport through the nanopores with low gate potentials and ultra low gate leakage current. We have demonstrated the control of rectifying factor from 2 to 11. Our experimental findings have a valuable potential for controllable high throughput molecular separation and chemical processors.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117191962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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