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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems最新文献

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A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications 一种基于范德华力的非易失性存储器双稳态硅纳米纳米机电开关
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559793
B. Soon, N. Singh, J. Tsai, Chengkuo Lee
{"title":"A bi-stable silicon nanofin nanoelectromechanical switch based on van der Waals force for non-volatile memory applications","authors":"B. Soon, N. Singh, J. Tsai, Chengkuo Lee","doi":"10.1109/NEMS.2013.6559793","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559793","url":null,"abstract":"We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able to maintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"226 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133336453","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Ice Fishing Micro channels with sub-micron pores 带有亚微米孔的冰钓微通道
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559909
J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai
{"title":"Ice Fishing Micro channels with sub-micron pores","authors":"J. Kim, Yang Liu, N. Scianmarello, P. Satsanarukkit, Y. Tai","doi":"10.1109/NEMS.2013.6559909","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559909","url":null,"abstract":"We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The control of the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing the Parylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young's pressure induced by the surface tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"234 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133351515","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Bend waveguide with broad bandwidth and high transmission efficiency based on air-hole photonic crystal 基于空穴光子晶体的宽带高传输效率弯曲波导
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559736
Xiaoyuan Ren, Lishuang Feng, Zhili Lin
{"title":"Bend waveguide with broad bandwidth and high transmission efficiency based on air-hole photonic crystal","authors":"Xiaoyuan Ren, Lishuang Feng, Zhili Lin","doi":"10.1109/NEMS.2013.6559736","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559736","url":null,"abstract":"As one of the most competitive materials of the integrated optics, photonic crystals (PCs) have been investigated for more than 20 years since its conception was proposed. In this work, we established a novel structure of the bend waveguide which is composed of photonic crystal (PC) with triangular lattice of air-holes. By optimizing the bend structures, not only the transmission bandwidth of the whole waveguide is greatly improved, but also the transmission efficiency is enhanced. The transmission efficiencies of the wavelengths between 1504nm and 1586nm can reach more than 80%. The highest transmission efficiency 95% can be obtained for the wavelength of 1553nm. By simulating the transmission of the optimized bend waveguide, the light wave whose wavelength is 1553nm can propagate effectively.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134258729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding 低温聚合物键合制备功能SU-8-PET复合微芯片
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559762
R. Yamamoto, K. Sueyoshi, K. Otsuka
{"title":"Functional SU-8-PET composite microchip including Au microdot array fabricated by low temperature polymer bonding","authors":"R. Yamamoto, K. Sueyoshi, K. Otsuka","doi":"10.1109/NEMS.2013.6559762","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559762","url":null,"abstract":"Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array (1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane coupling bonding (140<sup>o</sup>C, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip electrophoresis.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115182425","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mechanical property of nanoscale ZnO/Al2O3 multilayers: An investigation by nano-indentation 纳米ZnO/Al2O3多层膜的力学性能:纳米压痕研究
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559939
Xiu-Qin Wang, Jianning Ding, N. Yuan, G. Cheng, Yuanyuan Zhu, B. Kan
{"title":"Mechanical property of nanoscale ZnO/Al2O3 multilayers: An investigation by nano-indentation","authors":"Xiu-Qin Wang, Jianning Ding, N. Yuan, G. Cheng, Yuanyuan Zhu, B. Kan","doi":"10.1109/NEMS.2013.6559939","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559939","url":null,"abstract":"Nanoscale ZnO/Al2O3 multilayers were prepared on Silicon substrates by atomic layer deposition (ALD) method at 200°C. To understand the size effect of ZnO nanoscale layers on hardness, the mechanical properties of the ZnO/Al2O3 multilayers were investigated using nano-indentation technique. As the bilayer period decreases from 60 to 2 nm, the micro-structures of ZnO layers changed from polycrystalline to amorphous. In the bilayer period interval of 60 to 6 nm, the variation of hardness versus bilayer period is similar to Hall-Patch relation, with maximum hardness and elastic modulus of ~10.69GPa and ~138.1GPa, respectively. However when the bilayer period is smaller than 6 nm, the nanolaminates became softer than the single ZnO film.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115553302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes Al2O3/W异质结构纳米孔膜:从原生到可调纳米流体二极管
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559890
Songmei Wu, F. Wildhaber, A. Bertsch, J. Brugger, P. Renaud
{"title":"Al2O3/W hetero-structured nanopore membranes: From native to tunable nanofluidic diodes","authors":"Songmei Wu, F. Wildhaber, A. Bertsch, J. Brugger, P. Renaud","doi":"10.1109/NEMS.2013.6559890","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559890","url":null,"abstract":"We present here Al2O3/W hetero-structured nanopore membranes which function as native and electrical field tunable nanofluidic diodes. A typical membrane is 100×100 μm2 in size with pore density of ~20/μm2. The nanopores are 26 nm in diameter and 400 nm in length. Owing to the opposite surface charge states of Al2O3 (positive) and W (negative with native oxide), the membrane exhibits clear rectification of ion current in electrolyte solutions. After thermal heating at 350°C for 2 hrs, approximately 10 nm WOx grows on the surface of W, forming a conformal and dense dielectric layer. The W layer allows the application of an electrical field to further modulate the ionic transport through the nanopores with low gate potentials and ultra low gate leakage current. We have demonstrated the control of rectifying factor from 2 to 11. Our experimental findings have a valuable potential for controllable high throughput molecular separation and chemical processors.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117191962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Tunable graphene nanomesh semiconductor: Design, fabrication, and characterization 可调谐石墨烯纳米半导体:设计、制造和表征
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559920
H. Al-Mumen, F. Rao, Lixin Dong, Wen Li
{"title":"Tunable graphene nanomesh semiconductor: Design, fabrication, and characterization","authors":"H. Al-Mumen, F. Rao, Lixin Dong, Wen Li","doi":"10.1109/NEMS.2013.6559920","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559920","url":null,"abstract":"This paper reported a technique for tuning graphene semiconductor properties by introducing nanoholes into single- and few-layer graphene films. A simple nanofabrication technique has been demonstrated for making periodic nanoholes on pristine graphene in a mask-free and time-efficient manner via direct e-beam writing which was done by simply scanning the graphene area that is covered with EBL resist and then etching the scanned area by oxygen plasma. Parameters of e-beam lithography (EBL) (acceleration voltage, beam current, EBL resist thickness, and scanning area) were fine-tuned to optimize the dimensions of the nanomesh. Finally, Graphene field effect transistors were fabricated and characterized experimentally.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116135163","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of substrate surface roughness on the properties of a planar-type CO2 sensor using evaporated Li3PO4 film 衬底表面粗糙度对蒸发Li3PO4薄膜平面型CO2传感器性能的影响
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559756
Hairong Wang, Peng Li, G. Sun, Zhuangde Jiang
{"title":"Influence of substrate surface roughness on the properties of a planar-type CO2 sensor using evaporated Li3PO4 film","authors":"Hairong Wang, Peng Li, G. Sun, Zhuangde Jiang","doi":"10.1109/NEMS.2013.6559756","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559756","url":null,"abstract":"Planar-type potentiometric CO<sub>2</sub> gas sensors using thermal evaporated Li<sub>3</sub>PO<sub>4</sub> thin film as the solid electrolyte were fabricated. Al<sub>2</sub>O<sub>3</sub> plates with rough and smooth surfaces were used as the substrates of the sensors. X-ray diffraction analysis, atomic force microscope and scanning electron microscope were used to characterize the Li<sub>3</sub>PO<sub>4</sub> films. The sensing properties were investigated in the range of 500~5000 ppm CO<sub>2</sub> concentrations at 480 °C. Both the rough substrate sensor (rsensor) and the smooth substrate sensor (s-sensor) showed a good Nernst behavior. The output EMF of s-sensor showed a more stable signal than the r-senor. Response and recovery times of the r-sensor were 40 s and 75 s, and for the s-sensor they were 35 s and 60 s. The ΔEMF/decade values obtained from the r-sensor and s-sensor were 45 mV/decade and 55 mV/decade, respectively. It can be found that the Nernst's slop of the s-sensor was closer to the theoretically value. The results revealed that the substrate surface roughness may influence the characteristics of Li<sub>3</sub>PO<sub>4</sub> film and the response properties of the sensors to CO<sub>2</sub>.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"148 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123429261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm 基于协调旋转数字计算机算法的微机械陀螺仪数字闭环驱动设计
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559924
Yuxian Liu, Chunhua He, Dachuan Liu, Zhenchuan Yang, G. Yan
{"title":"Digital closed-loop driver design of micromechanical gyroscopes based on coordinated rotation digital computer algorithm","authors":"Yuxian Liu, Chunhua He, Dachuan Liu, Zhenchuan Yang, G. Yan","doi":"10.1109/NEMS.2013.6559924","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559924","url":null,"abstract":"A novel digital closed-loop driver is presented for a micromechanical vibratory gyroscope in this paper. Coordinated rotation digital computer algorithm is applied to generate the sine and cosine signals for driving and demodulation processing. Meanwhile, automatic gain control and phase-locked loop are adopted to maintain a constant velocity of the drive mode and guarantee the gyroscope working in the resonant mode. All the control methods are implemented in FPGA device. Experimental results demonstrate that the stability of the amplitude of the drive velocity is about 18ppm, which verifies the effectiveness and accuracy of the digital closed loop for the drive mode. The scale factor, nonlinearity and bias instability of the gyroscope with closed loop controlled sense mode are measured to be 18.5mV/deg/s, 0.088% and 19.4deg/h, respectively.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123497054","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Hybrid lithography system for MEMS/NEMS 用于MEMS/NEMS的混合光刻系统
The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI: 10.1109/NEMS.2013.6559737
Linsen Chen, D. Pu, Jin Hu, Y. Ye, P. Zhu
{"title":"Hybrid lithography system for MEMS/NEMS","authors":"Linsen Chen, D. Pu, Jin Hu, Y. Ye, P. Zhu","doi":"10.1109/NEMS.2013.6559737","DOIUrl":"https://doi.org/10.1109/NEMS.2013.6559737","url":null,"abstract":"Micro/nano structures are involved in MEMS/NEMS, SPs sensors, and optical devices with kinetic optical effects, which cannot be mixture fabricated on curved surface by conventional lithography for the frozen processing in the vertical direction. In this letter, a hybrid-lithography system for micro/nano structures is proposed, which mainly consists of a spatial light modulator (SLM), binary phase light modulator (PLM) and UV optical head equipped with position sensor. It is the SLM and PLM as well as auto-optical focusing (AOF) and Z-correction that make micro/nano hybrid fabrication on bended surface available. The proposed system could automatically focus on the photoresist surface with accuracy of 0.3 μm in Z-direction and achieve minimum feature size of 100 nm at 351 nm lithography wavelength. The obtained maximum speed of 2400 mm2/min is the fastest one in the world, when the system flying exposes with 3D navigation under the beam-tiled-flash-patterning (BTFP) scan mode.","PeriodicalId":308928,"journal":{"name":"The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems","volume":"205 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123258710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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