Wear最新文献

筛选
英文 中文
Effects of photocatalyst with different physical phases and properties on tribochemical reaction of 4H-SiC
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-18 DOI: 10.1016/j.wear.2025.206042
Zhijun Chen, Qiusheng Yan, Jisheng Pan, Hanhao Liu, Kaiyuan Luo, Jingyuan Zheng
{"title":"Effects of photocatalyst with different physical phases and properties on tribochemical reaction of 4H-SiC","authors":"Zhijun Chen,&nbsp;Qiusheng Yan,&nbsp;Jisheng Pan,&nbsp;Hanhao Liu,&nbsp;Kaiyuan Luo,&nbsp;Jingyuan Zheng","doi":"10.1016/j.wear.2025.206042","DOIUrl":"10.1016/j.wear.2025.206042","url":null,"abstract":"<div><div>In photocatalytic-assisted magnetorheological polishing (PMRP), both the opacity of the magnetorheological fluid and the non-magnetic properties of the photocatalyst limit the processing efficiency and quality of SiC wafers. In this paper, the magnetorheological fluid is prepared by using photocatalysts with different physical phases (liquid/solid) and properties (magnetic/non-magnetic), and then the friction chemical mechanism is carried out on SiC. The results show that the transmittance of the magnetorheological fluid and the distribution state of the photocatalyst synergistically cooperate to control the chemical oxidation rate of single-crystal SiC. When using magnetic particles with photocatalytic coatings for processing, the photocatalytic reaction spots can be effectively constrained and the SiC oxidation efficiency can be improved.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206042"},"PeriodicalIF":5.3,"publicationDate":"2025-03-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143747727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Sliding wear behaviour under electromechanical loading of a grease-lubricated ball-on-disk bearing steel contact
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-13 DOI: 10.1016/j.wear.2025.206029
G.V. Balakrishna, R. Gnanamoorthy
{"title":"Sliding wear behaviour under electromechanical loading of a grease-lubricated ball-on-disk bearing steel contact","authors":"G.V. Balakrishna,&nbsp;R. Gnanamoorthy","doi":"10.1016/j.wear.2025.206029","DOIUrl":"10.1016/j.wear.2025.206029","url":null,"abstract":"<div><div>Traction motor bearings in electric vehicles experience electromechanical loads and the current flow causes morphological damage to the raceways and rolling elements. The variations in the contact region due to dynamic operating conditions result in different contact mechanisms under combined electrical and mechanical loading. Simulated studies of electromechanical contact between ball and raceway in bearing are carried out in an in-house developed tribo-device. At different applied voltages, variations in friction coefficient and current flow through the contact are reported. A stable current flow at the contact is found to occur beyond a critical applied voltage and this influences the friction and wear characteristics. The wear scars exhibited discharge pits, spot weld regions and abrasive tracks with grease residues. The morphological damages are related to the lubricant film thickness variations within the contact estimated using numerical simulation. Spot weld regions and discharge pits are found in regions of high film thickness and the abrasive tracks in regions of low film thickness.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206029"},"PeriodicalIF":5.3,"publicationDate":"2025-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143641683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Performance evaluation of GNPs-Cu/ZrO2 multicomponent hybrid nanofluids in MQL-assisted turning of Inconel 718
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-12 DOI: 10.1016/j.wear.2025.206024
Enzhao Cui , Jinhao Ma , Baoliang Zha , Kun Li , Guangming Zheng , Xiang Cheng , Lei Gu
{"title":"Performance evaluation of GNPs-Cu/ZrO2 multicomponent hybrid nanofluids in MQL-assisted turning of Inconel 718","authors":"Enzhao Cui ,&nbsp;Jinhao Ma ,&nbsp;Baoliang Zha ,&nbsp;Kun Li ,&nbsp;Guangming Zheng ,&nbsp;Xiang Cheng ,&nbsp;Lei Gu","doi":"10.1016/j.wear.2025.206024","DOIUrl":"10.1016/j.wear.2025.206024","url":null,"abstract":"<div><div>Inconel 718 superalloys are considered as a hard-to-cut material for their low thermal conductivity which is responsible for high cutting temperature, inferior surface quality and serious tool wear. To reduce the cutting temperature and tool wear during the minimum quantity lubrication (MQL) assisted machining process of Inconel 718, graphene nanoplates (GNPs)-copper (Cu)/zirconium oxide (ZrO<sub>2</sub>) multicomponent hybrid nanofluids (NFs) were prepared using GNPs-Cu nanocomposites and ZrO<sub>2</sub> nanoparticles as soft and hard phase respectively. Firstly, GNPs-Cu nanocomposites were prepared by oxidation-reduction method and characterized. Then, investigations about the wettability, viscosity, thermal conductivity of prepared hybrid nanofluids were carried out and performance in MQL-assisted turning of Inconel 718 were analyzed. Results show that wettability and thermal conductivity of lubricant increase by 57.76 % and 38.87 % respectively with the addition of GNPs-Cu/ZrO<sub>2</sub> (2:1) hybrid nanoparticles compared with that of base oil. Owing to the excellent performance in cooling and lubrication of hybrid NFs, the cutting temperature and the cutting force were significantly decreased and the finish of the machined surface was improved under hybrid NFs MQL-assisted cutting. Besides, the tool wear was decreased by 30.02 % when cutting the same distance compared to that of base lubricant. The analysis of tool wear indicated that the optimal hybrid NFs can not only greatly diminish the adhesive wear but also prolong the tool life. The GNPs-Cu/ZrO<sub>2</sub> nanoparticles can enhance the formation of stable tribo-film with high load-bearing capacity through the outstanding lubricity of GNPs, surface repairing of soft nanoparticles (Cu) as well as the polishing and ball-bearing effects of hard particles (ZrO<sub>2</sub>).</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206024"},"PeriodicalIF":5.3,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143632107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mapping of friction, wear and particle emissions from high-speed train brakes
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-11 DOI: 10.1016/j.wear.2025.206027
Yezhe Lyu , Qixiang Zhang , Leonie Tanzeglock , Minghui Tu , Jiliang Mo , Tomoaki Okuda , Joakim Pagels , Jens Wahlström
{"title":"Mapping of friction, wear and particle emissions from high-speed train brakes","authors":"Yezhe Lyu ,&nbsp;Qixiang Zhang ,&nbsp;Leonie Tanzeglock ,&nbsp;Minghui Tu ,&nbsp;Jiliang Mo ,&nbsp;Tomoaki Okuda ,&nbsp;Joakim Pagels ,&nbsp;Jens Wahlström","doi":"10.1016/j.wear.2025.206027","DOIUrl":"10.1016/j.wear.2025.206027","url":null,"abstract":"<div><div>This study reports contact pressure-sliding speed maps for friction, wear and particle emissions from high-speed train brakes. Two particle spectrometers measured the airborne wear particles generated with a pin-on-disc tribometer. Particles were characterized with transmission electron microscopy and energy dispersive X-ray fluorescence. The results indicate that both the friction and wear of brake pads and discs gradually decreased as sliding speed increased, which showed less dependence on contact pressure. Particle concentrations gradually increased with increasing sliding speed. Low contact pressure and sliding speed tended to generate particles smaller than 2.5 μm. The train brake emitted particles had higher average geometric mean diameters than the car brake emitted particles, which were primarily composed of iron, copper and chromium and were oxidized.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206027"},"PeriodicalIF":5.3,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143620898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of torque adjustment rates and increments on wheel-rail adhesion instability behavior under various speed and axle load conditions
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-11 DOI: 10.1016/j.wear.2025.206026
Xinxin Song , Wenjian Wang , Shuyue Zhang , Jun Guo , Xin Zhao , Hongfeng Qi , Haohao Ding , Zhongrong Zhou
{"title":"Effects of torque adjustment rates and increments on wheel-rail adhesion instability behavior under various speed and axle load conditions","authors":"Xinxin Song ,&nbsp;Wenjian Wang ,&nbsp;Shuyue Zhang ,&nbsp;Jun Guo ,&nbsp;Xin Zhao ,&nbsp;Hongfeng Qi ,&nbsp;Haohao Ding ,&nbsp;Zhongrong Zhou","doi":"10.1016/j.wear.2025.206026","DOIUrl":"10.1016/j.wear.2025.206026","url":null,"abstract":"<div><div>During the locomotive traction process, if the tangential force exceeds the maximum adhesion force of the wheel-rail interface, wheel-rail adhesion instability occurs, leading to accelerated damage to the contact surface due to severe wear. Therefore, it is important to study the dynamic behavior of wheel-rail adhesion instability to improve the safety and stability of the train operations. A novel wheel-rail rolling contact experiment machine based on torque control was designed and established to investigate the wheel-rail adhesion instability behavior. The results show that: As the torque of the loading motor increased, the slip ratio initially increased steadily, then rapidly rose and fluctuated. With the decrease in torque adjustment rate, the fluctuation of the slip ratio decreased. Meanwhile, the torque increments had an impact on adhesion instability behavior. When the torque increment was less than 0.6 Nm, with the increase in torque increment, the slip ratio initially increased and then decreased, while the wheel-rail adhesion coefficient increased. However, when the torque increment exceeded 0.6 Nm, as the torque increment increased, the maximum slip ratio remained constant, while the adhesion coefficient decreased, leading to the slippage of the wheel-rail roller. In addition, with the axle loads and rotational speeds increased, the maximum slip ratio and adhesion coefficient decreased. Also, the function relationship between the slip ratio and the torque increment after the critical point (adhesion force saturation point) was proposed, which can provide guidance for vehicles to adjust the adhesion coefficient.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206026"},"PeriodicalIF":5.3,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143644141","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of intermittent airflow on rolling contact damage characteristics of wheel steels in a low-temperature environment: Airflow humidity
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-11 DOI: 10.1016/j.wear.2025.206025
Zhixiong Bai , Jinbo Zhou , Yanwen Lin , Jiaqiang Li , Chunying Ma , Mingxue Shen
{"title":"Effects of intermittent airflow on rolling contact damage characteristics of wheel steels in a low-temperature environment: Airflow humidity","authors":"Zhixiong Bai ,&nbsp;Jinbo Zhou ,&nbsp;Yanwen Lin ,&nbsp;Jiaqiang Li ,&nbsp;Chunying Ma ,&nbsp;Mingxue Shen","doi":"10.1016/j.wear.2025.206025","DOIUrl":"10.1016/j.wear.2025.206025","url":null,"abstract":"<div><div>In cold regions, warm and humid airflow is easily generated in tunnels with geothermal heat. As trains travel through these tunnels, sudden fluctuations in airflow conditions, temperature and humidity easily cause premature contact damage to the wheel surface. Therefore, the investigation of rolling contact damage behaviour of wheel steels under intermittent airflow could provide support for the stable operation of wheel-rail systems under such extreme service conditions. In this paper, the effects of intermittent airflow with different humidity on the damage characteristics of wheels in a low-temperature environment were investigated using a wheel-rail rolling contact tester. The results showed that the introduction of intermittent airflow mitigated wear but accelerated fatigue cracking during the rolling contact process. With the airflow humidity increased from RH = 5 % to RH = 90 %, the wear mechanism of wheel steels experienced delamination wear, adhesive-oxidative-abrasive wear and delamination-fatigue wear. At low airflow humidity, the increased proportion of small-angle grain boundaries, improved fine grain strengthening and dislocation strengthening provided mechanical support for contact damage resistance. When the humidity of the airflow was moderate, the work-hardening and contact damage at the contact interfaces were weakened, with surface oxidation occurring. Conversely, high-humidity airflow accelerated crack extension on the damaged surface. Additionally, the wheel-rail interface may experience low adhesion when exposed to warm and humid airflow. In summary, reducing humidity in the tunnels is beneficial for mitigating contact damage and extending service life.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206025"},"PeriodicalIF":5.3,"publicationDate":"2025-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143620897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Friction reduction mechanism on the grinding interface during nanofluid minimum quantity lubrication grinding FRP 纳米流体最小量润滑磨削玻璃钢过程中磨削界面的减摩机制
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-10 DOI: 10.1016/j.wear.2025.206021
Bingyu Zhao , Ben Wang , Qi Zhang , Chang Song , Hongdi Chu , Honggang Yin
{"title":"Friction reduction mechanism on the grinding interface during nanofluid minimum quantity lubrication grinding FRP","authors":"Bingyu Zhao ,&nbsp;Ben Wang ,&nbsp;Qi Zhang ,&nbsp;Chang Song ,&nbsp;Hongdi Chu ,&nbsp;Honggang Yin","doi":"10.1016/j.wear.2025.206021","DOIUrl":"10.1016/j.wear.2025.206021","url":null,"abstract":"<div><div>Fiber-reinforced resin matrix composites (FRP) are highly abrasive, and there is strong friction between the fibers and the abrasive grain during the grinding process. Nanofluid minimum quantity lubrication (NMQL) is an excellent lubrication technology that can significantly reduce the friction force. To investigate the lubrication performance of different nanoparticles, this study analyzed the friction reduction mechanism of tubular, layered, hexahedral, and spherical nanoparticles on the grinding interface based on tribological theory. Secondly, CNTs, MoS<sub>2</sub>, SiC, CuO, and Al<sub>2</sub>O<sub>3</sub> were selected to represent tubular, laminar, hexahedral, and spherical nanoparticles for grinding experiments to verify the validity of this mechanism. The results showed that the grinding forces F<sub>n</sub>, F<sub>t</sub>, and F<sub>r</sub> were reduced by 86.7 %, 68.9 %, and 81.2 %, respectively, in the NMQL-Al<sub>2</sub>O<sub>3</sub> condition compared to the dry grinding condition. The micro morphology of the grinding surface showed that the fiber damage was the lowest under the NMQL-Al<sub>2</sub>O<sub>3</sub> condition. Sa, Sz, and Sq were reduced by 62.9 %, 50.5 %, and 57.8 % under NMQL-Al<sub>2</sub>O<sub>3</sub> compared to dry grinding conditions. These results show that high-hardness spherical nanoparticles (Al<sub>2</sub>O<sub>3</sub>) are beneficial in reducing the friction, have better lubrication performance, and can significantly reduce fiber wear during the FRP grinding process.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206021"},"PeriodicalIF":5.3,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143687034","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improvement of wear scar volume estimation in reciprocating motion
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-10 DOI: 10.1016/j.wear.2025.206023
Pawlus Pawel , Reizer Rafal
{"title":"Improvement of wear scar volume estimation in reciprocating motion","authors":"Pawlus Pawel ,&nbsp;Reizer Rafal","doi":"10.1016/j.wear.2025.206023","DOIUrl":"10.1016/j.wear.2025.206023","url":null,"abstract":"<div><div>Reduction of errors in wear measurement is a task of great functional significance. Reciprocating testers are commonly used to study the wear of engineering materials. However, the estimation of wear scar volume based on only one cross section for strokes smaller than 2.5 mm, proposed in the standard, often leads to incorrect results. In this work, the results of the measurement of 70 steel samples were analysed using a white light interferometer. The strokes were between 0.1 and 2 mm. The results achieved using areal (3D) surface topography measurement were treated as reference. It was found that the use of the standardised method caused an overestimation of the wear volume of up to 27.2 %; the average error was 13.9 %. The improvement of this method based mainly on measurement of three profiles perpendicular to the wear scar in its central part and near the round edges within the stroke led to reduction of maximum errors to 14.1 % and of average errors to 4.5 %. The criterion of the necessity of using the improved procedure of approximation of the volume of the wear scar was proposed.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206023"},"PeriodicalIF":5.3,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143601159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effect of pores on the performance of diamond grinding wheels fabricated by laser additive manufacturing
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-10 DOI: 10.1016/j.wear.2025.206019
Shichun Li , Min Ou , Wenjing Cai , Junzhe Li , Quanhai Xiao , Mengcen Zou
{"title":"Effect of pores on the performance of diamond grinding wheels fabricated by laser additive manufacturing","authors":"Shichun Li ,&nbsp;Min Ou ,&nbsp;Wenjing Cai ,&nbsp;Junzhe Li ,&nbsp;Quanhai Xiao ,&nbsp;Mengcen Zou","doi":"10.1016/j.wear.2025.206019","DOIUrl":"10.1016/j.wear.2025.206019","url":null,"abstract":"<div><div>When using laser additive manufacturing to fabricate multi-layer abrasive diamond wheels, the pores within the abrasive segments are favorable factors for grinding performance, which should be reasonably designed and utilized. In this paper, laser additive technology is employed to fabricate grinding wheel abrasive segments. The pore characteristics of these segments are examined and quantitatively analyzed, followed by tests on their mechanical and grinding properties. Ultimately, the study explores and elucidates the relationship between pore characteristics and the mechanical and wear properties of the abrasive segments. Based on these findings, optimization recommendations for the pore structure of the grinding wheels are provided. The results indicate that the porosity of the fabricated abrasive segments ranges from 18 % to 27 %, with the pore equivalent diameter predominantly between 500 μm and 700 μm. The pore shapes are primarily rod and discoid, and the sphericity of the pores is mainly distributed between 0.3 and 0.65. When the porosity is less than 24.4 %, the abrasive segments exhibit higher elastic modulus and tensile strength. As the pore minimum equivalent diameter increases, the elastic modulus decreases. Conversely, an increase in the proportion of spherical pores contributes to an enhancement in tensile strength. Higher porosity, larger pore dimensions, and a greater proportion of spherical pores lead to increased wear and fragmentation of the diamonds, worsening wear morphology, and elevated temperatures during the grinding process. Consequently, it is recommended that the design of pore structures incorporate a balance of moderate porosity, smaller pore sizes, and a variety of pore shapes to optimize the comprehensive performance of the abrasive segments.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206019"},"PeriodicalIF":5.3,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143641718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Unexpected decreased material removal rate in copper chemical mechanical polishing due to reduced electrostatic attraction caused by dicarboxylic acid
IF 5.3 1区 工程技术
Wear Pub Date : 2025-03-10 DOI: 10.1016/j.wear.2025.206022
Liang Jiang , Wenhui Li , Xia Zhong, Rui Lei, Yushan Chen, Xin Li, Linmao Qian
{"title":"Unexpected decreased material removal rate in copper chemical mechanical polishing due to reduced electrostatic attraction caused by dicarboxylic acid","authors":"Liang Jiang ,&nbsp;Wenhui Li ,&nbsp;Xia Zhong,&nbsp;Rui Lei,&nbsp;Yushan Chen,&nbsp;Xin Li,&nbsp;Linmao Qian","doi":"10.1016/j.wear.2025.206022","DOIUrl":"10.1016/j.wear.2025.206022","url":null,"abstract":"<div><div>Electrostatic force, as a part of the interaction between the abrasive particles and the wafer surface, influences chemical mechanical polishing (CMP). However, current studies lack relevant mechanisms, restricting the advancement of copper CMP. This study investigated the role of the electrostatic force in copper CMP via choosing complexing agents to tune the electrostatic force besides their complexation effect. The results reveal that at acidic pH and with a low concentration of H<sub>2</sub>O<sub>2</sub>, the material removal rate (MRR) of copper decreases unexpectedly after adding dicarboxylic acids. The decrement is as high as 75 % after adding 1 mM adipic acid. For the mechanism, copper CMP is a nanoscale corrosive wear process. Wear is influenced by interfacial interaction. After adding adipic acid, its anions can be adsorbed, neutralizing the surface potential of cuprous oxide. Therefore, the electrostatic attraction between the silica abrasive particles and the copper surface, which is the major part of the adhesion force, decreases. Accordingly, the wear effect is weakened, and the MRR decreases. Additionally, zwitterions of amino acids do not alter the surface potentials but enhance the corrosion, and thus the MRR increases. Zwitterionic amino acids are recommended. This study provides insights into material removal in copper CMP.</div></div>","PeriodicalId":23970,"journal":{"name":"Wear","volume":"572 ","pages":"Article 206022"},"PeriodicalIF":5.3,"publicationDate":"2025-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143687033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信