2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献_第3页

A high-performance resonant MEMS accelerometer with a residual bias error of 30 μg and scale factor repeatability of 2 ppm 一种残余偏置误差为30 μg，标度因子重复性为2 ppm的高性能谐振式MEMS加速度计

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103976

Lokesh Gurung, T. Miani, Guillermo Sobreviela-Falces, Douglas Young, Colin Baker, A. Seshia

引用次数: 0

A Low-Voltage Wideband AlN-on-Si Gyroscope With Sub 10-DPH Bias Instability Mode Matched Using Laser Trimming 一种低电压宽带亚10-DPH偏置不稳定模式激光微调匹配的铝硅陀螺

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104003

Zhenming Liu, H. Wen, Farrokh Ayazi

引用次数: 3

Compensation of Non-Orthogonality Changes in Low-Cost MEMS Gyroscopes Across Soldering, Temperature and Lifetime 低成本MEMS陀螺仪跨焊接、温度和寿命的非正交性补偿

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103996

T. Hiller, Patrick Tritschler, Lukas Blocher, Wolfram Mayer, Miloš Vujadinović, T. Balslink, M. Schöfthaler, T. Northemann

{"title":"Compensation of Non-Orthogonality Changes in Low-Cost MEMS Gyroscopes Across Soldering, Temperature and Lifetime","authors":"T. Hiller, Patrick Tritschler, Lukas Blocher, Wolfram Mayer, Miloš Vujadinović, T. Balslink, M. Schöfthaler, T. Northemann","doi":"10.1109/INERTIAL56358.2023.10103996","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103996","url":null,"abstract":"This paper examines changes of non-orthogonality in 40 consumer-grade, triaxial MEMS gyroscopes across three different environmental conditions: Soldering, temperature and accelerated lifetime testing. We find that through all three treatments, similar correlations of $yx$ non-orthogonality change to z-axis quadrature change appear. We attribute the behavior to a common susceptibility to mechanical stress. Consequently, we evaluate the feasibility of an in-run, active compensation of non-orthogonality using only the sensor-internal quadrature signal. Improved $yx$ non-orthogonalities reach stability between $pm 0.021{%}$ and $pm 0.040{%}$ with a reduction of −73% across soldering, up to −69% across temperature and −55% across lifetime. We also demonstrate that the non-orthogonality changes of the devices across each of the three environmental conditions do not correlate to each other. It is furthermore shown, that the other two non-orthogonalities, $zx$ and $zy$, offer excellent stability below $pm 0.015{%}$ across temperature solely by design.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133328111","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Out of Plane Double Differential Quadrature Compensation Electrodes with ThELMA-Double Technology 基于ThELMA-Double技术的平面外双微分正交补偿电极

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103994

P. Fedeli, L. Falorni, G. J. Yallico Sanchez, M. Riani, G. Gattere

引用次数: 0

MEMS Directional Underwater Acoustic Sensor Operating in Near Neutral Buoyancy Configuration 近中性浮力配置下的MEMS定向水声传感器

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104015

Justin Ivancic, Jeffrey K. Catterlin, G. Karunasiri, F. Alves

{"title":"MEMS Directional Underwater Acoustic Sensor Operating in Near Neutral Buoyancy Configuration","authors":"Justin Ivancic, Jeffrey K. Catterlin, G. Karunasiri, F. Alves","doi":"10.1109/INERTIAL56358.2023.10104015","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10104015","url":null,"abstract":"This paper reports on the functionality of a MEMS directional acoustic sensor housed in an air cavity and operated underwater in a near-neutral buoyancy configuration. The sensor operates at a resonance which provides enhanced sensitivity over traditional hydrophones and demonstrates a cosine-like angular dependance with respect to the arrival angle of incident sound. Rapid prototyping techniques were used to design and build a neutrally buoyant housing for achieving optimal sensitivity and directional response. In this neutrally buoyant configuration, the MEMS sensor acts as an accelerometer measuring the vibration of the housing in response to sound rather than acoustic pressure directly. Frequency and directional response data of the MEMS sensor were taken in a water filled, vertical, standing wave tube. The data show a maximum sensitivity of approximately 210 mV/Pa at the resonance frequency of the sensor (676 Hz) with sound normally incident to the plane of the sensor. 360-degree rotations of the sensor show a cosine-like angular dependance of the sensor. The results indicate that this type of MEMS sensor can be operated in a near-neutral buoyant configuration while achieving high sensitivity and good directional response, making this sensor design ideal for detecting and determining the direction of distant or quiet underwater acoustic sources.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122039214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

REDUCING THERMO-ELASTIC DAMPING OF MEMS RESONATORS USING A VIRTUAL SPRING 利用虚拟弹簧减小mems谐振器的热弹性阻尼

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103974

Chen Tang, Zhiheng Wu, M. Heller, D. Nishinohara, T. Fujita, T. Ikehashi

引用次数: 0

Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology 后cmos技术制造的带质量证明位置控制电极的金单轴差分电容式MEMS加速度计

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103943

Akira Onishi, Kisuke Miyado, Devi Srujana Tenneti, K. Machida, Parthojit Chakraborty, M. Sone, Yoshihiro Miyake, Hiroyuki Ito

{"title":"Gold Single-Axis Differential Capacitive MEMS Accelerometer With Proof-Mass Position Control Electrode Fabricated by Post-CMOS Technology","authors":"Akira Onishi, Kisuke Miyado, Devi Srujana Tenneti, K. Machida, Parthojit Chakraborty, M. Sone, Yoshihiro Miyake, Hiroyuki Ito","doi":"10.1109/INERTIAL56358.2023.10103943","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103943","url":null,"abstract":"This paper presents a gold single-axis differential capacitive MEMS accelerometer with a proof-mass position control electrode. The proposed device consists of the proof-mass position control electrode separating from the detection electrode to avoid feedback cross-talk. To realize the proposed device structure, the relationship between the control voltage and displacement with the single proof-mass is investigated regarding the MEMS accelerometer design for micro-g $(1mathrm{g}= 9.8mathrm{m}/mathrm{s}^{2})$ level sensing. The fabricated devices indicate that the displacement of 1.01 $upmu mathrm{m}$ can be obtained by a 3.0 V control voltage. Moreover, experimental results of the device characteristics show a sensitivity and Brownian noise $B_{mathrm{N}}$ of 1.18 $text{pF}/mathrm{G}$ and 341 $text{nG}/surdtext{Hz}$, respectively. Evaluation results based on the measured data provided a total noise less than 10 $upmumathrm{G}/surdtext{Hz}$, which is 3.64 $upmumathrm{G}/surdtext{Hz}$, the target value to realize micro-g level sensing. In conclusion, these results confirm that the proposed device has a potential for establishing the high-performance CMOS-MEMS accelerometer by proof-mass position control.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129473839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Low frequency inertial sensing 低频惯性传感

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103942

Andrea Nelson, A. Hines, Guillermo Valdés, J. Sanjuan, F. Guzmán

引用次数: 0

A Navigation Grade, Software Defined Gyroscope and Extensions for Generic Vibratory Inertial Sensors 通用振动惯性传感器的导航级、软件定义陀螺仪及其扩展

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104002

David Hayner, D. Challoner

引用次数: 1

Quadrature Compensation and Demodulation Phase Reference Selection for FM Accelerometers 调频加速度计的正交补偿与解调相位参考选择

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103973

A. Sabater

引用次数: 0