Out of Plane Double Differential Quadrature Compensation Electrodes with ThELMA-Double Technology

Abstract

In this paper, a new architecture of double differential quadrature compensation electrodes to enable high performance gyroscope is presented. Their fabrication is allowed by a novel micromachining technology, known as ThELMA-Double process [1], which is an evolution of standard STMicroelectronics ThELMA technology. Analytical and numerical models have been adopted during the design steps to estimate the advantages of this innovative structure as compared to standard solution. The focus is on increasing the quadrature compensation capability and improving the scale factor stability. Preliminary experimental characterization proves the validity of the simulation models and the effectiveness of the proposed architecture.