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2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

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Quantifying IMU Forward Models 量化IMU正向模型
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/inertial56358.2023.10103978
{"title":"Quantifying IMU Forward Models","authors":"","doi":"10.1109/inertial56358.2023.10103978","DOIUrl":"https://doi.org/10.1109/inertial56358.2023.10103978","url":null,"abstract":"Quantifying IMU Forward Models.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125155628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes Lissajous调频MEMS陀螺仪的带宽与ZRO稳定性权衡
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103804
M. Bestetti, G. Mussi, G. Gattere, Christian Padovani, A. Bonfanti, G. Langfelder
{"title":"Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes","authors":"M. Bestetti, G. Mussi, G. Gattere, Christian Padovani, A. Bonfanti, G. Langfelder","doi":"10.1109/INERTIAL56358.2023.10103804","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103804","url":null,"abstract":"The research highlights a significant challenge in microelectromechanical system (MEMS) gyroscopes operated under Lissajous frequency modulation (FM). While providing excellent inherent scale-factor stability performance and scale-factor independence of the mode mismatch, this operating principle suffers from a strict requirement in the implementation of the motion amplitude control on the two axes. It is shown how, unless a few-Hz (only) bandwidth is targeted, different amplitude-gain control (AGC) designs are all challenged and give rise to spurious harmonics which, after additional demodulation, may turn into a spurious offset, which undermines the system stability performance.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122912549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
An Inverted Pendulum Model of Walking for Predicting Navigation Uncertainty of Pedestrian in Case of Foot-mounted Inertial Sensors 基于足部惯性传感器的倒立摆行走模型预测行人导航不确定性
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104017
Chi-Shih Jao, Eudald Sangenis, Paula Simo, Alexandra S. Voloshina, A. Shkel
{"title":"An Inverted Pendulum Model of Walking for Predicting Navigation Uncertainty of Pedestrian in Case of Foot-mounted Inertial Sensors","authors":"Chi-Shih Jao, Eudald Sangenis, Paula Simo, Alexandra S. Voloshina, A. Shkel","doi":"10.1109/INERTIAL56358.2023.10104017","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10104017","url":null,"abstract":"This paper presents a simplified model for predicting navigation uncertainty of a pedestrian. The model simulates trajectories of a person's foot, and these trajectories are then used to generate simulated IMU readings. Eight different noise errors are considered for both the simulated accelerometer and gyroscope readings, including white noise, bias instability, random walk, scale factor error, misalignment, turn-on bias, limited full-scale range, and limited bandwidth. We conducted a series of pedestrian walking experiments to validate the proposed model. The experimental results showed that the position Root-Mean-Square-Errors (RMSEs) in the simulations and in the experiments had a discrepancy of 6% for about 40 [m] of walk. The model also predicted the bounds of the vertical position drift, which matched the trend of estimated vertical position uncertainties in the experiments. We concluded that the model could predict, with sufficient accuracy, the navigation uncertainty for foot-mounted IMU-based systems, and we suggested future research to enhance the model with additional details of foot motion to further improve the prediction accuracy.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122087221","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A new high-g measurement system for severe perforation tests 用于剧烈射孔测试的新型高重力测量系统
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104024
M. Lavayssière, J. Willemin, A. Hottelet, N. Stephanopoli, Clément Grein, Clément Garaffa, Esteban Cabanillas, Prince Ramahefa-Andry, Stéphane Driussi, Martin Gauroy, Justin Boussac, S. Louwers
{"title":"A new high-g measurement system for severe perforation tests","authors":"M. Lavayssière, J. Willemin, A. Hottelet, N. Stephanopoli, Clément Grein, Clément Garaffa, Esteban Cabanillas, Prince Ramahefa-Andry, Stéphane Driussi, Martin Gauroy, Justin Boussac, S. Louwers","doi":"10.1109/INERTIAL56358.2023.10104024","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10104024","url":null,"abstract":"In this paper we demonstrate the capabilities of a data recorder capable of operating in the 60,000 g+ load regime, required for investigating in-situ deceleration in several locations of a projectile during its interaction with a target.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130627048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication 激光诱导化学蚀刻石英制备MEMS传感器
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103805
M. Sirota, B. Lipavsky, D. Nuttman, N. Melech, O. Halevy, S. Krylov
{"title":"Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication","authors":"M. Sirota, B. Lipavsky, D. Nuttman, N. Melech, O. Halevy, S. Krylov","doi":"10.1109/INERTIAL56358.2023.10103805","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103805","url":null,"abstract":"We report on a novel Laser-Induced Chemical Etching technology for fabrication of functional crystalline quartz MEMS resonant sensors. The suggested lithography-free fabrication approach does not alter the crystalline structure of quartz and allows piezoelectric actuation and high geometric design flexibility. The resonant force sensitive device, incorporating compliant amplification mechanism, was fabricated by the reported method and its functionality has been demonstrated.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127598985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning 通过静电频率和q因子调谐实现的虚拟旋转多质量谐振器
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103981
Jianlin Chen, T. Tsukamoto, G. Langfelder, Shuji Tanaka
{"title":"Virtually Rotated Multiple Mass Resonator Enabled by Electrostatic Frequency and Q-factor Tuning","authors":"Jianlin Chen, T. Tsukamoto, G. Langfelder, Shuji Tanaka","doi":"10.1109/INERTIAL56358.2023.10103981","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103981","url":null,"abstract":"This paper reports a two-axis symmetric multiple mass resonator with an enhanced frequency and Q-factor tuning capability for rate integrating gyroscope. The stiffness and damping mismatches can be compensated by electrostatic softening the suspension stiffness of the main proof masses and the inner stiffness of the inside proof masses, respectively. The as-fabricated frequency mismatch between two orthogonal modes was firstly measured as 145 Hz, which was decreased to 24 Hz by focus ion beam (FIB). Then the DC bias was applied on a pair of diagonal sensing electrodes for compensating the nonorthogonal stiffness components and the remained anisoelasticity. The anisodamping was then eliminated by adding the DC bias on the coupling proof masses, which mainly modified the squeeze film damping with a minor effect on the frequency. Finally, a free precession of the resonator could be observed and the rate detection was performed by removing the angle drifts from the self-precession.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132915941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of Inertial Acceleration Measurement Device with Zero-Compliance Mechanism 零柔度惯性加速度测量装置的研制
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103799
T. Mizuno, Y. Ishino, M. Takasaki
{"title":"Development of Inertial Acceleration Measurement Device with Zero-Compliance Mechanism","authors":"T. Mizuno, Y. Ishino, M. Takasaki","doi":"10.1109/INERTIAL56358.2023.10103799","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103799","url":null,"abstract":"Accelerometer using zero-compliance mechanism was studied both analytically and experimentally. In the originally conceived device, an inertial mass is suspended by zero-compliance mechanism that consists of a positive-stiffness suspension and a negative-stiffness suspension with same amplitude of stiffness. They are connected in series at the detection point. When the device is accelerated, the relative displacement of the inertial mass is kept zero while the detection point displaces. The amplitude of acceleration equals the product of the stiffness and the displacement of the detection point divided the inertial mass. A measurement device was fabricated to investigate basic characteristics of the proposed accelerometer. In this work, analytical studies supporting the validity of the acceleration measurement are shown. Several results of measuring fine acceleration are also presented.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132719332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamical Encircling of a Lock-In Area with a Combination of Fast and Slow Dithering in a Ring Laser Gyroscope 环形激光陀螺仪中快慢抖动联合锁定区域的动态环绕
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103982
W. Choi, Jun-Eon An, Cheon-Joong Kim, K. Shim
{"title":"Dynamical Encircling of a Lock-In Area with a Combination of Fast and Slow Dithering in a Ring Laser Gyroscope","authors":"W. Choi, Jun-Eon An, Cheon-Joong Kim, K. Shim","doi":"10.1109/INERTIAL56358.2023.10103982","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103982","url":null,"abstract":"This study proposes a combination of fast and slow dithering in a ring laser gyroscope (RLG) and analyzes the related characteristics through numerical experiments. The results of this study are significant compared to the existing methods that use sinusoidal dithering with a single frequency component. The results show that the proposed method can contribute to developing new alternatives for improving RLG performance when high static lock-in frequencies are considered.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128554518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A Digital Twin to Model the Impact of Etch Profile on MEMS Gyroscope Performance 刻蚀轮廓对MEMS陀螺仪性能影响的数字孪生模型
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103938
C. Welham, A. Parent, Eran Valfer, T. Piirainen, Matti Liukku, Mikko Partanen
{"title":"A Digital Twin to Model the Impact of Etch Profile on MEMS Gyroscope Performance","authors":"C. Welham, A. Parent, Eran Valfer, T. Piirainen, Matti Liukku, Mikko Partanen","doi":"10.1109/INERTIAL56358.2023.10103938","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103938","url":null,"abstract":"This paper details the use of a digital twin to model the impact of process variation including etch profile and critical dimension bias on gyroscope quadrature and operating frequencies. The gyroscope presented comprises two mass quartets with electrodes to compensate quadrature and is formed using deep reactive ion etching. Simulated and measured frequencies values agreed to within 5%. Tilt angle variation with die location is determined to better than 0.1° using measured quadrature compensation voltage and the digital twin.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127087749","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Large Amplitude Linear Drive Quadruple Mass Gyroscope 大振幅线性驱动四倍质量陀螺仪
2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103988
R. Knight, Christopher Scheri, J. Pulskamp, R. Rudy, D. DeVoe
{"title":"Large Amplitude Linear Drive Quadruple Mass Gyroscope","authors":"R. Knight, Christopher Scheri, J. Pulskamp, R. Rudy, D. DeVoe","doi":"10.1109/INERTIAL56358.2023.10103988","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103988","url":null,"abstract":"Coriolis vibratory gyroscope drive amplitude of 16 $upmumathrm{m}$ is demonstrated with $+30$ ppm frequency shift nonlinearity. Here, MEMS quadruple mass gyroscope (QMG) mechanical flexures are specifically designed to separate spurious modes without affecting linear operation of gyroscope drive over large amplitudes. A simulated frequency change of $+480$ ppm was initially predicted, however, when electrostatically driven at large amplitudes comb drive and sense tips begin to introduce spring softening reducing nonlinearity to $+30$ ppm. Careful consideration was also taken to electrostatically tune as-fabricated frequency mismatch without further exacerbating nonlinearity. Angle random walk (ARW) versus drive amplitude is plotted with a demonstrated $8times$ improvement compared to similar quadruple mass gyroscopes.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130135459","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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