Lissajous调频MEMS陀螺仪的带宽与ZRO稳定性权衡

M. Bestetti, G. Mussi, G. Gattere, Christian Padovani, A. Bonfanti, G. Langfelder
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引用次数: 2

摘要

该研究强调了在Lissajous调频(FM)下运行的微机电系统(MEMS)陀螺仪的重大挑战。该工作原理具有良好的固有比例因子稳定性和模式失配的比例因子独立性,但在实现两轴运动幅度控制时要求严格。它显示了如何,除非几赫兹(仅)带宽为目标,不同的幅值增益控制(AGC)设计都受到挑战,并产生杂散谐波,经过额外的解调,可能会变成杂散偏移,从而破坏系统的稳定性性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes
The research highlights a significant challenge in microelectromechanical system (MEMS) gyroscopes operated under Lissajous frequency modulation (FM). While providing excellent inherent scale-factor stability performance and scale-factor independence of the mode mismatch, this operating principle suffers from a strict requirement in the implementation of the motion amplitude control on the two axes. It is shown how, unless a few-Hz (only) bandwidth is targeted, different amplitude-gain control (AGC) designs are all challenged and give rise to spurious harmonics which, after additional demodulation, may turn into a spurious offset, which undermines the system stability performance.
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