M. Bestetti, G. Mussi, G. Gattere, Christian Padovani, A. Bonfanti, G. Langfelder
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Bandwidth vs ZRO Stability Trade-Off in Lissajous Frequency Modulated MEMS Gyroscopes
The research highlights a significant challenge in microelectromechanical system (MEMS) gyroscopes operated under Lissajous frequency modulation (FM). While providing excellent inherent scale-factor stability performance and scale-factor independence of the mode mismatch, this operating principle suffers from a strict requirement in the implementation of the motion amplitude control on the two axes. It is shown how, unless a few-Hz (only) bandwidth is targeted, different amplitude-gain control (AGC) designs are all challenged and give rise to spurious harmonics which, after additional demodulation, may turn into a spurious offset, which undermines the system stability performance.