Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication

Abstract

We report on a novel Laser-Induced Chemical Etching technology for fabrication of functional crystalline quartz MEMS resonant sensors. The suggested lithography-free fabrication approach does not alter the crystalline structure of quartz and allows piezoelectric actuation and high geometric design flexibility. The resonant force sensitive device, incorporating compliant amplification mechanism, was fabricated by the reported method and its functionality has been demonstrated.