基于ThELMA-Double技术的平面外双微分正交补偿电极

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI:10.1109/INERTIAL56358.2023.10103994

P. Fedeli, L. Falorni, G. J. Yallico Sanchez, M. Riani, G. Gattere

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引用次数: 0

摘要

本文提出了一种新的双微分正交补偿电极结构，使陀螺仪具有高性能。它们的制造是通过一种新的微加工技术实现的，称为ThELMA- double工艺[1]，这是标准意法半导体ThELMA技术的演变。在设计步骤中采用了分析和数值模型来估计这种创新结构与标准解决方案相比的优势。重点是提高正交补偿能力和提高尺度因子稳定性。初步的实验表征证明了仿真模型的有效性和所提体系结构的有效性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Out of Plane Double Differential Quadrature Compensation Electrodes with ThELMA-Double Technology

In this paper, a new architecture of double differential quadrature compensation electrodes to enable high performance gyroscope is presented. Their fabrication is allowed by a novel micromachining technology, known as ThELMA-Double process [1], which is an evolution of standard STMicroelectronics ThELMA technology. Analytical and numerical models have been adopted during the design steps to estimate the advantages of this innovative structure as compared to standard solution. The focus is on increasing the quadrature compensation capability and improving the scale factor stability. Preliminary experimental characterization proves the validity of the simulation models and the effectiveness of the proposed architecture.

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2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

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