Low frequency inertial sensing

Andrea Nelson, A. Hines, Guillermo Valdés, J. Sanjuan, F. Guzmán
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Abstract

We present an optomechanical inertial sensor for low frequency applications. This accelerometer is readout optically instead of capacitively, limiting electrostatic noise in the system. It consists of a 5 Hz monolithic fused-silica resonator with an oscillating test mass and a heterodyne interferometer readout. It is designed to be a compact, portable, and cost-effective alternative for highly sensitive inertial sensors at low frequencies. Potential applications include but are not limited to gravimetry, geodesy, and hydrology. The resonator has a measured mechanical quality factor $(Q)$ of 477,000 and an $mQ$ -product of 1200 kg. This high $Q$ factor reduces thermal motion, allowing for a device with a competitive acceleration noise floor.
低频惯性传感
我们提出了一种用于低频应用的光机械惯性传感器。这种加速度计是光学读出而不是电容读出,限制了系统中的静电噪声。它包括一个5赫兹的单片熔融硅谐振器与振荡测试质量和外差干涉仪读出。它被设计成一种紧凑、便携、经济高效的低频高灵敏度惯性传感器替代品。潜在的应用包括但不限于重力测量、大地测量学和水文学。该谐振器的测量机械质量因子$(Q)$为477,000,$mQ$ -产品为1200 kg。这种高Q系数减少了热运动,使设备具有具有竞争力的加速噪声底。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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