K. Morimoto, S. Upadhyay, N. Ohgami, T. Higashiyama, J. Fukuda, H. Suzuki, H. Kusakabe
{"title":"Freeze-Dried Matrix as an Alternative to Solution Mixing for Enzyme Analysis in a Micro Flow Channel","authors":"K. Morimoto, S. Upadhyay, N. Ohgami, T. Higashiyama, J. Fukuda, H. Suzuki, H. Kusakabe","doi":"10.1109/ICSENS.2007.355792","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355792","url":null,"abstract":"A freeze-dried matrix packed in a micro flow channel was used to analyze an enzymatic reaction rapidly without using external pumps. The very porous and fine precipitated matrix facilitated the permeation of a sample solution into the flow channel and the dissolution of the components. The amount of products produced as a result of the enzymatic reactions was sufficient and a significant increase in the resulting sensor output was observed. The applicability of the device was demonstrated in the determination of the activities of enzymes, the analysis of enzyme kinetics, and the monitoring of a multi-step reaction. This can be a basic technology in conducting microfluidic diagnostic systems with higher functions including the analysis of enzymatic reactions.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"145 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134035294","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tao Jiang, Xiaofeng Zhou, Jian Zhang, Jianzhong Zhu, Xinxin Li, Tie Li
{"title":"Study of humidity properties of Zinc Oxide modified Porous Silicon","authors":"Tao Jiang, Xiaofeng Zhou, Jian Zhang, Jianzhong Zhu, Xinxin Li, Tie Li","doi":"10.1109/ICSENS.2007.355845","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355845","url":null,"abstract":"In this paper, we discussed the humidity sensing behavior of Zinc Oxide modified porous silicon (ZnO/PS) composite structure. The porous silicon substrates were prepared by the electrochemical etching process first. Then, by sol-gel technique, it is possible to obtain a uniform Zinc Oxide films on the porous silicon substrates. The electrical conductivities of the porous silicon and Zinc Oxide modified porous silicon structures under different humidity levels were measured. Our study indicate that the modification of porous silicon by sol-gel Zinc Oxide increase the sensitivity and shorten the response time to the relative humidity, probably due to the increment of the specific surface area of the porous silicon. The other parameters, such as the concentration of zinc oxide precursors, which can affect the sensing performance, were also discussed. Therefore, the Zinc Oxide modified porous silicon composite structure studied is potential to develop the humidity sensor with high performance.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"73 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131510900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A PVDF Tactile Sensor for Static Contact Force and Contact Temperature","authors":"J. Yuji, C. Sonoda","doi":"10.1109/ICSENS.2007.355574","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355574","url":null,"abstract":"To obtain two tactile information, that is, static contact force and contact temperature of an object, a tactile sensor using a PVDF film and is proposed. The tactile sensor, which compared with one of the minute sense receptors of the human skin, was experimentally made. The ability of the sensor was investigated under various static forces and thermal stimuli. As experimental results, the effectiveness of the proposed tactile sensor was confirmed.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131566508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Chip-scale High-speed Fourier-transform Spectrometer Based on a Combination of a Michelson and a Fabry-Perot Interferometer","authors":"Kyoungsik Yu, N. Park, Daesung Lee, O. Solgaard","doi":"10.1109/ICSENS.2007.355493","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355493","url":null,"abstract":"We report on a cascade combination of a micromachined Michelson interferometer and Fabry-Perot interferometer for compact and high-resolution Fourier-transform spectrometry. The micromirror in the Michelson interferometer is driven near its resonance frequency for large optical path length modulation and high-speed interferogram measurements. A simple bulk micromachining process is used to fabricate all optical components on a silicon optical bench platform.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132807127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Le Foulgoc, O. Le Traon, S. Masson, A. Parent, T. Bourouina, F. Marty, A. Bosseboeuf, F. Parrain, H. Mathias, J.-P. Grilles
{"title":"High-Q silicon flexural resonators for vibrating inertial sensors: Investigations of the limiting damping mechanisms","authors":"B. Le Foulgoc, O. Le Traon, S. Masson, A. Parent, T. Bourouina, F. Marty, A. Bosseboeuf, F. Parrain, H. Mathias, J.-P. Grilles","doi":"10.1109/ICSENS.2007.355884","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355884","url":null,"abstract":"In designing micro-scale vibrating sensors, the achievement of very high quality factor (Q) resonators working in bending mode remains a major issue. Special attention has been paid in this work to explore the Q limitations of single-crystal silicon bending beam resonators and their dependences on geometry, temperatures and pressure for a large range of resonators. In order to preserve the resonating element from support damping, a system with high decoupling efficiency has been optimized using FEM analyses and implemented. Quality factor as a function of frequency shows the transition between thermoelastic damping (TED) and surface damping as limiting mechanism with the miniaturization of the resonators: At high vacuum, the thermoelastic theory is experimentally validated to be the main damping source for Q up to 4.0x104. Beyond these values (Q > 1.4x105) the surface effects are evidenced and characterized with thickness and frequency variations.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130955502","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Lendl, Wolfgang Ritter, M. Harasek, R. Niessner, C. Haisch
{"title":"Photoacoustic Monitoring of CO2 in Biogas Matrix using a Quantum Cascade Laser","authors":"B. Lendl, Wolfgang Ritter, M. Harasek, R. Niessner, C. Haisch","doi":"10.1109/ICSENS.2007.355475","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355475","url":null,"abstract":"We have developed an on-line sensor for biogas monitoring using mid-infrared quantum cascade laser (QCL) and photoacoustic (PA) detection. This sensor concept takes advantage of the inherent selectivity provided by mid-IR laser spectroscopy and the small gas volume required in photoacoustic spectroscopy allowing rapid response. Using a distributed feedback QCL emitting at 4.3 mum, the sensor concept as been successfully tested for carbon dioxide measurement under harsh conditions during biogas treatment in a pilot plant. In this application a reliable and rapid gas sensor is required for process control to assure a continuous CO2 concentration below 2%. The obtained results compared favorably with a state of the art NDIR analyzer used as a reference with the distinct advantage of faster response times. Due to the generic nature of the developed PA-QCL sensor concept selective on-line measurement of other important analytes in biogas, such as NH3 and H2S is possible as well.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"69 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130965231","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor","authors":"H. Lee, C. Cho, Sung-Pil Chang","doi":"10.1109/ICSENS.2007.355804","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355804","url":null,"abstract":"In this paper, electro-mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been investigated as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. The sensitivity of the device fabricated using these technologies is 9.03 ppm kPa-1 with a net capacitance change of 0.14 pF over a range 0~178 kPa.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130992633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Development of a Label-Free Optical Biosensor Using Porous Anodic Alumina (PAA) Layer Chip","authors":"Do-Kyun Kim, Y. Kwon, E. Tamiya","doi":"10.1109/ICSENS.2007.355736","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355736","url":null,"abstract":"The hybridization of probe DNA with target DNA will lead to changes in the mass, electrical charge, or optical properties of the immobilized DNA layer, which can be detected by microgrativimetric, potentio-metric, amperometric or optical transducers. For this reason, we developed a new Localized Surface Plasmon Resonance (LSPR) based label-free optical biosensor in connection with a Porous Anodic Alumina (PAA) layer chip. For the fabrication of PAA layer chip, a double oxidation step method was developed, which used oxalic acid as oxidizing agent at an oxidation voltage of 40 V. In our sensor, the absorbance at surface of PAA layer chip resulted in an interferometric pattern that was related to the LSPR optical properties of bio-molecules. All absorbance spectra were taken from 400 to 850 nm on the UV-visible spectrophotometer at room temperature. The absorbance strength increased with the formation of double-helix with the probe target DNA hybridization. The reaction of mismatch DNA did not cause a significant increase in the absorbance, but only a slight bathochromic shift was observed. However, the binding of match DNA caused a significant bathochromic shift and increase in the absorbance indicating the complete hybridization. We expect that this detection method using LSPR based label-free optical biosensor can be used for analysis conveniently with high sensitivity, because there is no necessity of labeling such as the enzymes and the fluorescent dye.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133674798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
I. Elmi, S. Zampolli, E. Cozzani, M. Passini, G. Cardinali, M. Severi
{"title":"Development of Ultra Low Power Consumption Hotplates for Gas Sensing Applications","authors":"I. Elmi, S. Zampolli, E. Cozzani, M. Passini, G. Cardinali, M. Severi","doi":"10.1109/ICSENS.2007.355767","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355767","url":null,"abstract":"This paper deals with the development of state-of-the-art ultra low power (ULP) consumption hotplates to be used as metal oxide gas sensor substrates. Several types of ULP devices, differing in shape and size, have been fabricated with the same front-side bulk silicon micromachining technology. Details on the device design and on the fabrication processes are provided. The ULP hotplates functional behavior was thoroughly investigated. Typical results on measurements of the hotplate temperature versus applied power are reported. A very satisfactory value of 8.9 mW at 400degC can be highlighted. Transient temperature responses and evaluation of the hotplate thermal time constant were also carried out.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"48 3","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132089051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Ko, S. Hong, H. Park, C. Park, J. Jung, Dongki Min, S. Choa, H. Shin, H. Lee
{"title":"Design Optimization of Scanning Resistive Microscopy (SRM) Probe for Spatial Resolution Improvement","authors":"H. Ko, S. Hong, H. Park, C. Park, J. Jung, Dongki Min, S. Choa, H. Shin, H. Lee","doi":"10.1109/ICSENS.2007.355900","DOIUrl":"https://doi.org/10.1109/ICSENS.2007.355900","url":null,"abstract":"We suggest a new design of resistive probe (RP) for spatial resolution improvement by Si tip shape control. The major change of the new design is wedge-like probe formation rather than pyramidal shape, which results in the reduced removal of high doped volume near the slanting surface of probe. Therefore, we could reduce spatial resolution deterioration mainly due to low doped volume of the sloped surface. The newly designed resistive probe (RP) showed about 40 nm transition (which is assumed to be a distance taken signal rising from 10% to 90% of saturation level) in bit writing and reading experiment on the real ferroelectric media, which is a few times improvement compared to the original one.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132741032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}