{"title":"基于迈克尔逊和法布里-珀罗干涉仪组合的芯片级高速傅里叶变换光谱仪","authors":"Kyoungsik Yu, N. Park, Daesung Lee, O. Solgaard","doi":"10.1109/ICSENS.2007.355493","DOIUrl":null,"url":null,"abstract":"We report on a cascade combination of a micromachined Michelson interferometer and Fabry-Perot interferometer for compact and high-resolution Fourier-transform spectrometry. The micromirror in the Michelson interferometer is driven near its resonance frequency for large optical path length modulation and high-speed interferogram measurements. A simple bulk micromachining process is used to fabricate all optical components on a silicon optical bench platform.","PeriodicalId":233838,"journal":{"name":"2006 5th IEEE Conference on Sensors","volume":"20 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Chip-scale High-speed Fourier-transform Spectrometer Based on a Combination of a Michelson and a Fabry-Perot Interferometer\",\"authors\":\"Kyoungsik Yu, N. Park, Daesung Lee, O. Solgaard\",\"doi\":\"10.1109/ICSENS.2007.355493\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We report on a cascade combination of a micromachined Michelson interferometer and Fabry-Perot interferometer for compact and high-resolution Fourier-transform spectrometry. The micromirror in the Michelson interferometer is driven near its resonance frequency for large optical path length modulation and high-speed interferogram measurements. A simple bulk micromachining process is used to fabricate all optical components on a silicon optical bench platform.\",\"PeriodicalId\":233838,\"journal\":{\"name\":\"2006 5th IEEE Conference on Sensors\",\"volume\":\"20 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 5th IEEE Conference on Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2007.355493\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 5th IEEE Conference on Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2007.355493","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Chip-scale High-speed Fourier-transform Spectrometer Based on a Combination of a Michelson and a Fabry-Perot Interferometer
We report on a cascade combination of a micromachined Michelson interferometer and Fabry-Perot interferometer for compact and high-resolution Fourier-transform spectrometry. The micromirror in the Michelson interferometer is driven near its resonance frequency for large optical path length modulation and high-speed interferogram measurements. A simple bulk micromachining process is used to fabricate all optical components on a silicon optical bench platform.
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