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Evaporative Printing of Organic Materials at Ambient Pressure using a Micromachined Printhead 利用微机械打印头在环境压力下进行有机材料的蒸发打印
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300086
V. Leblanc, Jianglong Chen, P. Mardilovich, V. Bulović, M. Schmidt
{"title":"Evaporative Printing of Organic Materials at Ambient Pressure using a Micromachined Printhead","authors":"V. Leblanc, Jianglong Chen, P. Mardilovich, V. Bulović, M. Schmidt","doi":"10.1109/SENSOR.2007.4300086","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300086","url":null,"abstract":"We present a MEMS-enabled technique for evaporative printing of organic materials which doesn't require a vacuum ambient, has a fast printing rate (1 kHz), and can be scaled up to an array of individually addressable nozzles. By depositing the materials directly from the gas phase, without liquid phase coming in contact with the substrate, we aim at avoiding the limitations encountered when ink-jet printing organic materials. The MEMS printhead comports an array of 2 micron pores and an integrated thin film platinum heater on a silicon membrane for local evaporation of the materials. This printhead was used, together with ink-jet technology for the delivery of material to the pores, to print molecular organic semiconductors. Our technique enables printing of organic optoelectronics over large areas, and is thus a critical element in the realization of large-area, high-speed, and low-cost printing of optoelectronics.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"57 1","pages":"121-124"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79811990","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork 石英音叉自振动自检测AFM探针的研制
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300437
H. Hida, M. Shikida, K. Fukuzawa, A. Ono, K. Sato, K. Asaumi, Y. Iriye, T. Muramatsu, Y. Horikawa
{"title":"Development of Self-Vibration and -Detection AFM Probe by using Quartz Tuning Fork","authors":"H. Hida, M. Shikida, K. Fukuzawa, A. Ono, K. Sato, K. Asaumi, Y. Iriye, T. Muramatsu, Y. Horikawa","doi":"10.1109/SENSOR.2007.4300437","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300437","url":null,"abstract":"We developed a novel type of quartz tuning-fork probe that vibrates and detects its own probe deformation, for application to atomic force microscopy (AFM). This tuning-fork probe improves the AFM image resolution because of its high Q (quality) factor value. The tuning-fork probe has a sharp tip that was fabricated using anisotropic wet etching and a focused ion beam system. We evaluated the vibration properties of the tuning-fork in both the in-phase and anti-phase driving mode, and measured a Q factor value of 2808 in the anti-phase mode. We also confirmed that the tuning-fork probe is able to measure a 100 nm-step on a silicon surface by self-vibration and self-detection, without using external vibration and optical-detection mechanisms.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"3 1","pages":"1533-1536"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79841937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Polymer Microchip for Electrophoresis-Mass Spectrometry Fabricated by Hot Embossing and Low Temperature Direct Bonding 热压和低温直接键合制备用于电泳-质谱分析的聚合物微芯片
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300458
T. Suzuki, F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, S. Shoji
{"title":"Polymer Microchip for Electrophoresis-Mass Spectrometry Fabricated by Hot Embossing and Low Temperature Direct Bonding","authors":"T. Suzuki, F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, S. Shoji","doi":"10.1109/SENSOR.2007.4300458","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300458","url":null,"abstract":"Integrated electrophoresis-mass spectrometry polymer devices were fabricated. The electrospray ionization (ESI) emitter tip structure was formed directly at the microchip electrophoresis (MCE) outlet. Since these devices enable negligible dead volume at the electrospray port, efficient spray of the sample necessary for high resolution mass spectrometry (MS) was realized. Stable spray was also achieved at the low flow rate (-0.1 muL/min) without additional pump. Low cost and high performance COP MCE-MS chip was fabricated by hot embossing and low temperature direct bonding.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"65 1","pages":"1617-1620"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85139507","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Bio-Microelectronic Information Processing Device Consisting of Natural Neurons on a CMOS Microsystem CMOS微系统上自然神经元组成的生物微电子信息处理装置
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300357
S. Hafizovic, F. Heer, U. Frey, T. Ugniwenko, A. Blau, C. Ziegler, A. Hierlemann
{"title":"Bio-Microelectronic Information Processing Device Consisting of Natural Neurons on a CMOS Microsystem","authors":"S. Hafizovic, F. Heer, U. Frey, T. Ugniwenko, A. Blau, C. Ziegler, A. Hierlemann","doi":"10.1109/SENSOR.2007.4300357","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300357","url":null,"abstract":"We report on the system integration of a CMOS chip that is capable of bidirectionally communicating (stimulation and recording) with electrogenic cells such as neurons or cardiomyocytes, and that is targeted at investigating electrical signal propagation within cellular networks in vitro. Experiments including the stimulation of neurons with two different spatio-temporal patterns and the recording of the triggered spiking activity have been carried out. The neuronal response patterns have been successfully classified (83% correct classifications) with respect to the different stimulation patterns.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"118 1","pages":"1223-1226"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85248970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Increase of the Selectivity of Sensor Arrays Through Consumption Effects of Metal Oxide Sensors 利用金属氧化物传感器的消耗效应提高传感器阵列的选择性
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300559
Frank Röck, N. Bârsan, U. Weimar
{"title":"Increase of the Selectivity of Sensor Arrays Through Consumption Effects of Metal Oxide Sensors","authors":"Frank Röck, N. Bârsan, U. Weimar","doi":"10.1109/SENSOR.2007.4300559","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300559","url":null,"abstract":"Metal oxide gas sensors alter the gas composition during the sensing process. This peculiarity can be used as an advantage to obtain additional information in order to identify the analyte gas or to determine the composition of a gas sample. For that purpose the former sensors can be seen as catalytic filters which increase selectivity in a sensor array or even produce it if the array consists of identical sensors. In this work the described concept was proven and first steps were done to understand the influence of several variables on this effect in order to fully exploit the increase of selectivity.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"91 1","pages":"2019-2022"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85317390","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design and Function Principle of a Large Scale Sensor Array for the Bi-Directional Coupling to Electrogenic Cells 大型电致电池双向耦合传感器阵列的设计与功能原理
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300362
M. Schindler, S. Ingebrandt, S. Meyburg, A. Offenhausser
{"title":"Design and Function Principle of a Large Scale Sensor Array for the Bi-Directional Coupling to Electrogenic Cells","authors":"M. Schindler, S. Ingebrandt, S. Meyburg, A. Offenhausser","doi":"10.1109/SENSOR.2007.4300362","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300362","url":null,"abstract":"N- and p-type floating gate field-effect transistor (FG-FET) arrays for the detection of extracellular signals from electrogenic cells were fabricated in a complementary metal oxide semiconductor (CMOS) process. Additional passivation layers protected the transistor gates from the electrolyte solution. We present recordings acquired simultaneously with an n- and p-type FG-FET from one single HEK293 cell and show how the floating gate can be used to capacitively stimulate a cell positioned on the active device. In a further step a high density FG-FET array was designed and fabricated in a standard 0.5 mum process. The chip contains 4096 pixels that can act as both sensor and actuator.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"9 1","pages":"1243-1246"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85492238","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution 提高空间分辨率的高定向超声测距传感器的设计与制造
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300377
Haksue Lee, Daesil Kang, W. Moon
{"title":"Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution","authors":"Haksue Lee, Daesil Kang, W. Moon","doi":"10.1109/SENSOR.2007.4300377","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300377","url":null,"abstract":"A new ultrasonic ranging transducer with high directionality is developed to enhance the spatial resolution in the pulse-echo measurement in air. The concept of the parametric transmitting array is applied to the design. A high-performance piezoelectric micro-machined ultrasonic transducer (pMUT) array is designed and fabricated in this study. The indirectly generated pulse has a beam-width of around 5deg and a sound pressure level (SPL) of over 85 dB at the peak. For a practical application, the higher sound pressure level should be achieved.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"21 1","pages":"1303-1306"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82610605","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Pressure Sensitivity Evaluation of Passive SAW Microsensor Integrated with Pressure-Temperature and ID Tag on 41°-YX LiNbO3 41°-YX LiNbO3上集成压力-温度和ID标签的被动SAW微传感器压力灵敏度评价
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300538
Wen Wang, Keekeun Lee, Taehyun Kim, Sangsik Yang, I. Park
{"title":"Pressure Sensitivity Evaluation of Passive SAW Microsensor Integrated with Pressure-Temperature and ID Tag on 41°-YX LiNbO3","authors":"Wen Wang, Keekeun Lee, Taehyun Kim, Sangsik Yang, I. Park","doi":"10.1109/SENSOR.2007.4300538","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300538","url":null,"abstract":"This paper presents a mechanical analysis on pressure sensitivity of a passive pressure sensor incorporating surface acoustic wave (SAW) reflective delay line (RDL) on 41deg-YX LiNbO3. The behavior of shear horizontal (SH) leaky type SAW propagating on pre-stressed LiNbO3 substrate was investigated using partial-wave-analysis. Referring to the finite element methods (FEM), the pressure sensitivity in the propagation path of SAW was calculated and the effect of the diaphragm thickness on the sensor performance was also studied, which shows proper thickness of LiNbO3 diaphragm makes it possible to obtain better sensitivity than quartz. Theoretical results were verified by the sensor experiment. We have developed a pressure sensor on 41deg-YX LiNbO3 integrated with temperature sensor and 8-bits ID tag, which was structured by 440 MHz two-layered-RDL, in which a - 150 mum cavity was designed by Ni electroplating. Fabricated sensor was wirelessly characterized by HP network analyzer. High S/N was observed from the measured S11. Satisfactory pressure sensitivity of -2.9deg/kPa was obtained.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"21 1","pages":"1935-1938"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80843773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A Rotary Micromotor Supported on Microball Bearings 一种由微球轴承支撑的旋转微电机
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300332
N. Ghalichechian, A. Modafe, M. Beyaz, R. Ghodssi
{"title":"A Rotary Micromotor Supported on Microball Bearings","authors":"N. Ghalichechian, A. Modafe, M. Beyaz, R. Ghodssi","doi":"10.1109/SENSOR.2007.4300332","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300332","url":null,"abstract":"We report the successful development of the first operational bottom-drive, rotary, variable- capacitance micromotor supported on microball bearings. The rotor and stator of the micromotor were fabricated using a 9-level-mask process. Silicon carbide coating was used for reducing friction of silicon microball housing on the rotor. Top angular velocity of 517 rpm corresponding to the linear tip velocity of 324 mm/s was measured at 150 V and 800 Hz excitation. This is 44 times higher than the velocity previously measured for the linear micromotors supported on microball bearings. Characterization of two different designs showed a good agreement between predicted and measured velocities for the rotary machine. The rotary micromotor developed in this study is a platform technology for centrifugal micropumps for fuel delivery applications.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"10 1","pages":"1123-1126"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80430615","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Investigation of Giant-Magneto-Impedance (GMI) Effect and Magnetic Hysteresis in Microfabricated Permalloy/Copper Device 微加工坡莫合金/铜器件中巨磁阻抗效应和磁滞现象的研究
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300698
O. Zorlu, P. Kejik, R. Popovic
{"title":"Investigation of Giant-Magneto-Impedance (GMI) Effect and Magnetic Hysteresis in Microfabricated Permalloy/Copper Device","authors":"O. Zorlu, P. Kejik, R. Popovic","doi":"10.1109/SENSOR.2007.4300698","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300698","url":null,"abstract":"In this paper, we present the giant-magneto-impedance (GMI) effect in a microfabricated closed Permalloy core which surrounds a copper excitation rod. We measured a 90% change in the inductance value of the device for a sinusoidal excitation at 500 kHz in a 4.5mT range. The change in the device resistance is negligible for excitation frequencies below 1 MHz, and goes above 14% for 30 MHz excitation. Magnetic hysteresis of the device inductance is studied and improved by applying periodic \"degauss\" pulses during measurement, instead of increasing the amplitude of the excitation current or using traditional annealing processes.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"90 1","pages":"2577-2580"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80450031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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