热压和低温直接键合制备用于电泳-质谱分析的聚合物微芯片

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300458

T. Suzuki, F. Kitagawa, H. Shinohara, J. Mizuno, K. Otsuka, S. Shoji

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引用次数: 10

摘要

制备了一体化的电泳-质谱聚合物装置。在微芯片电泳(MCE)出口直接形成电喷雾电离(ESI)发射极顶端结构。由于这些装置在电喷雾口的死体积可以忽略不计，因此实现了高分辨率质谱(MS)所需的样品的有效喷雾。在没有额外泵的情况下，在低流量(-0.1 muL/min)下也实现了稳定的喷雾。采用热压成型和低温直接键合技术制备了低成本、高性能的COP MCE-MS芯片。

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Polymer Microchip for Electrophoresis-Mass Spectrometry Fabricated by Hot Embossing and Low Temperature Direct Bonding

Integrated electrophoresis-mass spectrometry polymer devices were fabricated. The electrospray ionization (ESI) emitter tip structure was formed directly at the microchip electrophoresis (MCE) outlet. Since these devices enable negligible dead volume at the electrospray port, efficient spray of the sample necessary for high resolution mass spectrometry (MS) was realized. Stable spray was also achieved at the low flow rate (-0.1 muL/min) without additional pump. Low cost and high performance COP MCE-MS chip was fabricated by hot embossing and low temperature direct bonding.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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