提高空间分辨率的高定向超声测距传感器的设计与制造

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300377

Haksue Lee, Daesil Kang, W. Moon

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引用次数: 5

摘要

为了提高空气中脉冲回波测量的空间分辨率，研制了一种新型的高方向性超声测距换能器。设计中采用了参数化发射阵列的概念。本文设计并制作了一种高性能压电微机械超声换能器阵列。间接产生的脉冲波束宽度约为5度，峰值声压级(SPL)超过85 dB。在实际应用中，应达到较高的声压级。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design and Fabrication of the High Directional Ultrasonic Ranging Sensor to Enhance the Spatial Resolution

A new ultrasonic ranging transducer with high directionality is developed to enhance the spatial resolution in the pulse-echo measurement in air. The concept of the parametric transmitting array is applied to the design. A high-performance piezoelectric micro-machined ultrasonic transducer (pMUT) array is designed and fabricated in this study. The indirectly generated pulse has a beam-width of around 5deg and a sound pressure level (SPL) of over 85 dB at the peak. For a practical application, the higher sound pressure level should be achieved.

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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