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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference最新文献

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Uniform Nanoliter-Sized Droplet Deposition using Fluid Motion in Ratcheted Micro-Channels 基于棘轮微通道流体运动的均匀纳升液滴沉积
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300507
Z. Ding, B. Ziaie
{"title":"Uniform Nanoliter-Sized Droplet Deposition using Fluid Motion in Ratcheted Micro-Channels","authors":"Z. Ding, B. Ziaie","doi":"10.1109/SENSOR.2007.4300507","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300507","url":null,"abstract":"This paper reports on a new and simple way of uniform nanoliter droplet deposition by moving a microliter droplet through a vibrating ratcheted channel. Nanoliter droplets were deposited on Si and SU8 substrates/channels. A uniform array of 514 plusmn 62pL droplets was deposited on a SU8 channel by vibrating the substrate at a frequency and amplitude of 50 Hz and 3.5 mm (droplet speed ~ 60mm/s).","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"105 1","pages":"1813-1816"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77810899","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Planar, Impedance-Metric NOX Sensor with NiO Sensing Electrode for High Temperature Applications 平面，阻抗-公制氮氧化物传感器与NiO传感电极的高温应用
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300297
M. Stranzenbach, B. Saruhan
{"title":"Planar, Impedance-Metric NOX Sensor with NiO Sensing Electrode for High Temperature Applications","authors":"M. Stranzenbach, B. Saruhan","doi":"10.1109/SENSOR.2007.4300297","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300297","url":null,"abstract":"In this study, an innovative type of sensor configuration is used which contains an electrolyte constructed of quasi-single crystalline columns, a porous NiO sensing electrode (SE) and a conductive Pt reference electrode (RE) deposited on the backside. As electrolyte EB-PVD manufactured discs of FYSZ and PYSZ composition were used. Gas sensing characterization of the sensors was carried with typical flue-gas mixtures in various concentrations. Impedance and potential analysis were done at a frequency range of 100 kHz and 0.005 Hz. Sensors with FYSZ electrolyte could be operated at higher temperatures compared to those with PYSZ electrolytes. The highest achieved sensing temperature in this study was 600degC. NO was successfully detected under the presence of 5%vol. O2 at the maximum operating temperature.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"10 1","pages":"983-986"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82526464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Plug Dispersion Compensation in Moving Field Cappilary Electrophoresys Applications 插头色散补偿在动场毛细管电泳中的应用
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300246
F. Tatar, L. Zhang, J. Bastemeijer, J. Mollinger, A. Bossche
{"title":"Plug Dispersion Compensation in Moving Field Cappilary Electrophoresys Applications","authors":"F. Tatar, L. Zhang, J. Bastemeijer, J. Mollinger, A. Bossche","doi":"10.1109/SENSOR.2007.4300246","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300246","url":null,"abstract":"In the past times moving field in capillary electrophoresis (CE) have been introduced. However these attempts are unsuccessfully because the fluid column in the known electric field area introduces parabolic distortion of the osmotic flow profile, and in this way it introduces sever plug dispersions. This paper introduces a method to utilize the separation efficiency of moving field capillary electrophoresis, without the drawback of severe plug dispersion. Also the voltage is maintained on the low values and the speed of the sample is reduced and the efficiency of the separation is increased.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"53 1","pages":"779-782"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78839978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A Dram-Like Mechanical Non-Volatile Memory 类dram机械非易失性存储器
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300601
W. Jang, J. Lee, Jun‐Bo Yoon
{"title":"A Dram-Like Mechanical Non-Volatile Memory","authors":"W. Jang, J. Lee, Jun‐Bo Yoon","doi":"10.1109/SENSOR.2007.4300601","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300601","url":null,"abstract":"A DRAM-like mechanical non-volatile memory (NVM) is newly proposed and fabricated using CMOS-compatible poly-Si surface micromachining. The key concept is developed that the proposed memory is non-volatile because the MEMS switch can clearly eliminate the leakage current when the device is off. The mechanical NVM shows excellent on-off characteristics (sub-threshold swing~4 mV/decade), high switching speed (~300 kHz) and non-volatility. This paper demonstrates the feasibility of the mechanical NVM as a new memory for ULSI applications.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"25 1","pages":"2187-2190"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90474138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Integrated Power Harvesting System Including a MEMS Generator and a Power Management Circuit 集成电力收集系统，包括一个MEMS发电机和一个电源管理电路
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300273
M. Marzencki, Y. Ammar, S. Basrour
{"title":"Integrated Power Harvesting System Including a MEMS Generator and a Power Management Circuit","authors":"M. Marzencki, Y. Ammar, S. Basrour","doi":"10.1109/SENSOR.2007.4300273","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300273","url":null,"abstract":"This paper presents a novel ambient energy scavenging system for powering wireless sensor nodes. It uses a MEMS generator and an ASIC power management circuit. The system is realised as a system on a package (SoP) with all components fabricated entirely using the microfabrication techniques. The electromechanical transduction is performed using the piezoelectric effect of aluminium nitride thin films. The reported experimental results prove the possibility of exploiting very low amplitude signals delivered by the generator for charging a storage capacitor. It is also shown that the proposed system of 5 mm3 can endlessly power a simple wireless sensor node; while a lithium-polymer thin film battery of the same volume can do so only for less than two months.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"887-890"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89679119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 306
A Wideband Electromagnetic Micro Power Generator for Wireless Microsystems 一种用于无线微系统的宽带电磁微型发电机
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300122
I. Sari, T. Balkan, H. Kulah
{"title":"A Wideband Electromagnetic Micro Power Generator for Wireless Microsystems","authors":"I. Sari, T. Balkan, H. Kulah","doi":"10.1109/SENSOR.2007.4300122","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300122","url":null,"abstract":"This paper presents a wideband electromagnetic (EM) vibration-to-electrical power generator which can efficiently scavenge energy and generate steady power over a predetermined frequency range. Power is generated by means of electromagnetic induction using a magnet and coils on top of resonating cantilever beams. The reported generator covers a wide band of external vibration frequency by implementing a number of serially connected cantilevers in different lengths. The device generates 0.5 muW continuous power with 20 mV voltage between 3.3 and 3.6 kHz of external vibration.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"17 1","pages":"275-278"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89294402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 51
A Delta-Sigma Approach for Ion Channel Based Biosensor Arrays 离子通道生物传感器阵列的Delta-Sigma方法
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300260
M. Bennati, F. Lodesani, M. Crescentini, A. Mariani, M. Tartagni
{"title":"A Delta-Sigma Approach for Ion Channel Based Biosensor Arrays","authors":"M. Bennati, F. Lodesani, M. Crescentini, A. Mariani, M. Tartagni","doi":"10.1109/SENSOR.2007.4300260","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300260","url":null,"abstract":"Detection of target substances at very low concentration by using molecular stochastic sensing might open new directions for diagnostic tools. This paper presents a compact and low-cost electronic system to record events derived from ligand-gated ion channels embedded in an array of artificial lipid bilayer substrates. In our approach, a Surface Mount Technology electronic system has been designed to be interfaced with a 4x3 array of spots. The currents through each spot of one row are concurrently readout and digitized by three current-mode DeltaSigma (Delta Sigma) analog to digital converters. The output data streams are sent to a digital acquisition card for being recorded and post-processed by a PC.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"835-838"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89886338","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Enabling MEMS Chemical Microsensor Arrays for Trace Analyte Detection 启用MEMS化学微传感器阵列用于痕量分析物检测
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300653
D. Meier, J. Evju, K. Benkstein, B. Raman, Z. Boger, D. Lahr, S. Semancik
{"title":"Enabling MEMS Chemical Microsensor Arrays for Trace Analyte Detection","authors":"D. Meier, J. Evju, K. Benkstein, B. Raman, Z. Boger, D. Lahr, S. Semancik","doi":"10.1109/SENSOR.2007.4300653","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300653","url":null,"abstract":"We describe the development of a conductometric gas microsensor technology that combines, in an optimized manner, nanostructured sensing films, MEMS microhotplate array platforms, and artificial neural networks signal processing. Individually addressable microelements, including varied semiconducting oxides, are temperature modulated to produce analytically rich data streams that allow recognition of low concentration target analytes in background mixtures. This brief report emphasizes: 1) recently developed selection and processing methods for incorporation of high performance sensing materials on the MEMS platforms, 2) special operational modes and data acquisition approaches for ensuring good signal quality while maximizing information content, and 3) signal analysis techniques that include preprocessing routines and advanced recognition algorithms.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"30 1","pages":"2397-2400"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89887882","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Novelconvolution Based Signal Processing Techniques for a Simplified Artificial Olfactory Mucosa 基于新卷积的简化人工嗅粘膜信号处理技术
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300672
J. Gardner, J.E. Taylor
{"title":"Novelconvolution Based Signal Processing Techniques for a Simplified Artificial Olfactory Mucosa","authors":"J. Gardner, J.E. Taylor","doi":"10.1109/SENSOR.2007.4300672","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300672","url":null,"abstract":"As our understanding of the human olfactory system increases, so does our ability to design novel architectures in order to mimic the biological system. The concept of an artificial olfactory mucosa represents a new development in the field of biomimetics. Here we analyse the signals produced by such a biomimetic system that contain a spatio-temporal element not previously encountered within the field of machine olfaction or so-called electronic noses. This paper explores the use of convolution-based signal processing methodologies to exploit this richer data-set and ameliorate the well-known problems of sensor noise and drift. We show that, under certain conditions, an artificial mucosa combined with a convolution based classifier performs better than a conventional electronic nose.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"1 1","pages":"2473-2476"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89896490","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators 厚膜su-8 MEMS结构及致动器的线键特性及优化
TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI: 10.1109/SENSOR.2007.4300568
D. Sameoto, S. Lee, M. Parameswaran
{"title":"Wirebonding Characterization and Optimization on Thick Filmsu-8 MEMS Structures and Actuators","authors":"D. Sameoto, S. Lee, M. Parameswaran","doi":"10.1109/SENSOR.2007.4300568","DOIUrl":"https://doi.org/10.1109/SENSOR.2007.4300568","url":null,"abstract":"We present the first successful wirebonding on thick SU-8 actuators reported in the literature with a thorough investigation to determine the best processing conditions to produce reliable electrical connections to SU-8 MEMS structures. We measured the yield and mechanical strength of gold ball bonds for a variety of processing conditions on SU-8 structures up to 100 mum thick covered with a thin gold layer. Optimized processing conditions result in ball bonds with high adhesion strength and very low contact resistance. Multiple SU-8 based actuators have been electrically connected and operated demonstrating high reliability and yield.","PeriodicalId":23295,"journal":{"name":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","volume":"43 1","pages":"2055-2058"},"PeriodicalIF":0.0,"publicationDate":"2007-06-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86528640","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
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