基于棘轮微通道流体运动的均匀纳升液滴沉积

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300507

Z. Ding, B. Ziaie

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引用次数: 0

摘要

本文报道了一种新的简单方法，即通过振动棘轮通道移动微升液滴来均匀沉积纳升液滴。纳米液滴沉积在Si和SU8衬底/通道上。以50 Hz、3.5 mm的频率和振幅(液滴速度~ 60mm/s)振动基片，在SU8通道上沉积了514个plusmn 62pL液滴。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Uniform Nanoliter-Sized Droplet Deposition using Fluid Motion in Ratcheted Micro-Channels

This paper reports on a new and simple way of uniform nanoliter droplet deposition by moving a microliter droplet through a vibrating ratcheted channel. Nanoliter droplets were deposited on Si and SU8 substrates/channels. A uniform array of 514 plusmn 62pL droplets was deposited on a SU8 channel by vibrating the substrate at a frequency and amplitude of 50 Hz and 3.5 mm (droplet speed ~ 60mm/s).

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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