Pressure Sensitivity Evaluation of Passive SAW Microsensor Integrated with Pressure-Temperature and ID Tag on 41°-YX LiNbO3

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference Pub Date : 2007-06-10 DOI:10.1109/SENSOR.2007.4300538

Wen Wang, Keekeun Lee, Taehyun Kim, Sangsik Yang, I. Park

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引用次数: 7

Abstract

This paper presents a mechanical analysis on pressure sensitivity of a passive pressure sensor incorporating surface acoustic wave (SAW) reflective delay line (RDL) on 41deg-YX LiNbO3. The behavior of shear horizontal (SH) leaky type SAW propagating on pre-stressed LiNbO3 substrate was investigated using partial-wave-analysis. Referring to the finite element methods (FEM), the pressure sensitivity in the propagation path of SAW was calculated and the effect of the diaphragm thickness on the sensor performance was also studied, which shows proper thickness of LiNbO3 diaphragm makes it possible to obtain better sensitivity than quartz. Theoretical results were verified by the sensor experiment. We have developed a pressure sensor on 41deg-YX LiNbO3 integrated with temperature sensor and 8-bits ID tag, which was structured by 440 MHz two-layered-RDL, in which a - 150 mum cavity was designed by Ni electroplating. Fabricated sensor was wirelessly characterized by HP network analyzer. High S/N was observed from the measured S11. Satisfactory pressure sensitivity of -2.9deg/kPa was obtained.

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41°-YX LiNbO3上集成压力-温度和ID标签的被动SAW微传感器压力灵敏度评价

本文对采用表面声波(SAW)反射延迟线(RDL)的41°yx LiNbO3型被动压力传感器的压力灵敏度进行了力学分析。采用部分波分析方法研究了剪切水平(SH)泄漏型声表面波在预应力LiNbO3衬底上的传播行为。采用有限元法计算了声表面波传播路径的压力灵敏度，并研究了膜片厚度对传感器性能的影响，结果表明，适当厚度的LiNbO3膜片可以获得比石英更好的灵敏度。通过传感器实验验证了理论结果。我们开发了一种基于41deg-YX LiNbO3的压力传感器，该传感器集成了温度传感器和8位ID标签，该传感器采用440 MHz双层rdl结构，其中采用Ni电镀设计了- 150 mum腔体。利用HP网络分析仪对制作的传感器进行了无线表征。从测量的S11中观察到高信噪比。获得了满意的压力灵敏度-2.9°/kPa。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

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