The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)最新文献

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The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode 一种新型波束刚体MEMS陀螺仪在调频模式下的应用
S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman
{"title":"The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode","authors":"S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman","doi":"10.1109/NEMS.2014.6908880","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908880","url":null,"abstract":"For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"47 1","pages":"586-591"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80872388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
A novel micromixer with multimixing mechanisms for high mixing efficiency at low Reynolds number 一种低雷诺数下具有高混合效率的混合机制的新型微混合器
H. L. The, N. Tran-Minh, H. Le-Thanh, F. Karlsen
{"title":"A novel micromixer with multimixing mechanisms for high mixing efficiency at low Reynolds number","authors":"H. L. The, N. Tran-Minh, H. Le-Thanh, F. Karlsen","doi":"10.1109/NEMS.2014.6908896","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908896","url":null,"abstract":"In this paper, we propose a novel passive micromixer structure for high mixing efficiency based on the combination of multimixing principles. With a special structure, our proposed micromixer can create vortices, transversal flows and chaotic advections to provide high mixing efficiency event at low Reynolds number. Moreover, two narrow slits at two ends of each mixing unit remarkably reduce pressure drop, making it easy to be built into micro-devices. We conduct intensive simulation to evaluate the performance of our proposed micromixer by numerically solving the governing Navier-Stokes equation and convection-diffusion equation using COMSOL Multiphysics package. The simulation results indicate that our proposed micromixer may achieve stable mixing efficiency of 80% or above for a wide Reynolds number range from 0.5 to 100. Especially, at Reynolds number (Re) > 30, mixing efficiency is less dependent on Reynolds number. The mixing efficiency of our micromixer is two times higher than mixing efficiency of micromixer based on unbalanced splits and collisions of fluid at the same mixing channel length of 5mm. At Re = 30, our proposed micromixer has high mixing efficiency of 85% with moderate pressure drop ΔP = 12,600Pa.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"98 1","pages":"651-654"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80910491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A low-noise CMOS interface circuit for resonant pressure sensor 一种用于谐振压力传感器的低噪声CMOS接口电路
Xiaodong Sun, W. Yuan, Sen Ren, Jinjun Deng, C. Jiang
{"title":"A low-noise CMOS interface circuit for resonant pressure sensor","authors":"Xiaodong Sun, W. Yuan, Sen Ren, Jinjun Deng, C. Jiang","doi":"10.1109/NEMS.2014.6908791","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908791","url":null,"abstract":"This paper presents a low-noise CMOS interface circuit of the resonant pressure sensor. A high-frequency carrier is employed to extract the small vibration signal of the resonator and suppress the low-frequency coupling signal. A differential detection circuit is implemented to suppress common mode noise. Sensor chip is packaged together with the interface ASIC, reducing the coupling capacitor of the resonator and the sensing electrode. The AS IC is fabricated in a 0.18 um CMOS process and the sensor chip is fabricated using a commercially available silicon-on-insulator wafer. The test result shows that the resonant pressure sensor has a nonlinearity of 0.045%FS, a hysteresis error of 0.14%FS, and a repeatability error of 0.18%FS.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"6 1","pages":"204-207"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73295207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An Aluminum Nano-Spike electroporation chip for low voltage delivery of molecules to cancer cells 一种用于向癌细胞低压输送分子的铝纳米尖刺电穿孔芯片
K. Riaz, S. Leung, S. Tripathi, Gursimran Singh Sethi, H. Shagoshtasbi, Z. Fan, Y.-K. Lee
{"title":"An Aluminum Nano-Spike electroporation chip for low voltage delivery of molecules to cancer cells","authors":"K. Riaz, S. Leung, S. Tripathi, Gursimran Singh Sethi, H. Shagoshtasbi, Z. Fan, Y.-K. Lee","doi":"10.1109/NEMS.2014.6908779","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908779","url":null,"abstract":"Micro electroporation (EP) devices with high efficiency and cell viability are useful for various biomedical applications, such as drug delivery and screening. However, these devices usually have low reliability due to undesirable electrochemical reactions. In this study, an Aluminum Nano-Spike EP (ANS-EP) chip was fabricated using nano-imprint lithography, electrochemical anodization and MEMS technology. The fabricated device was characterized using cervical cancer cell line (HeLa cells). The EP efficiency and cell viability as functions of electric pulse amplitude and duration were measured using digital fluorescent microscopy with Propidium Iodide (PI) dye. Numerical simulations of electric field strength indicated enhanced localized electric field at the tip due to high aspect ratio of nano-spikes. Systematic experiments revealed EP can be achieved with high efficiency and cell viability using ANS-EP chips without bubble generation at the critical applied voltage of 2.5 V, much smaller than the micro and conventional electroporators.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"12 1","pages":"147-151"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78990960","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Silicon substrate strength enhancement depending on nanostructure morphology 硅衬底强度增强取决于纳米结构形态
Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, M. T. Hou, J. Yeh
{"title":"Silicon substrate strength enhancement depending on nanostructure morphology","authors":"Kunal Kashyap, Amarendra Kumar, Chung-Yao Yang, M. T. Hou, J. Yeh","doi":"10.1109/NEMS.2014.6908834","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908834","url":null,"abstract":"Silicon nanostructures are extensively being researched for many different applications for industries. Here we present two different types of nanostructures, silicon nanoplates and nanoholes fabricated by electroless metal assisted wet etching for enhancing the bending strength by ~3.7 fold and ~6 fold respectively as compared to polished silicon samples which emphasize the dependence of bending strength on nanostructure morphologies. Roughness at the nanostructure bottom cause stress concentration to increase which degrades the bending strength. Moreover, this technology can open a pathway of flexible silicon substrates for flexible and bendable electronics.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"13 1","pages":"390-393"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77263708","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Filling through-silicon vias with conductive ferromagnetic silver-iron composite 用导电铁磁银铁复合材料填充硅通孔
C. Lu, Kerwin Wang
{"title":"Filling through-silicon vias with conductive ferromagnetic silver-iron composite","authors":"C. Lu, Kerwin Wang","doi":"10.1109/NEMS.2014.6908828","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908828","url":null,"abstract":"This paper demonstrates a novel magnetic induced injection method of ferromagnetic composite to build electrically conductive through-silicon vias (TSVs). The through conductive via is filled with conductive ferromagnetic composite by attractive magnetic force. The composite is made of the mixture of silver and iron nanoparticles. SU-8 2002 is covered on the side walls of via as an insulating material by a low vacuum suction. After thermal curing process, the dielectric layer can possess an electric field as high as 5×106 V/cm. All of the fabrication steps are completed below 100 C. The TSVs can allow a current density of 6×107 A/m2. The leakage current is 2×10-6 A at 50 V. After DC electrical sintering, the resistances of each TSV is less than 0.85 Ω.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"23 1","pages":"366-369"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81492229","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An integrated microfluidic system for screening of peptides specific to colon cancer cells and colon cancer stem cells using the phage display technology 利用噬菌体展示技术筛选结肠癌细胞和结肠癌干细胞特异性肽的集成微流控系统
Yu-Jui Che, Huei-Wen Wu, Lein-Yu Hung, Hwan-You Chang, Kuan Wang, Gwo-Bin Lee
{"title":"An integrated microfluidic system for screening of peptides specific to colon cancer cells and colon cancer stem cells using the phage display technology","authors":"Yu-Jui Che, Huei-Wen Wu, Lein-Yu Hung, Hwan-You Chang, Kuan Wang, Gwo-Bin Lee","doi":"10.1109/NEMS.2014.6908845","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908845","url":null,"abstract":"Reagents binding specifically to target molecules are essential tools for clinical diagnosis and targeted therapy. Screening of target cell-surface specific affinity reagents with bench-top methods has some drawbacks, including time-consuming, labor-intensive and requirement of large-scale instrument. Microfluidic platforms may overcome these drawbacks because they could automate and complete the screening process within a shorter period of time. Phage display is a promising technology in selection of cell-surface specific peptides. In recent years, a subpopulation of tumor cells named cancer stem cells is believed to be the tumorigenic cells and closely associated with metastasis. A specific peptide that can recognize and differentiate cancer stem cells from the rest of cancer cell population is therefore useful for early diagnosis and targeted therapy. In this study, selection of M13 phage displayed peptides that bind with colon cancer cells and colon cancer stem cells using an integrated microfluidic system was successfully demonstrated. Compared with the traditional methods, the total selection process was shortened to 36 hours while traditional method needs almost a month. More importantly, the screening process can be automated and performed on a single microfluidic chip. The developed technique may be promising for early diagnosis of cancer and target therapeutics.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"52 1","pages":"440-443"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87538907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching 湿法蚀刻制备超疏水/超亲水透明纳米结构玻璃
Amarendra Kumar, Kunal Kashyap, K. Liao, M. T. Hou, J. Yeh
{"title":"Super hydrophobic/super hydrophilic transparent nanostructured glass fabricated by wet etching","authors":"Amarendra Kumar, Kunal Kashyap, K. Liao, M. T. Hou, J. Yeh","doi":"10.1109/NEMS.2014.6908771","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908771","url":null,"abstract":"Glass nanostructures were fabricated by wet chemical etching instead of using the complicated nanolithography and expensive dry etching process. Super hydrophilic glass with contact angle of 1° was created using this nanostructure with 92% transparency. Self-assembled monolayer of Perfluorodecyl-trichlorosilane (FDTS) was used to further make the glass super hydrophobic with contact angle of 151° without affecting its transparency. Polysilicon layer of 300 nm was deposited on glass substrate first and nanostructures were fabricated in this layer by metal assisted wet chemical etching. Thermal oxidation converted the silicon nanostructure to silicon dioxide nanostructure. This technology is producible on mass scale and useful in preparation of anti-fogging and self-cleaning glass.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"63 1","pages":"113-116"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78245692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
SOI technology-based microfiltration system for circulating tumor cells isolation and enumeration 基于SOI技术的循环肿瘤细胞分离与计数微滤系统
Wei Ma, Ronghao Zeng, Dayu Liu, Y. Zohar, Yi-Kuen Lee
{"title":"SOI technology-based microfiltration system for circulating tumor cells isolation and enumeration","authors":"Wei Ma, Ronghao Zeng, Dayu Liu, Y. Zohar, Yi-Kuen Lee","doi":"10.1109/NEMS.2014.6908820","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908820","url":null,"abstract":"A SOI technology-based micro filtration system for circulating tumor cells (CTCs) isolation and enumeration is reported; this is in contrast of using single-crystal-silicon wafers resulting in poor etching uniformity. This microsystem consists of a silicon filter enclosed with PDMS layers, a digital syringe pump, a fluorescence microscope, a digital CCD camera in combination with the CellProfiler software for rapid cell enumeration. Human cervical cancer cells (HeLa cells) were used for preliminary tests of the system performance. 3D CFD simulations demonstrate that the velocity and shear stress can be well controlled to avoid hydrodynamic cell lysis. In comparing with our previous CTC chip using polycarbonate (PC) filter membrane, the SOI-based system has a much improved CTC capturing and enumeration performance.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"12 1","pages":"333-336"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78360904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Experimental investigation of 3D plasmon talbot effect 三维等离子体talbot效应的实验研究
Yiting Yu, H. Zappe
{"title":"Experimental investigation of 3D plasmon talbot effect","authors":"Yiting Yu, H. Zappe","doi":"10.1109/NEMS.2014.6908866","DOIUrl":"https://doi.org/10.1109/NEMS.2014.6908866","url":null,"abstract":"Three-dimensional (3D) plasmon Talbot effect is experimentally investigated on three finite-sized, two-dimensional (2D) periodical arrays composed of subwavelength nanoholes with different fill factors. By using water as the output medium, both the focusing behavior and the plasmon Talbot revivals are clearly observed even when the operating wavelength is larger than the array period. And theoretically, with the output material having a refractive index of n, the operating wavelength to realize the plasmon Talbot effect can be enlarged by a factor of n-1. The integral and fractional plasmon Talbot revivals reproduce the device pattern with rich subwavelength hotspots (0.56~0.72λ) in exactly the same array period, which shows a great prospect for the low-cost, large-scale micro- and nanolithography. The preliminary experimental results indicate that the fill factor doesn't play an obvious influence on the size of the achieved plasmon Talbot hotspots.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"1 1","pages":"532-535"},"PeriodicalIF":0.0,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78782437","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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