一种新型波束刚体MEMS陀螺仪在调频模式下的应用

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) Pub Date : 2014-04-13 DOI:10.1109/NEMS.2014.6908880

S. A. M. Lajimi, G. Heppler, E. Abdel-Rahman

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引用次数: 4

摘要

针对一种由悬臂梁和端刚体构成的新型MEMS陀螺仪，采用假设模态法得到了其降阶(离散)模型。通过与平稳偏微分控制方程的比较，验证了离散模型的静态性能。研究了系统在恒定输入电压下的自由动力学特性。得到了系统的陀螺固有频率和伪固有频率。为了使陀螺仪在调频模式下工作，输入角速率以解析和数值形式计算。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode

For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.

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来源期刊

The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

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