The application of a new beam-rigid body MEMS gyroscope in the frequency-modulation mode

Abstract

For a new type of a MEMS gyroscope made of a cantilever beam and an end-rigid-body, the reduced-order (discretized) model is obtained by using the method of assumed modes. The discretized model's static behavior is verified by comparing with the stationary partial differential governing equations. The free dynamics of the system are studied under a constant input voltage. The gyroscopic natural and pseudo-natural frequencies of the system are obtained. To operate the gyroscope in the frequency-modulation mode, the input angular rate is computed in analytical and numerical form.