The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.最新文献

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A lateral field-emission RF MEMS device [resonator filter applications] 一种横向场发射RF MEMS器件[谐振器滤波器应用]
K. Yamashita, W. Sun, K. Kakushima, H. Fujita, H. Toshiyoshi
{"title":"A lateral field-emission RF MEMS device [resonator filter applications]","authors":"K. Yamashita, W. Sun, K. Kakushima, H. Fujita, H. Toshiyoshi","doi":"10.1109/SENSOR.2005.1496647","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496647","url":null,"abstract":"We present the concept, fabrication, simulation, and experimental result of a field emission RF MEMS device based on SOI technology. The objective of this project is to enable RF filtering by means of a mechanical resonator. Current results include: (1) successful demonstration of the field emission effect on a reference device between silicon tips at /spl sim/5 /spl mu/m gap distance below 2/spl times/10/sup -8/ torr high vacuum environment; and (2) sacrificial release of the 2/sup nd/ generation device with integrated micro-oscillator.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"275 1","pages":"1096-1099 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75072584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An in-plane microneedles used for sampling and glucose analysis 用于取样和葡萄糖分析的平面内微针
R. Liu, X.H. Wang, F. Tang, Y. Feng, Z. Zhou
{"title":"An in-plane microneedles used for sampling and glucose analysis","authors":"R. Liu, X.H. Wang, F. Tang, Y. Feng, Z. Zhou","doi":"10.1109/SENSOR.2005.1497372","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497372","url":null,"abstract":"We report here the design, fabrication and experiments of a hollow in-plane microneedle, with which a biosensor is integrated to extract interstitial fluid from skin for glucose measurement. The design of hollow in-plane microneedles leads to a simple fabrication process. Different from common methods for immobilizing enzyme, we use capillary force to immobilize enzyme on the surface of microelectrodes. The experimental results showed a good linearity for the characteristic curve of glucose concentration, when it varies from 0 to 500mg/dl with respect to current signal value. The sensitivity of 0.4238nA was obtained.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"472 1","pages":"1517-1520 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75313722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Optical bio-sniffer (biochemical gas sensor) for dimethyl sulfide vapor 二甲基硫化物蒸汽光学生物嗅探器(生化气体传感器)
K. Mitsubayashi, Y. Hashimoto, T. Kon, T. Minamide, M. Taniguchi, H. Saito
{"title":"Optical bio-sniffer (biochemical gas sensor) for dimethyl sulfide vapor","authors":"K. Mitsubayashi, Y. Hashimoto, T. Kon, T. Minamide, M. Taniguchi, H. Saito","doi":"10.1109/SENSOR.2005.1497529","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497529","url":null,"abstract":"An optical gas-sensor (bio-sniffer) for dimethyl sulfide (seaweed-odor substance) was constructed by immobilizing flavin-containing monooxygenase (FMO) to an oxygen-sensitive optical fiber. The sniffer was calibrated against gaseous DMS over the range of 10-100 ppm.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"234 1","pages":"2147-2150 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75748714","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Integrated bio/chemical sensing system with a microfluidic transport module based on electrowetting 基于电润湿的微流体传输模块集成生物/化学传感系统
W. Satoh, H. Hosono, H. Suzuki
{"title":"Integrated bio/chemical sensing system with a microfluidic transport module based on electrowetting","authors":"W. Satoh, H. Hosono, H. Suzuki","doi":"10.1109/SENSOR.2005.1497380","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497380","url":null,"abstract":"An integrated micro analysis system was fabricated using a microfluidic transport system driven by electrowetting and an air-gap ammonia sensor. The basic element in the system was a row of elongated gold working electrodes and a protruding polydimethylsiloxane (PDMS) structure which form an open channel structure. The wettability of the gold electrode was changed by applying a negative potential with respect to a Ag/AgCl electrode, and a solution introduced from an inlet was mobilized through the gap between the working electrode and the protruding structure. Also, a solution could be transported to any desired directions without using any valves. Furthermore, two solutions could be mixed based on the same principle. The open structure of the flow channel facilitated the integration of an air-gap ammonia sensor. Ammonia diffused from the mixing area was detected as the potential change of a pH-indicator electrode. The 90% response time was 45 s for 10 mM ammonia. The relation between the potential of the pH-indicator electrode and the logarithm of ammonia concentration was linear. Furthermore, a biosensing system was constructed by using immobilized urease or creatinine deiminase and the ammonia sensor. The concentration of urea and creatinine could be determined by measuring ammonia produced enzymatically from a sample solution. Linear calibration plot was obtained for urea concentrations down to 100 /spl mu/M and creatinine concentration down to 50 /spl mu/M.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"32 1","pages":"1549-1552 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74189618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Densely arrayed microneedles having flow channel fabricated by mechanical dicing and anisotropic wet etching of silicon 通过硅的机械切割和各向异性湿法蚀刻制备具有流道的密集排列微针
T. Hasada, M. Shikida, K. Sato
{"title":"Densely arrayed microneedles having flow channel fabricated by mechanical dicing and anisotropic wet etching of silicon","authors":"T. Hasada, M. Shikida, K. Sato","doi":"10.1109/SENSOR.2005.1497366","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497366","url":null,"abstract":"We previously proposed a novel process combining mechanical dicing and anisotropic wet etching for fabricating arrayed MEMS structures, and used it to make solid-type microneedle structures in drug delivery systems (Shikida et al., 2004). For this report, we further developed the fabrication process for embedding two types of flow channels in our microneedle structures. One type has a channel with an opening at the base of each needle, and the other type has a cored channel in the needle. The height and pitch of the needles were 120-550 /spl mu/m and 230-370 /spl mu/m, respectively. The new process does not include the expensive deep RIE process, and is applicable to disposable injection and extraction needles used in bio-medical applications.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"13 1","pages":"1493-1496 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73577133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Magnetic resonance microsystems for life science applications 生命科学应用的磁共振微系统
L. Fan, W. Huang, C. Cheng, P. Chu, H. Hao, C. Hsieh, S. H. Hsu, A. Chin, K. Hsueh, C. Lee, J. Chang, E. Liu, A. Huang, Chen-Fu Chien, A. Yeh, J. Chen, W. Wu, C. Lai
{"title":"Magnetic resonance microsystems for life science applications","authors":"L. Fan, W. Huang, C. Cheng, P. Chu, H. Hao, C. Hsieh, S. H. Hsu, A. Chin, K. Hsueh, C. Lee, J. Chang, E. Liu, A. Huang, Chen-Fu Chien, A. Yeh, J. Chen, W. Wu, C. Lai","doi":"10.1109/SENSOR.2005.1497493","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497493","url":null,"abstract":"Nuclear magnetic (MR) resonance spectroscopy and imaging technique are powerful methods available for determining molecular structures and non-invasive 3D imaging. In the effort of developing a nanoMRI microsystem, the authors have designed, fabricated, assembled and did preliminary characterization of the nanoMRI probe. A multilayer high aspect ratio metal process has been developed for this project. NanoMRI probes are designed through multi-physics finite element 3D analysis, integrated using the high aspect ratio process, assembled, and the RF coils are matched and tuned to a 500MHz system. Due to the large magnetic field gradients and fast switching gradient coils, the high mass-sensitivity and additional orthogonal RF signal channels, special MR pulse sequencies (Lauterbur et al., 1992) can be developed for imaging and molecular structural analysis.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"20 1","pages":"1998-2001 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73724261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A 2-D translational pinhole formed by two orthogonally moving micro-slits 由两个垂直移动的微缝形成的二维平动针孔
N. Chronis, M. Okandan, M. Baker, L. Lee
{"title":"A 2-D translational pinhole formed by two orthogonally moving micro-slits","authors":"N. Chronis, M. Okandan, M. Baker, L. Lee","doi":"10.1109/SENSOR.2005.1496629","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496629","url":null,"abstract":"Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30/spl times/30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to /spl sim/200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"2013 1","pages":"1022-1025 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73794780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A fully-integrated microfluidic chip for RNA-virus detection 用于rna病毒检测的全集成微流控芯片
F. Huang, C. Liao, Gwo-Bin Lee
{"title":"A fully-integrated microfluidic chip for RNA-virus detection","authors":"F. Huang, C. Liao, Gwo-Bin Lee","doi":"10.1109/SENSOR.2005.1497399","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497399","url":null,"abstract":"The study presents a new fully-integrated microfluidic chip capable of performing reverse transcription polymerase chain reaction (RT-PCR) (Obeid et al., 2003), transportation of DNA/RNA samples, capillary electrophoresis (CE) separation and on-line detection. In the proposed device, dengue-2 RNA-virus was synthesized to complementary DNA (cDNA) and replicated using a RT-PCR module and then transported by a pneumatic micropump to CE sample reservoir. The cDNA samples were separated electrophoretically and detected by buried optical fibers. We have successfully demonstrated the detection of a RNA-virus using less time and less consumption of samples and reagents. The developed microfluidic chip could provide a powerful tool for fast disease diagnosis.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"49 1","pages":"1624-1627 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73837875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A microfabricated narrow gap biofuel cell with membraneless design flexibility 具有无膜设计灵活性的微制造窄间隙生物燃料电池
N. Korivi, Jin-Woo Choi
{"title":"A microfabricated narrow gap biofuel cell with membraneless design flexibility","authors":"N. Korivi, Jin-Woo Choi","doi":"10.1109/SENSOR.2005.1496413","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496413","url":null,"abstract":"This paper presents the development and characterization of a microfabricated membraneless biofuel cell on a polymer microfluidic chip. The developed microscale biofuel cell utilizes glucose as fuel to generate bioelectric power and produces water as by-product. The developed biofuel cell exhibits a power output (power density up to 4.66 /spl mu/W/cm/sup 2/) which can be modulated by the electrode separation. The absence of a proton exchange membrane separating the anode and cathode chambers imparts high design flexibility to the developed biofuel cell. The biofuel cell has been tested for operation in physiological levels of pH and temperature, with both flowing and static fuel conditions. Due to its relatively wide range of operational temperature and stability in flowing fuel conditions, coupled with its harmless by-products and absence of any toxic reagents, renders it highly appropriate for applications in microfluidic, implantable, and portable systems.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"17 1","pages":"287-290 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79102032","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces 用于开放表面的气体传感器和传感器的防湿和防酸自组装钝化
T. Knittel, G. Freitag, W. Widanarto, I. Eisele
{"title":"A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces","authors":"T. Knittel, G. Freitag, W. Widanarto, I. Eisele","doi":"10.1109/SENSOR.2005.1497343","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497343","url":null,"abstract":"Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"57 1","pages":"1400-1403 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85044116","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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