由两个垂直移动的微缝形成的二维平动针孔

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI:10.1109/SENSOR.2005.1496629

N. Chronis, M. Okandan, M. Baker, L. Lee

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引用次数: 2

摘要

针孔对准是一个繁琐的过程，强烈影响光学系统的整体性能。为了解决这个关键问题，我们开发了一个二维平移针孔，它由两个正交移动的微缝组成。采用改进的SUMMIT-V工艺制备的MEMS针孔可以定位在XY平面的30/spl倍/30微米范围内。或者，它可以在扫描模式下使用，驱动频率高达/spl sim/200Hz，没有任何明显的幅度下降。典型的应用包括共聚焦扫描眼显微镜、激光束剖面仪和MEMS共聚焦显微镜。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A 2-D translational pinhole formed by two orthogonally moving micro-slits

Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30/spl times/30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to /spl sim/200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.

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来源期刊

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

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