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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.最新文献

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A new capacitive displacement sensor with high accuracy and long range 一种高精度、长距离的新型电容式位移传感器
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-07-30 DOI: 10.5369/JSST.2005.14.4.219
Moojin Kim, W. Moon, E. Yoon, Kwang-Ryeol Lee
{"title":"A new capacitive displacement sensor with high accuracy and long range","authors":"Moojin Kim, W. Moon, E. Yoon, Kwang-Ryeol Lee","doi":"10.5369/JSST.2005.14.4.219","DOIUrl":"https://doi.org/10.5369/JSST.2005.14.4.219","url":null,"abstract":"A new capacitive displacement sensor is designed and fabricated for measurement of a large displacement with very high accuracy. This sensor is a kind of linear encoder with an array of micro electrodes made by micromachining processes. The two patterned electrodes on the sensor substrates are assembled facing each other after being coated with thin dielectric film. Due to the thin dielectric film, it is highly sensitive to displacement but minimizes expected misalignments such as a tilting error. The sensor fabricated as a sample has a grating of electrodes with a width of 100 /spl mu/m, which is coated with a diamond-like carbon (DLC) film 0.8 /spl mu/m thick. The proposed sensor was tested to conclude that its resolution is 9.07 nanometers for the measuring range of 15 millimeters and that the linearity error is expected to be less than 0.02% throughout the measurable range.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"99 1","pages":"559-562 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-07-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80495270","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 54
Micro-arrayed cellular chips with optical sensor membranes for pH and oxygen 带有pH和氧光学传感膜的微阵列细胞芯片
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497422
M. Suzuki, H. Nakabayashi, Y. Jing, M. Honda
{"title":"Micro-arrayed cellular chips with optical sensor membranes for pH and oxygen","authors":"M. Suzuki, H. Nakabayashi, Y. Jing, M. Honda","doi":"10.1109/SENSOR.2005.1497422","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497422","url":null,"abstract":"We are developing micro-well array chip which has a quarter million wells on one chip, and diameter of each well is 10 /spl mu/m and only one cell can be occupied for each well. In this paper, we prepared optical pH and oxygen sensors in each well for monitoring of cell activity. Fluorescein isothiocyanate (FITC) and Tris(1,10-phenanthroline)ruthenium (II) chloride (Ru complex) was used as pH and oxygen sensing indicators respectively. Polydimethylsiloxane (PDMS) film which has 10 /spl mu/m diameter holes was put onto a silicide glass (DNA chip grade). In case of the pH sensor array, the amine-group introduced slide glass was used and FITC was covalently bound to the glass surface. In case of oxygen sensor array, the slide glass was coated with the Nafion containing Ru complex. Fluorescence intensity of each well was measured by using a high resolution microarray scanner.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"5 1","pages":"1716-1719 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75934891","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A high performance bidirectional micropump for a novel artificial sphincter system 一种用于新型人工括约肌系统的高性能双向微泵
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496390
A. Doll, S. Reimers, M. Heinrichs, F. Goldschmidtboeing, H. Schrag, U. Hopt, P. Woias
{"title":"A high performance bidirectional micropump for a novel artificial sphincter system","authors":"A. Doll, S. Reimers, M. Heinrichs, F. Goldschmidtboeing, H. Schrag, U. Hopt, P. Woias","doi":"10.1109/SENSOR.2005.1496390","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496390","url":null,"abstract":"We present the design, fabrication and testing of a novel medical implant based on a high performance silicon micropump. An analytical model was exploited for further optimization of our micropump design. The experimental data obtained are in a good accordance with theory. Two sphincter prostheses of different sizes were developed and tested. Their general medical capability as a prosthesis has been proven.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"71 1","pages":"188-191 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76161005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 69
High power electrostatic motor with micropatterned electret on shrouded turbine 带冠涡轮上带微图案驻极体的大功率静电电机
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496515
T. Genda, S. Tanaka, M. Esashi
{"title":"High power electrostatic motor with micropatterned electret on shrouded turbine","authors":"T. Genda, S. Tanaka, M. Esashi","doi":"10.1109/SENSOR.2005.1496515","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496515","url":null,"abstract":"The paper describes the fabrication process of a shrouded turbine and surface modification using fluorinated silane coupling agents to stabilize the charges of a silicon-dioxide electret. The shrouded turbine was fabricated by cavity-through etching, which is deep reactive ion etching (DRIE) through a wafer having cavities made by DRIE and fusion bonding. By using this process, a shrouded turbine with little eccentricity was obtained without damaging the inner structures such as blades and flow ways. Charge stability of electrets was deteriorated by miniaturizing the size. The charge deterioration was caused by leakage current through the surface. To decrease the surface conduction, the surface was terminated by fluorine with silane coupling agents. As a result, the charge stability of a silicon-dioxide electret was improved 100 times compared with HMDS (hexamethyldisilazane) treatment.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"16 1","pages":"709-712 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72732581","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Use of capacitive microsensors for concentration polarization characterization in pressure-driven crossflow membrane filtration 电容式微传感器在压力驱动横流膜过滤中浓度极化表征的应用
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497452
Zhongxia Zhang, V. Bright, A. Greenberg
{"title":"Use of capacitive microsensors for concentration polarization characterization in pressure-driven crossflow membrane filtration","authors":"Zhongxia Zhang, V. Bright, A. Greenberg","doi":"10.1109/SENSOR.2005.1497452","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497452","url":null,"abstract":"In membrane separation processes, the presence of the concentration polarization boundary layer (CPBL) can lead to a decline in the flux and an increased risk of membrane fouling. This paper describes the development of capacitive microsensors for real-time in-situ monitoring of CPBL growth in a nanofiltration membrane module using CaSO/sub 4/ solution as the feed. The sensors respond to changes in solute concentration as a function of distance from the membrane surface. Detection capability was determined in a series of comprehensive experiments with systematic changes in feed concentration and module operating parameters. The specially designed microcapacitor assembly provides a unique capability for real-time characterization of the transient and steady state concentration polarization behavior.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"22 1","pages":"1836-1839 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77667823","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Self-assembled silicon networks on plastic 塑料上自组装的硅网络
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496615
S.A. Stauth, B. Parviz
{"title":"Self-assembled silicon networks on plastic","authors":"S.A. Stauth, B. Parviz","doi":"10.1109/SENSOR.2005.1496615","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496615","url":null,"abstract":"We demonstrate the use of self-assembly for low temperature integration of microfabricated silicon components on a plastic substrate. Our method allows for integration of parts made by incompatible microfabrication technologies into a single platform. The self-assembly is performed in a single step providing both mechanical and electrical connections. The mild self-assembly conditions (temperature <100 C, pH /spl sim/3.5) are compatible with most electronics and photonics components.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"44 1","pages":"964-967 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77897408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 20
Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI wafer 双SOI晶圆自对准静电垂直组合驱动纯旋转微扫描仪的设计与制造
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496360
Y. Mizoguchi, M. Esashi
{"title":"Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI wafer","authors":"Y. Mizoguchi, M. Esashi","doi":"10.1109/SENSOR.2005.1496360","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496360","url":null,"abstract":"This paper describes a microscanner actuated by self-aligned electrostatic vertical combdrives. A tilt motion without unwanted vertical or lateral piston motions of a mirror, namely, a pure-rotation is very important for a scanning device for high resolution. We have designed and fabricated a pure-rotation microscanner in double SOI wafer actuated by self-aligned vertical electrostatic combdrives, and measured the characteristics. The design of the comb electrodes makes it possible to produce the tilt motion of the microscanner without piston motions. The static optical deflection angle of the device was measured as 7.6 degrees at 150V/sub dc/. The resonant frequency was found to be 660Hz.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"6 1","pages":"65-68 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81906537","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Characterization and modeling of a liquid-vapor phase change membrane actuator with an integrated SU-8 micro capillary wicking structure 集成SU-8微毛细抽芯结构的液-气相变膜驱动器的表征与建模
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496426
S. Whalen, S. Won, R. Richards, D. Bahr, C. Richards
{"title":"Characterization and modeling of a liquid-vapor phase change membrane actuator with an integrated SU-8 micro capillary wicking structure","authors":"S. Whalen, S. Won, R. Richards, D. Bahr, C. Richards","doi":"10.1109/SENSOR.2005.1496426","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496426","url":null,"abstract":"A liquid-vapor phase-change membrane actuator is demonstrated which integrates an open groove wicking structure to continuously pump liquid into the heat addition region of the pressure cavity. Integration of the wick yields a higher efficiency and operating speed compared with existing thermal phase-change actuators. This improvement results from control of the liquid thickness, volume, and fill rate. An experimentally validated numerical model is presented which determines the energy budget within the actuator and investigates factors controlling efficiency such as wick thickness, thermal mass, thermal conductivity, and membrane compliance. Work to date for this class of actuators has focused primarily on steady state behavior with detailed transient analyses receiving little attention. This investigation focuses strictly on characterization of transient operation and provides a benchmark for this class of dynamic thermal actuators. The actuator presented in this work develops pressure and deflection excursions of 148 kPa and 70 /spl mu/m at 10 Hz while consuming 150 mW. A peak force of 1.4 N is generated during each cycle and the thermal to mechanical efficiency is 0.11%.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"81 1","pages":"342-347 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81909066","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Changes in mechanical properties of micron-sized single-crystal-silicon film at high temperature 微米单晶硅薄膜在高温下力学性能的变化
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497484
S. Nakao, T. Ando, M. Shikida, K. Sato
{"title":"Changes in mechanical properties of micron-sized single-crystal-silicon film at high temperature","authors":"S. Nakao, T. Ando, M. Shikida, K. Sato","doi":"10.1109/SENSOR.2005.1497484","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497484","url":null,"abstract":"The effects of temperature on the mechanical properties of micron-sized single-crystal-silicon (SCS) film were investigated using an \"on-chip\" tensile test. Young's modulus slightly decreased as the test temperature increased. The fracture stress decreased to 1.78 GPa at 773 K, the value is about 32 % of that at room temperature. The stress-strain relationship of SCS film at 773 K showed elastic-plastic deformation, and we observed crossed slip lines on the side surface of the fractured specimen. The fracture behavior of micron-sized silicon film changed in a temperature range from 673 K to 773 K.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"7 1","pages":"1961-1964 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81920999","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Multi particles and biomolecules sorting system using thermoreversible gelation controlled by DMD [digital mirror device] DMD[数字镜像装置]控制的热可逆凝胶多粒子和生物分子分选系统
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496450
S. Watabe, M. Tatsuoka, T. Shimomae, Y. Shirasaki, J. Mizuno, T. Funatsu, S. Shoji
{"title":"Multi particles and biomolecules sorting system using thermoreversible gelation controlled by DMD [digital mirror device]","authors":"S. Watabe, M. Tatsuoka, T. Shimomae, Y. Shirasaki, J. Mizuno, T. Funatsu, S. Shoji","doi":"10.1109/SENSOR.2005.1496450","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496450","url":null,"abstract":"A one-inlet and nine outlet multi sorting system using thermoreversible gelation of polymer (Mebiol Gel/spl trade/) was developed for efficient particle and biomolecule handling. The system uses 3/spl times/3 arrayed microchannels which have 9 cross points. One outlet out of nine is selected and the flow pass is determined by IR irradiation to the certain junctions and channels where gel areas are formed. The IR irradiation points are selected using a PC controlled digital mirror device (DMD). Since nine flow passes are formed by the IR beams reflected by the DMD, nine outlets sorting are performed in simple microchannels without any mechanical valve systems. Switching time of less than 60 msec is obtained in this system.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"46 1","pages":"445-448 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84438074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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