The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.最新文献_第10页

A morphology-independent wafer level rivet packaging with Lego-like assembly 一种不受形貌影响的晶圆级铆钉封装，具有类似乐高的组装

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497488

Eunsung Lee, Woon-Bae Kim, I. Song, C. Moon, M. Kang, H. Kim, K. Chun

引用次数: 4

2-D and 3-D tactile pin display using SMA micro-coil actuator and magnetic latch 2-D和3-D触觉引脚显示采用SMA微线圈驱动器和磁锁

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496422

T. Matsunaga, W. Makishi, K. Totsu, M. Esashi, Y. Haga

{"title":"2-D and 3-D tactile pin display using SMA micro-coil actuator and magnetic latch","authors":"T. Matsunaga, W. Makishi, K. Totsu, M. Esashi, Y. Haga","doi":"10.1109/SENSOR.2005.1496422","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496422","url":null,"abstract":"A 2D and 3D tactile pin display has been fabricated and developed. Character and graphic information are dynamically displayed by making the pin array move up and down. Shape memory alloy (SMA) micro-coil actuators contract and make the pins move up and down when the SMA actuator is heated by supplying electrical current. A magnetic material tube is attached to each pin and a permanent magnet fixes the position of the pins' up or down state. The mechanism solves problems of heat storage and electrical consumption of the SMA actuator because the current is supplied only when the pins move. A 2D tactile pin display which has a 100 (10/spl times/10) pin array has been developed and successfully operated. The tactile information is displayed sequentially every 0.3 sec and the pins are latched at 0.1 N by magnetic force. The pins are arranged at a pitch of 2.5 mm and move 2 mm up and down. A multi-step magnetic latch has been developed for a 3D expression. By using these mechanisms, several types of tactile information, e.g. 2D, 3D, dynamic motions, can be easily displayed.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"1 1","pages":"325-328 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81082404","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 16

Novel fabrication method of self positioned and focal length tuned microlens 一种新型自定位焦距调谐微透镜制造方法

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496433

Seihwan Jung, Kook-Nyung Lee, Y. Jang, Yong-Kweon Kim

{"title":"Novel fabrication method of self positioned and focal length tuned microlens","authors":"Seihwan Jung, Kook-Nyung Lee, Y. Jang, Yong-Kweon Kim","doi":"10.1109/SENSOR.2005.1496433","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496433","url":null,"abstract":"We report a solid microlens with self-positioning and tuned focal length using hydrophobic effects and electrowetting. We propose a novel fabrication method aligning the centers of electrodes and hydrophobic pattern simultaneously using one photomask. The proposed fabrication method offers a solid microlens by using a UV curable polymer. The focal length of the liquid microlens can be tuned to the targeted value by applying voltage to the electrodes before UV exposure solidification. Experiments showed that the tuning range of focal length by using electrowetting is 0.43 mm. It covers the initial focal length deviation 0.21 mm of the microlens. Seven samples showed an initial distribution from 1.78 to 1.58 mm in focal length. Their focal lengths are controlled by applying voltages from 1.77 to 1.82 mm. Volume contraction and following focal length change were evaluated, and optical losses are measured to be 0.92 and 0.49 dB in red and green, respectively. The measured surface roughness is 4 nm, which is applicable to optical micro-systems.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"117 1","pages":"372-375 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86193346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Microdevice components for a cellular microsurgery suite 用于细胞显微手术套件的微设备组件

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496395

W.C. Chang, C. Keller, E. Hawkes, D. Sretavan

引用次数: 2

Multifunctional tool for expanding AFM-based applications 扩展基于afm的应用程序的多功能工具

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496383

S. Deladi, N. Tas, G. Krijnen, M. Elwenspoek

引用次数: 1

Replication of microneedle arrays using vacuum casting and hot embossing 用真空铸造和热压印复制微针阵列

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497348

A. Trautmann, F. Heuck, C. Mueller, P. Ruther, O. Paul

引用次数: 20

Cylindrical pillars in silicon PCR chip enhance the performance of DNA amplification 硅质PCR芯片的圆柱形柱增强了DNA扩增的性能

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497394

S. H. Park, Moon Yun Jung, Tae Hwan Yoon, H. Pyo

{"title":"Cylindrical pillars in silicon PCR chip enhance the performance of DNA amplification","authors":"S. H. Park, Moon Yun Jung, Tae Hwan Yoon, H. Pyo","doi":"10.1109/SENSOR.2005.1497394","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497394","url":null,"abstract":"This paper presents a new design of a silicon PCR chamber with cylindrical pillars on the bottom which showed good performance in heat transfer and DNA amplification efficiency comparable to thermocycler. We successfully amplified the full DNA sequence of N-acetyl transferase 2 (NAT2) gene, cancer related gene, from the genomic DNA. NAT2 transfers the acetyl moiety to toxic compounds coming into the cell. Acetylated toxic compounds may change their 3D structure and lose toxic activities. We observed temperature difference between top and bottom of PCR mixture even by more than 7/spl deg/C when general PCR micro chamber was heated and adjusted to be a constant temperature by electric power (data not shown). This may influence bad effects on the yield and reproducibility of DNA amplification in PCR lab-on-a-chip. Cylindrical pillars expanding surface area facing to PCR mixture are thought to be helpful to get higher efficiency of heat transfer. We also made a thin film type of heater through FPC manufacturing process. That requires low cost and is applicable for mass production. Pillar-formed PCR chamber and FPC film heater showed good performance of DNA amplification, comparable to thermocycler and higher than that of nonpillar PCR chamber.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"19 1","pages":"1604-1607 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87225880","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

A membrane actuator based on piezo-polymer-composite technology [microvalve application example] 一种基于压电-聚合物复合技术的薄膜执行器[微阀应用实例]

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496526

E. Just, D. Pustan, P. Woias

引用次数: 3

Sensitivity improvement of diaphragm type ultrasonic sensors by complementary piezoelectric polarization 压电互补极化提高膜片型超声传感器灵敏度

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497521

K. Yamashita, M. Okuyama

引用次数: 22

Micromachined Fourier transform spectrometer on silicon optical bench platform 硅光学台架微机械傅立叶变换光谱仪

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497306

Kyoungsik Yu, Daesung Lee, U. Krishnamoorthy, N. Park, O. Solgaard

引用次数: 98