压电互补极化提高膜片型超声传感器灵敏度

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI:10.1109/SENSOR.2005.1497521

K. Yamashita, M. Okuyama

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引用次数: 22

摘要

提出了一种简单的压电超声传感器电极结构，提高了传感器的灵敏度。新的电极结构能够使用正、负压电极化的两个部分，并且通过将两个绝对输出相加，与传统传感器相比，提高了灵敏度。通过理论计算找到了最优电极尺寸，并制作出了最优结构的传感器。与传统传感器相比，新型传感器的灵敏度提高了50%。

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Sensitivity improvement of diaphragm type ultrasonic sensors by complementary piezoelectric polarization

A simple electrode configuration of piezoelectric ultrasonic sensor has been proposed and the sensitivity has been improved. The new electrode configuration enables to use two parts of both the positive and negative piezoelectric polarizations and to improve the sensitivity compared to conventional sensors by summing up both the absolute outputs. Optimal electrode sizes have been found by theoretical calculation and the sensor with the optimal configuration has been fabricated. The sensitivity of the new sensor has been improved 50% compared with that of conventional sensors.

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来源期刊

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

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