A lateral field-emission RF MEMS device [resonator filter applications]

Abstract

We present the concept, fabrication, simulation, and experimental result of a field emission RF MEMS device based on SOI technology. The objective of this project is to enable RF filtering by means of a mechanical resonator. Current results include: (1) successful demonstration of the field emission effect on a reference device between silicon tips at /spl sim/5 /spl mu/m gap distance below 2/spl times/10/sup -8/ torr high vacuum environment; and (2) sacrificial release of the 2/sup nd/ generation device with integrated micro-oscillator.