用于开放表面的气体传感器和传感器的防湿和防酸自组装钝化

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI:10.1109/SENSOR.2005.1497343

T. Knittel, G. Freitag, W. Widanarto, I. Eisele

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引用次数: 1

摘要

采用自组装单层膜制备换能器表面钝化的防湿防酸膜。这种保护可用于含硅表面，如SiO/sub 2/或Si/sub 3/N/sub 4/，以及铝。腐蚀性酸的蚀刻测试表明，在受保护表面的情况下，110 nm铝层的蚀刻时间要高出十倍以上。疏水特性用于气体传感器中，以防止表面电流引起的无意离子漂移。气体传感器可以在rh高达95%的环境条件下稳定运行。

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A humidity repellent and acid-proof self-assembling passivation for gas sensors and transducers with open surfaces

Self assembling mono layers are used to fabricate a humidity repellent and acid-proof film for transducer surface passivation. This protection can be used for silicon containing surfaces, like SiO/sub 2/ or Si/sub 3/N/sub 4/, as well as for aluminium. Etching tests with aggressive acids have shown a more than tenfold higher etching time for 110 nm aluminium layers in the case of protected surfaces. The hydrophobic characteristics are used in a gas sensor to prevent the unintentional ionic drift by surface currents. Stable operation of the gas sensors in environmental condition with r.h. up to 95% is possible.

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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

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