{"title":"KrF Lithography for Si based 2D honey comb lattice pillars","authors":"S. S. Mehta, B. Murthy, N. Singh","doi":"10.1109/NANOEL.2006.1609749","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609749","url":null,"abstract":"We report 248 nm KrF lithography techniques to fabricate two dimensional (2D) honey comb lattice photonic crystal on 8-inch silicon substrate . Through R-soft simulation we find maximum transverse magnetic (TM) band gap at normalized frequency of 0.322 and pillar diameter of 0.210 um for a lattice constant of 0.5 um . Experimental results show 0.214 um pillar diameter at pitch 0.5 um with good process latitude which is very close to R-soft simulation result","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"01 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127192571","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Optical properties of Zn1-xMgxO nano-particles obtained by low temperature method","authors":"M. Ghosh, A. Raychaudhuri","doi":"10.1109/NANOEL.2006.1609726","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609726","url":null,"abstract":"In this paper we report synthesis of Magnesium substituted Zinc Oxide (Zn1-xMgxO) nano-particles (~8-10nm) by low temperature solution route. We could reach upto x=0.075 without MgO getting segregated. Rietveld analysis of the XRD data confirms the Wurzite structure and a continuous compaction of the lattice as x increases. The bandgap also gets enhanced as x is increased and reaches a value of 4eV for x=0.075. The absorption also shows persistence of the excitoinc absorption on Mg substitution. The nanoparticles show near band edge photo luminescence (PL) at room temperature which shows blue shift on Mg incorporation.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"220 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130484431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Jang, S. Cha, Y. Choi, D. Kang, T. Butler, D. Hasko, J.E. Jung, J.M. Kim, G. Amaratunga
{"title":"Nanotube based Vertical Nano-devices for High Integration Density","authors":"J. Jang, S. Cha, Y. Choi, D. Kang, T. Butler, D. Hasko, J.E. Jung, J.M. Kim, G. Amaratunga","doi":"10.1109/NANOEL.2006.1609695","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609695","url":null,"abstract":"Various nano-devices based on vertical nanotubes were developed. Carbon nanotubes (CNTs) were employed as a functional part or a nano structure of a nanoelectromechanical (NEM) switch, nano-capacitor, and NEM-dynamic random access memory (DRAM). The unique vertical structure of nanotubes allows high integration density for devices.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115021237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Investigation of Nano-Scale Single Crystal Silicon Using the Atomistic-Continuum Mechanics with Stillinger-Weber Potential Function","authors":"Chun-Te Lin, K. Chiang","doi":"10.1109/NANOEL.2006.1609680","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609680","url":null,"abstract":"This research proposes a novel atomistic-continuum method (ACM) based on the finite element method (FEM) to investigation the mechanical behavior of nano-scale single crystal silicon under uniaxial tensile loading. The FEM is widely used to model and simulate the mechanical behaviors of solid structure, it is a mature technology after decades of development. The ACM could be reduced efficiently the computational time and maintained the simulation accuracy. Since, the ACM developed the bonding force between the two silicon atoms to the two kinds of the nonlinear spring element. Moreover, due to the FEM considered the minimization of the total potential energy, which includes strain energy and the potential energy possessed by applied loads of SCS, a robust FEM is applied to solve the numerical model based on ACM. Therefore, this study combines FEM and interatomic potential function to explore the mechanical properties of nano-scale single crystal silicon. A general form of Stillinger-Weber potential function was used for interaction between the silicon atoms in the simulations. Simulation results showed that the Young’s modulus of single crystal silicon were 121.8, 153 and 174.6 GPa along the","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115646367","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Enhanced Control of Morphology in Thin Film Nanostructure Arrays","authors":"D. Gish, M. Summers, M. Jensen, M. Brett","doi":"10.1109/NANOEL.2006.1609768","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609768","url":null,"abstract":"Glancing angle deposition (GLAD) was used to grow thin films of silicon and titanium dioxide slanted post nanostructures onto periodically patterned substrates. The patterned substrates consisted of tetragonal arrays of small hillocks with periodicities of 100, 200, and 300 nm. An advanced substrate rotation algorithm called PhiSweep was used during the deposition. The PhiSweep algorithm consists of rotating the substrate back and forth such that the arriving vapour flux direction alternates from either side of desired column tilt direction. This reduces the anisotropy of the shadowing conditions, which diminishes column fanning. The tilt angle of the columns is affected by the PhiSweep parameters, which is important in applications such as square spiral photonic crystals. This relation is derived and confirmed with tilt angle measurements of the slanted post films. The films grown using the PhiSweep method were compared with similar films grown using traditional GLAD. The PhiSweep technique produced films which conformed to the initial periodic pattern much better than the films grown with traditional GLAD, enabling the growth of nanostructure arrays with smaller periodicities.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124000509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chia‐Ching Chang, K. Sun, Shang-Fan Lee, L. Kan, C. Kuan
{"title":"Self-assembled Molecular Magnets on Patterned Silicon Substrates","authors":"Chia‐Ching Chang, K. Sun, Shang-Fan Lee, L. Kan, C. Kuan","doi":"10.1109/NANOEL.2006.1609712","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609712","url":null,"abstract":"The paper reports the methods of preparing molecular magnets and pattering of the molecules on semiconductor surface. A highly magnetically aligned metallothionein containing Mn and Cd (Mn, Cd-MT-2) was first synthesized. Those molecules were then placed into nanopores prepared on silicon","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116371528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Selective Deposition of Hafnium Oxide Nano-Thin Films on OTS Patterned Si","authors":"B. Kang, J. Lee, D. Jung, J. Boo","doi":"10.1109/NANOEL.2006.1609763","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609763","url":null,"abstract":"The patterning of thin films is of considerable scientific and technological interest. Various ways to obtain micro/nano patterns of thin films have been thoroughly investigated. Soft lithography is the method to make micro/nano size patterns and structures simply using organic materials without involving high energy. In particular, microcontact printing (μCP) is a very convenient, nonphotolithographic technique that can generate patterned features of self-assembled monolayers (SAMs) on both planar and nonplanar surfaces. Moreover, the μCP technique shows that hydrophobic patterns with micro/nano dimensions can be formed on hydrophilic surfaces. In this study, we carried out the selective deposition of HfO2nano-thin films on Si","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"281 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116590155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Biotribological model systems for emerging nanometer scale technologies","authors":"I. Gebeshuber, A. Pauschitz, F. Franek","doi":"10.1109/NANOEL.2006.1609757","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609757","url":null,"abstract":"Technological devices such as pressure sensors, gyroscopes and accelerometers get smaller and smaller. This increases the necessity for the fundamental understanding of tribological phenomena at the micro- and nanometer scale. Biological systems excel also at this scale. The thesaurus that nature has developed during the last millions of years of evolution comprises self-cleaning surfaces, systems with friction coefficients smaller than any occurring in man-made systems and organisms that produce macromolecules with ice binding properties. Such systems with well adapted biotribological properties shall serve as inspiration for innovation in micro- and nanotechnology.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121435501","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Studies on nano silver oxide thin films for optical memories","authors":"A. Subrahmanyam, P.S. Kumar","doi":"10.1109/NANOEL.2006.1609689","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609689","url":null,"abstract":"In the present work, a novel proof oc concept for rewritable ultra high density nano optical data storage devices has been discussed. Nano silver films are prepared on glass substrates by DC Magnetron sputtering technique at lower temperature (T= 150 K). When these films are oxidised and are irradiated with blue light (λ= 485 nm), a fluorescence emission is observed in the red region (μ ~ 650 nm) . These films are analysed by XRD and AFM. Emission spectrum was recorded using fluorometer. Films of thicknesses 50Å to 600Å are prepared and compared the fluorescence properties. It is observed that the fluorescence emission from the silver clusters depends on growth parameters in sputtering (like substrate temperature or deposition rate) and on the oxidation temperature.","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124790679","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
J. Yang, A. Gunn, T. Palmbach, Dongguang Wei, S. Sinha
{"title":"Nano-Forensics ---- Nanoparticles in Gun-Shot-Residue","authors":"J. Yang, A. Gunn, T. Palmbach, Dongguang Wei, S. Sinha","doi":"10.1109/NANOEL.2006.1609727","DOIUrl":"https://doi.org/10.1109/NANOEL.2006.1609727","url":null,"abstract":"Analysis of Gun-Shot Residue (GSR) is a very critical step in Forensic studies of shooting and related criminal cases. However, the current techniques used for GSR analysis are not complete. Detailed information regarding the elemental and crystallographic signatures of the GSR are missing. Moreover the analysis requires a substantial amount of sample which is difficult to obtain and frequently might be contaminated. The current study on the GSR focuses on these deficiencies. Electron Microscopic studies of the metallic nanoparticles (10-100 nm in diameter) obtained from GSR at different target distances from a Winchester Super-X 9mm luger has been analyzed in detail. Perfectly spherical (diameter ~ 10 nm) and very crystalline Pb and Sb nanoparticles were observed. Theoretical studies explaining the formation of the nanoparticles is reported. The non-equilibrium thermodynamic processes leading to the synthesis of the nanoparticles was observed to be very similar to the artificial chemical synthesis methods (e. g. CVD, Laser Ablation etc.). A simplified model will be proposed to explain the nanoparticle synthesis process in the GSR. This additional information obtained from the nanoparticle synthesis model will provide valuable forensic evidence in solving criminal cases. Forensic benefits of this information will be discussed. This ingenious synthesis mechanism has been demonstrated in synthesizing pure crystalline form of other popular nanomaterials..","PeriodicalId":220722,"journal":{"name":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125432918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}