Shijiang Li , Zhenfeng Tong , Shuo Cheng , Zhao Shen , Lu Sun , Aoxiang Gong , Bin Long , Bo Qin , Yaqiang Wang , Shenghui Lu , Jun Sun
{"title":"Resistance to embrittlement in ferritic/martensitic steel with TaWVCr coating in oxygen-saturated lead‑bismuth eutectic at 350 °C","authors":"Shijiang Li , Zhenfeng Tong , Shuo Cheng , Zhao Shen , Lu Sun , Aoxiang Gong , Bin Long , Bo Qin , Yaqiang Wang , Shenghui Lu , Jun Sun","doi":"10.1016/j.surfcoat.2025.131729","DOIUrl":"10.1016/j.surfcoat.2025.131729","url":null,"abstract":"<div><div>Ferritic/martensitic (F/M) steels are potentially applied as structural materials in the lead cooled fast reactor, a promising fourth-generation reactor that adopts lead bismuth eutectic (LBE) as coolant. However, the F/M steels normally suffer from a LBE sensitivity, showing a liquid metal embrittlement when exposed to the LBE. Here in present work, TaWVCr complex concentrated alloy coating was deposited by using magnetron sputtering to protect the F/M steels from liquid metal embrittlement. For this purpose, 12Cr F/M steel coated and uncoated TaWVCr were tested in a static oxygen-saturated LBE at 350 °C by corrosion testing and slow strain rate tension testing, respectively, for comparison. The TaWVCr-coated 12Cr F/M steel exhibited a tensile elongation of ∼19.6 %, over three times of the uncoated 12Cr F/M steel one (< 5.1 %). It was demonstrated that the TaWVCr coating, even in thickness of about 5 μm, is effective in securing the F/M steel against embrittling. Comprehensive microstructural characterizations were conducted, to reveal the mechanisms responsible for embrittlement resistance. It was revealed that the embrittlement of 12Cr F/M steel is primarily associated with cracking of the surface oxide scale, which propagates into the matrix and hence provides a channel for LBE to wet the matrix. On the contrary, the TaWVCr coating substantially preserves the 12Cr F/M steel from being punctured by oxidation cracks and concomitantly reduces the sensitivity to liquid metal embrittlement. As a result, the fracture pattern changes from a brittle fracture to ductile fracture with the introduction of TaWVCr coating.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131729"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143143210","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Effect of 2nd step voltage on the microstructure and corrosion resistance of plasma electrolytic oxidation coating layer on 6061 aluminium alloy","authors":"G.H. Oh , J.K. Yoon , J.Y. Huh , J.M. Doh","doi":"10.1016/j.surfcoat.2024.131717","DOIUrl":"10.1016/j.surfcoat.2024.131717","url":null,"abstract":"<div><div>In this study, a two-step hybrid Plasma Electrolytic Oxidation (PEO) process was used to produce a continuous alumina (Al₂O₃) coating layer on the 6061 aluminium alloy. The main objective of this study is to analyze the effect of varying the 2nd step voltage on the defect content, including micro-cracks and micro-pores, and the Amorphous Alumina Layer (AAL) thickness on the corrosion resistance of PEO coatings. In addition, the influence of the microstructural soundness of the coating layer on the corrosion properties is investigated. In the first step, a Pulsed Unipolar Mode (PUM) was used at an anode voltage of 500 V to produce a thin continuous alumina layer. Then, in the 2nd step, a Pulsed Bipolar Mode (PBM) was used with the anode voltage increased in 50 V increments from 400 V to 600 V to facilitate the formation of a thicker alumina layer. These results showed that the formation of a sound PEO coating layer with minimal microcrack and micropore content and a higher AAL thickness can significantly improve the corrosion resistance of 6061 aluminium alloy.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131717"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143143211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jun Hao , Longpeng Wang , Chen Zhao , Kan Zhang , Jinlei Qi , Haopeng Pang , Ping Ren , Mao Wen
{"title":"Effects of interface configurations on strengthening-toughening and tribological behaviors of TiC/Ti nano-multilayers","authors":"Jun Hao , Longpeng Wang , Chen Zhao , Kan Zhang , Jinlei Qi , Haopeng Pang , Ping Ren , Mao Wen","doi":"10.1016/j.surfcoat.2024.131726","DOIUrl":"10.1016/j.surfcoat.2024.131726","url":null,"abstract":"<div><div>To acquire excellent mechanical properties in ceramic/metal nano-multilayers, it is necessary to reasonably regulate the thickness of the metal nanolayer and interface configurations between ceramic and metal nanolayers. Herein, TiC/Ti nano-multilayers have been fabricated by magnetron sputtering technology, and face-centered cubic (fcc) Ti and hexagonal close-packed (hcp) Ti nanolayers could be obtained when Ti sublayer thickness is about 1.5 and 8 nm, respectively. The formation of fcc-TiC(111)/fcc-Ti(111) coherent interface achieves synergistic enhancement of hardness (38.8 GPa) and fracture toughness (3.26 MPa m<sup>1/2</sup>), while the appearance of fcc-TiC(111)/hcp-Ti(002) coherent interface significantly deteriorates hardness (20.8 GPa) and fracture toughness (2.11 MPa m<sup>1/2</sup>). The superior fracture toughness of the fcc-TiC(111)/fcc-Ti(111) nano-multilayer originates from an excellent crack-arresting capability owing to a large elastic modulus mismatch between fcc-TiC and fcc-Ti nanolayers and a small periodicity of elastic modulus variation. Moreover, the higher fracture strength of the fcc-TiC(111)/fcc-Ti(111) nano-multilayer results from a little stiffness loss owing to the introduction of thin Ti nanolayers as compared to the fcc-TiC(111)/hcp-Ti(002) nano-multilayer. In addition, the simultaneous improvement of hardness and fracture toughness brings about superb wear resistance for the fcc-TiC(111)/fcc-Ti(111) nano-multilayer. During the friction process, the preferential oxidation of Ti nanolayers in fcc-TiC(111)/fcc-Ti(111) nano-multilayer preserves the curved graphene nanosheets from severe tribo-oxidation, which is conducive to decreasing the coefficient of friction.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131726"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143143212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Biao Hu , Jun Cao , Kunze Wang , Li Liu , Yong Hu , Xiaocui Wang , Xiuli Zhang , Xin Kun Suo , Minhao Zhu
{"title":"PI/PAI-E44 synthesis-inspired composite coating with graphene-reinforced hydroxyapatite: enhanced wear resistance, antibacterial properties, biological activity, and corrosion resistance","authors":"Biao Hu , Jun Cao , Kunze Wang , Li Liu , Yong Hu , Xiaocui Wang , Xiuli Zhang , Xin Kun Suo , Minhao Zhu","doi":"10.1016/j.surfcoat.2025.131786","DOIUrl":"10.1016/j.surfcoat.2025.131786","url":null,"abstract":"<div><div>Graphene nanosheets (GNS)-reinforced hydroxyapatite (HA) composite coatings enhance the performance of biomedical implants. A polyamide-imide polyimide/epoxy resin composite coating with varying GNS contents was developed using liquid spraying technology on Ti-6Al-4 V substrates. The incorporation of an optimal amount of GNS significantly enhanced mechanical properties such as hardness and elastic modulus, while also improving tribological performance, corrosion resistance, and biological characteristics. Specifically, the 1 wt% GNS coating demonstrated a 227 % increase in hardness, a 167 % increase in elastic modulus, and the lowest corrosion rate of 1.15 × 10<sup>−10</sup> A/cm<sup>2</sup>, along with superior wear resistance. Furthermore, the 5 wt% GNS coating exhibited remarkable antibacterial properties with a 100 % bacterial inhibition rate and enhanced cell survival. These findings highlight the potential of GNS-HA composite coatings to address critical challenges in creating durable and biocompatible medical implants. Tailoring GNS content offers valuable insights into optimizing coating performance for biomedical applications.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131786"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143143494","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pengzhou Zhu , Haibo Ruan , Weijiu Huang , Junjun Wang , Meng Xu , Yongyao Su
{"title":"Systematic investigations of microstructure evolution and oxidation behavior of Cr-N coatings on Zircaloy-4 in high-temperature steam environment","authors":"Pengzhou Zhu , Haibo Ruan , Weijiu Huang , Junjun Wang , Meng Xu , Yongyao Su","doi":"10.1016/j.surfcoat.2025.131773","DOIUrl":"10.1016/j.surfcoat.2025.131773","url":null,"abstract":"<div><div>To overcome the limitations of Cr and CrN coatings with a stoichiometric ratio of 1:1 as protective coating for accident-tolerant-fuel (ATF) cladding in high-temperature steam environments, a novel Cr-N coating (N: 15 at.%) was successfully deposited on the zircaloy-4 (Zry-4) using magnetron sputtering technology. The microstructures, mechanical properties, and oxidation behavior in high-temperature steam environments (1000, 1100 and 1200 °C) were comprehensive investigated. The coatings consist of nanocrystalline grains of Cr and Cr<sub>2</sub>N and exhibit a non-columnar structure. The hardness of the Cr-N coatings increased threefold compared to Cr coatings. The oxidation rate of the Cr-N coating is low in high-temperature steam environments due to the formation of a dense Cr<sub>2</sub>O<sub>3</sub> layer. Notably, the Cr-N coatings exhibit limited void defects caused by decomposition of coatings and the diffusion of N<sub>2</sub>, thus possessing superior thermal stability compared to CrN coatings. Additionally, the diffusion behavior of N<sub>2</sub> from decomposition of Cr-N coating in high-temperature was also investigated. A Zr<sub>2</sub>N twinned layer was formed at the Zry-4/Cr-N interface inhibiting the Cr-Zr interdiffusion, thereby preventing the formation of the brittle ZrCr<sub>2</sub> layer and enhancing the bond strength between the coating and the substrate compared to Cr coatings. The findings suggest significant advantages of employing Cr-N coatings in Zry-4 cladding, demonstrating excellent high-temperature oxidation resistance and thermal stability, which are essential for extending the lifespan of materials in extreme environments.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131773"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143143743","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Anna Hirle , Philipp Dörflinger , Christoph Fuger , Christian Gutschka , Tomasz Wojcik , Maximilian Podsednik , Andreas Limbeck , Szilárd Kolozsvári , Peter Polcik , Carmen Jerg , Helmut Riedl , Rainer Hahn
{"title":"Mechanical properties of DCMS and HiPIMS deposited Ti1-xMoxB2±z coatings","authors":"Anna Hirle , Philipp Dörflinger , Christoph Fuger , Christian Gutschka , Tomasz Wojcik , Maximilian Podsednik , Andreas Limbeck , Szilárd Kolozsvári , Peter Polcik , Carmen Jerg , Helmut Riedl , Rainer Hahn","doi":"10.1016/j.surfcoat.2025.131750","DOIUrl":"10.1016/j.surfcoat.2025.131750","url":null,"abstract":"<div><div>A promising strategy for enhancing the mechanical properties of sputtered transition metal diboride (TMB<sub>2</sub>) thin films, including hardness and fracture toughness, is the formation of ternary diborides. Theoretical calculations indicate that incorporating Mo on the metallic sublattice of TiB₂ enhances the overall mechanical properties; however, no experimental data are available. Accordingly, two series (DCMS & HiPIMS) of Ti<sub>1-x</sub>Mo<sub>x</sub>B<sub>2±z</sub> coatings with varying Mo contents (x = 0 to 12 for DCMS and x = 0 to 9 for HiPIMS) were deposited using TiB<sub>2</sub>/MoB composite targets containing different MoB contents to investigate their structural and mechanical properties, focusing on fracture characteristics. HiPIMS growth processes have been proven to significantly enhance hardness, fracture toughness, and fracture strength compared to DCMS. Specifically, a hardness increase from 38.8 ± 1.7 GPa to 43.7 ± 1.2 GPa (nanoindentation) with a simultaneous fracture toughness increase of 0.4 MPa√m (∼17 %; using microcantilever bending tests) and an increase in fracture strength, R<sub>p0.2</sub> of approximately 2 GPa (micropillar compression) was observed for HiPIMS deposited coatings. Compared, our DCMS coatings showed a steady decrease in mechanical properties from H = 38.3 ± 1.5 GPa, K<sub>IC</sub> = 2.6 ± 0.15 MPa√m and R<sub>p0.2</sub> = 13.7 ± 1 GPa to H = 27.2 ± 0.4 GPa, K<sub>IC</sub> = 1.7 ± 0.06 MPa√m and R<sub>p0.2</sub> = 9.3 ± 0.3 GPa with increasing Mo content. Our research emphasizes the significance of energetics during film growth, particularly for new ternary diboride systems.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131750"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143143746","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Ocampo-Ramírez , A. Ballesteros-Arguello , M.A. Melo-Pérez , G.A. Rodríguez-Castro , F. Nava-Leana , A. Meneses-Amador
{"title":"Fracture toughness of borided AISI 1045 steel with a diffusion annealing process","authors":"A. Ocampo-Ramírez , A. Ballesteros-Arguello , M.A. Melo-Pérez , G.A. Rodríguez-Castro , F. Nava-Leana , A. Meneses-Amador","doi":"10.1016/j.surfcoat.2025.131754","DOIUrl":"10.1016/j.surfcoat.2025.131754","url":null,"abstract":"<div><div>A numerical-experimental study of the fracture toughness of iron borides formed on AISI 1045 steel by means of cross-sectional scratch tests has been carried out. Two experimental conditions were proposed: first, samples hardened by a powder-pack boriding process, which was developed at 1000 °C and 4 h of exposure and second, samples hardened by the above process and subjected to a diffusion annealing process (DAP), which was performed at a temperature of 1000 °C with 4 h of exposure using SiC powder. Scratch tests were performed on the cross-section of the borided material using CSM Revetest-Xpress commercial equipment with a Vickers indenter. A half-cone shape fracture was induced into the vicinity of the free surface of the sample which was used to estimate the fracture toughness of the system. In addition, a numerical model based on the finite element method of the cross-sectional scratch test was developed in order to relate the stress field to the damage observed in the borided sample. Numerical results showed that the half-cone shape damage was due to the geometry of the Vickers indenter where both the maximum principal stress and the maximum shear stress caused partial detachment of the boride layer.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131754"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143144193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yin-Yu Chang , Tsung-Hung Tsai , Chung-En Chang , He-Qian Feng , Ming-Xun Yang , Michael Stüber , Sven Ulrich
{"title":"Mechanical properties and thermal stabilities of multilayered AlCrBN/AlTiSiN hard coatings","authors":"Yin-Yu Chang , Tsung-Hung Tsai , Chung-En Chang , He-Qian Feng , Ming-Xun Yang , Michael Stüber , Sven Ulrich","doi":"10.1016/j.surfcoat.2025.131876","DOIUrl":"10.1016/j.surfcoat.2025.131876","url":null,"abstract":"<div><div>AlCrN and AlTiN coatings are widely used in cutting tools and forming dies due to their favorable mechanical properties, tribological characteristics, and oxidation resistance achieved by incorporating Al into CrN and TiN. While AlCrN coatings demonstrate good oxidation resistance, AlTiN coatings exhibit high hardness at elevated temperatures. The addition of silicon (Si) into AlTiSiN and boron (B) into AlCrBN coatings is known to improve their mechanical properties. Furthermore, to enhance these coatings even more, multilayer designs have been developed. Leveraging the additions of Si and B, AlCrBN/AlTiSiN multilayer coatings, along with AlCrN and AlTiN monolithic coatings without Si and B additives, were fabricated using a cathodic arc ion plating method. Their thermal stability at 900 °C and 1000 °C in vacuum was investigated to meet the demands of high-temperature applications. In this study, composition-gradient and periodic layering structures were employed for depositing the multilayered AlCrBN/AlTiSiN coatings. The results revealed that the vacuum-annealed AlCrBN/AlTiSiN multilayer structure inhibited the formation of hexagonal Cr<sub>2</sub>N (h-Cr<sub>2</sub>N), which could compromise mechanical properties, while also maintaining the coating hardness due to phase decomposition. In contrast, the hardness of AlCrN coatings decreased consistently at 900 °C, showing the lowest thermal stability of all coatings in this study. The AlCrBN/AlTiSiN coating maintained its hardness at 900 °C and 1000 °C for 1 h and even experienced a slight increase to 28.9 ± 0.6 at 900 °C after 4 h. It demonstrated that it possessed the ability to sustain or even improve its mechanical properties at high temperatures. In addition to maintaining thermal stability, the enhanced oxidation resistance at elevated temperatures makes multilayered AlCrBN/AlTiSiN coatings suitable for use in high-temperature environments.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"498 ","pages":"Article 131876"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143178845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Junyi Chen , Sam Zhang , Jingchuan Li , Zilin Chen , Deen Sun
{"title":"Effects of phase transformation on the corrosion resistance and conductivity of NbN coatings for metal bipolar plates","authors":"Junyi Chen , Sam Zhang , Jingchuan Li , Zilin Chen , Deen Sun","doi":"10.1016/j.surfcoat.2025.131800","DOIUrl":"10.1016/j.surfcoat.2025.131800","url":null,"abstract":"<div><div>Metal bipolar plates are the core components of proton exchange membrane fuel cells (PEMFC), which require excellent corrosion resistance and electrical conductivity. Coating technology is often employed to modify the surface to satisfy the requirement. In this paper, the phase structure, elemental composition and microscopic morphology of the NbN coating can be changed by adjusting the sputtering power. Under the low sputtering power, the NbN coating is a δ-NbN face-centered cubic structure, with an N content of 43.92 at.% and an Nb content of 56.08 at.%. The electrochemical corrosion test shows that the corrosion resistance of the coating shows an increasing trend with the increase of sputtering power. The β-Nb<sub>2</sub>N hexagonal coating generated at a higher sputtering power has a better corrosion resistance of 2.805 × 10<sup>−7</sup> A cm<sup>−2</sup>. After the 8-h potentiostatic polarization test, the corrosion current density was maintained at 10<sup>−7</sup> A cm<sup>−2</sup>, which satisfy the requirement of the bipolar plate. The results of interfacial contact resistance and energy-state density show that the covalent properties of the β-Nb<sub>2</sub>N hexagonal structure are stronger, and the conductivity of the δ-NbN face-centered cubic structure is better.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131800"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143142867","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Improved performance of solar blind ultraviolet photodetectors by spatial ALD Zn-doped Ga2O3 film and post-annealing","authors":"Chia-Hsun Hsu , Wen-Bin Wu , Xin-Xiang Yue , Wan-Yu Wu , Peng Gao , Dong-Sing Wuu , Yun-Shao Cho , Chien-Jung Huang , Shui-Yang Lien","doi":"10.1016/j.surfcoat.2025.131798","DOIUrl":"10.1016/j.surfcoat.2025.131798","url":null,"abstract":"<div><div>In this study, Zn-doped gallium oxide (Ga<sub>2</sub>O<sub>3</sub>) films are prepared using spatial atomic layer deposition (sALD) at 150 °C. The trimethylgallium and diethylzinc (DEZ) are co-injected to promote random Zn incorporation, with the DEZ flow rate varied to attain different doping levels. The experimental results indicate that the actual Zn content can be predicted by the DEZ output flow rate ratio with an acceptable deviation. The Zn content in the as-deposited sALD films ranges from 0 to 8.2 at.% with a significant portion of the Zn dopants existing as interstitials. It is found that oxygen vacancies are suppressed when Zn interstitials become predominant over Zn substitutionals. Post-annealing in an oxygen atmosphere at 600 °C can substantially mitigate the concentration of oxygen vacancies and Zn interstitials. The annealed film prepared with a DEZ flow rate of 75 sccm, which contains a moderate amount of Zn interstitials, achieves both a remarkably low oxygen vacancy ratio of 7.2 % and an undeteriorated crystalline structure. The 100 nm-thick sALD Zn-doped film prepared at the DEZ flow rate of 75 sccm is applied to UV photodetectors, demonstrating an exceptionally low dark current of 7.1 × 10<sup>−13</sup> A, a remarkable on/off current ratio of 7.4 × 10<sup>6</sup>, along with a satisfactory external quantum efficiency of 305 %, responsivity of 0.76 A/W, and a fast response time of 0.08 s. These results indicate that improved film quality can be achieved through sALD co-injection in conjunction with post-annealing, facilitating the application of sALD technology in advanced, cost-effective, and high-performance ultraviolet photodetectors.</div></div>","PeriodicalId":22009,"journal":{"name":"Surface & Coatings Technology","volume":"497 ","pages":"Article 131798"},"PeriodicalIF":5.3,"publicationDate":"2025-02-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143142874","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}