Sensors and Actuators A-physical最新文献_第5页

Theoretical analysis and design improvement of nonlinearity in capacitive accelerometers 电容式加速度计非线性特性的理论分析与设计改进

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-16 DOI: 10.1016/j.sna.2026.117480

Jiacheng Li , Rui Feng , Ming Zhou , Xinlian Shang , Xiaoyi Wang , Huikai Xie

{"title":"Theoretical analysis and design improvement of nonlinearity in capacitive accelerometers","authors":"Jiacheng Li , Rui Feng , Ming Zhou , Xinlian Shang , Xiaoyi Wang , Huikai Xie","doi":"10.1016/j.sna.2026.117480","DOIUrl":"10.1016/j.sna.2026.117480","url":null,"abstract":"<div><div>This paper systematically conducts theoretical analysis, structural improvement design, finite element simulation verification, and mathematical compensation model research focusing on the nonlinear characteristics of capacitive comb-drive accelerometers. First, the structural design and fabrication process of the accelerometer are presented. Then, the generation mechanism of nonlinear errors is theoretically analyzed from three dimensions: structural design, fabrication error, and testing. Research results show that: the mass bias displacement, unilateral deformation of the substrate, and installation errors significantly increase the sensitivity asymmetry of the accelerometer, further leading to the deterioration of nonlinearity. This paper proposes a single-anchor layout design with parallel arrangement in the sensing direction. Finite element simulation confirms that the nonlinearity of the improved accelerometer caused by mass bias displacement is reduced by 96.36 %; under the same substrate bending amount, the nonlinearity of the improved accelerometer is reduced by 34.72 %. To address the installation error issue, a corresponding mathematical compensation model is constructed. Within the operating range of comb finger gap variation of ±7 %, the nonlinearity of the compensated open-loop accelerometer is reduced by 67.11 %, which can be stably controlled below 900 ppm.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117480"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025117","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Spatially resolved real-time monitoring of plasma processing chamber using quartz crystal microbalance 利用石英晶体微天平对等离子体处理室进行空间分辨实时监测

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-22 DOI: 10.1016/j.sna.2026.117508

Ji Eun Kang , Ho Gon Kim , Sun Jae Jeong , Hye Won Han , Si Yeon Kim , Ga Hee Oh , Da Hun Ko , Dong Woo Kim , Geun Young Yeom

{"title":"Spatially resolved real-time monitoring of plasma processing chamber using quartz crystal microbalance","authors":"Ji Eun Kang , Ho Gon Kim , Sun Jae Jeong , Hye Won Han , Si Yeon Kim , Ga Hee Oh , Da Hun Ko , Dong Woo Kim , Geun Young Yeom","doi":"10.1016/j.sna.2026.117508","DOIUrl":"10.1016/j.sna.2026.117508","url":null,"abstract":"<div><div>Precise control of chamber conditions is critical for ensuring the reproducibility and stability of semiconductor plasma processes. Conventional monitoring methods, however, often fail to provide accurate, localized real-time feedback, leading to process drift. This study demonstrates a real-time, spatially resolved monitoring system using quartz crystal microbalance (QCM) sensors to track the deposited materials’ accumulation and removal during SiO<sub><em>x</em></sub> plasma enhanced atomic layer deposition (PEALD) and subsequent NF₃/Ar plasma cleaning. By installing sensors at the chamber wall, floor, and exhaust line, we revealed the highly non-uniform nature of material deposition on various locations of the deposition system and confirmed that relying on a single-point end point detection (EPD) results in incomplete cleaning in other regions. Detailed analysis correlated distinct changes in the QCM frequency slope with the morphological evolution of deposited materials—from a continuous film to islands and discrete particles—as validated by scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS). Furthermore, a direct comparison confirmed the QCM's superior capability over conventional Optical Emission Spectroscopy (OES) for providing a clear and stable localized EPD. The system’s versatility is further highlighted by its ability to operate in non-plasma zones where diagnostics like OES are limited. This work establishes spatially resolved QCM sensing as a powerful method for accurate chamber management, offering significant potential to enhance process reproducibility and efficiency in advanced semiconductor manufacturing.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117508"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146025223","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A tree-shaped sensing structure for the measurement of vertical soil movements in construction sites 一种用于测量建筑工地土壤垂直运动的树形传感结构

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-19 DOI: 10.1016/j.sna.2026.117503

Gabriele Di Renzone , Klaus Stefan Drese , Almut Lottmann-Löer , Marco Mugnaini , Alessandro Pozzebon

引用次数: 0

Plexcitonics: Plasmon–exciton coupling of ZnO/Au heterostructure film for improving discrete particle detection 多激子学：用于改善离散粒子检测的ZnO/Au异质结构薄膜的等离激子-激子耦合

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-23 DOI: 10.1016/j.sna.2026.117523

Qais M. Al-Bataineh , Ahmad A. Ahmad , A.B. Migdadi , Lina A. Alakhras , Oana Brincoveanu , Alexandra Mocanu , Gabriela Toader , Ahmad D. Telfah , Roland Hergenröder

{"title":"Plexcitonics: Plasmon–exciton coupling of ZnO/Au heterostructure film for improving discrete particle detection","authors":"Qais M. Al-Bataineh , Ahmad A. Ahmad , A.B. Migdadi , Lina A. Alakhras , Oana Brincoveanu , Alexandra Mocanu , Gabriela Toader , Ahmad D. Telfah , Roland Hergenröder","doi":"10.1016/j.sna.2026.117523","DOIUrl":"10.1016/j.sna.2026.117523","url":null,"abstract":"<div><div>Plexcitonics, an interdisciplinary field focused on the study of plasmon-exciton coupling, is rapidly evolving and holds significant promise for advancing optical and optoelectronic devices. Experimental observations and mechanistic investigations of the plexcitonic phenomenon of ZnO/Au heterostructure film based on propagating surface plasmon polaritons in the gold layer and excitons confined within a continuous ZnO layer are presented using detailed characterizations. Diverging from conventional localized plasmon systems, this work establishes that the high electron affinity and static permittivity of the ZnO layer induce deep quantum spillover of metallic electrons, drastically increasing plasmon energy dissipation. Using the Thomas-Fermi approximation to model the interfacial electronics, we theoretically confirm that this spillover leads to a stronger spatial confinement and an effective compression of the SPP evanescent field. As a main application for plexcitons, a wide-field surface plasmon resonance microscope based on ZnO/Au heterostructure film is introduced to enhance the sensitivity of discrete particle detection. The ZnO/Au heterostructure film achieved a remarkable enhancement in the detection signal, resulting in a maximum intensity of 110 a.u. (Au control) to 190 a.u. for 100 nm silica nanoparticles. Our results provide insight into the enhancement of sensitivity and capabilities of discrete particle detection across a range of biomedical applications.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117523"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079900","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A novel bidirectional high overload piezoresistive differential pressure sensor based on topology optimization 一种基于拓扑优化的新型双向高过载压阻差压传感器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117540

Meng Li , Xiaochen Yang , Xiangyue Meng , Dong Li , Huifeng Qiu , Liqun Du

{"title":"A novel bidirectional high overload piezoresistive differential pressure sensor based on topology optimization","authors":"Meng Li , Xiaochen Yang , Xiangyue Meng , Dong Li , Huifeng Qiu , Liqun Du","doi":"10.1016/j.sna.2026.117540","DOIUrl":"10.1016/j.sna.2026.117540","url":null,"abstract":"<div><div>To improve the overload capacity of piezoresistive differential pressure sensors (PDPS), this paper presents a bidirectional high overload PDPS based on topology optimization. The topology optimization design goal of the PDPS is maximum stiffness, and the constraint condition is maximum stress. The stress distribution, full scale output, and maximum stress value of topology-optimized and C-type membranes are analyzed using the finite-element method (FEM). FEM analyses demonstrated that, compared to conventional C-type membrane, a significant increase in overload capacity can be achieved by the proposed topology-optimized membrane. The silicon-based PDPS with bidirectional high overload is fabricated by microelectromechanical systems (MEMS) silicon technology. The measurement results reveal that the fabricated PDPS with the topology-optimized membrane has a burst pressure of 8.43 times the full scale and a sensitivity of 0.14 (mV/V/kPa) for a pressure range of 0–100 kPa. Compared to the conventional C-type membrane PDPS, the topology-optimized membrane increased the overload capacity by 33.6 % (the simulation result is 32.2 %) under the same full scale (100 kPa) and sensitivity (0.14 ± 0.01 mV/V/kPa). These results suggest that the new topology-optimized membrane is suitable for MEMS pressure sensors used in bidirectional overload measurement environments.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117540"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170762","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Smart bioelectronics glucometer with CNT/MXene-FET test strip decorated with silver NWs featuring alarm functionality 智能生物电子血糖仪与CNT/MXene-FET测试条装饰银色NWs报警功能

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-11 DOI: 10.1016/j.sna.2026.117486

Milad Farahmandpour , Daryoosh Dideban , Masoomeh Monfared Dehbali , Zoheir Kordrostami

{"title":"Smart bioelectronics glucometer with CNT/MXene-FET test strip decorated with silver NWs featuring alarm functionality","authors":"Milad Farahmandpour , Daryoosh Dideban , Masoomeh Monfared Dehbali , Zoheir Kordrostami","doi":"10.1016/j.sna.2026.117486","DOIUrl":"10.1016/j.sna.2026.117486","url":null,"abstract":"<div><div>This study presents the development of an advanced smart bioelectronic glucometer featuring CNT/MXene-FET test strips with Ag NWs decoration and integrated alarm functionality. Three types of FET-based test strips were fabricated, each incorporating different channel materials: Multi-Walled Carbon Nanotubes (MWCNT), Ag NWs/MWCNT, and MXene/Ag NWs/MWCNT. The glucometer, leveraging IoT technology, transmits real-time glucose data to mobile devices, provides alarm notifications, and displays glucose levels and their intensities via an OLED screen. The use of MXene/Ag NWs/MWCNT as a tri-material channel yields a unique combination of high sensitivity, wide linear range, and rapid gating dynamics. Characterization reveals unique interfacial charge transfer at the MXene/Ag NWs/MWCNT junctions that underpins the observed high sensitivity and selectivity. The sensor exhibited two linear ranges (1–100 µM and 100 µM–20 mM) with high sensitivities of 13200 µA.mM⁻¹ and 200 µA.mM⁻¹ , LOD of 0.1 µM along with excellent reproducibility, repeatability, and stability. Validation with real blood samples from 20 volunteers confirmed its efficacy, demonstrating precise glucose monitoring suitable for clinical applications. MARD (Mean Absolute Relative Difference) results ranged from 0 % to 2.532 %, with the lowest MARD reaching 0 % in one test-strip lot. Distribution analysis showed that 60 % of strips exhibited a MARD below 1 %. This integrated platform offers a reliable, portable, and real-time solution for diabetes management.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117486"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170768","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and fabrication of high-density flexible two-dimensional ultrasonic arrays based on staggered-layer stacking process technology 基于交错层堆积工艺技术的高密度柔性二维超声阵列的设计与制造

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-02-03 DOI: 10.1016/j.sna.2026.117551

Yirui Li , Jia Cao , Yiran Wu , Bo Wang , Zhe Zhang , Jiaxing Peng , Yaoyang Zhang , Jianzhong Chen , Weicen Chen , Xiang Li , Tao Zhou , Dawei Wu

{"title":"Design and fabrication of high-density flexible two-dimensional ultrasonic arrays based on staggered-layer stacking process technology","authors":"Yirui Li , Jia Cao , Yiran Wu , Bo Wang , Zhe Zhang , Jiaxing Peng , Yaoyang Zhang , Jianzhong Chen , Weicen Chen , Xiang Li , Tao Zhou , Dawei Wu","doi":"10.1016/j.sna.2026.117551","DOIUrl":"10.1016/j.sna.2026.117551","url":null,"abstract":"<div><div>To address the challenges of complex manufacturing, high cost, and low reliability in existing two-dimensional flexible phased array ultrasound devices, this paper proposes an innovative process based on staggered-layer stacking process technology. This process enables high-density flexible interconnections for full electrodes while effectively reducing manufacturing costs and maintaining excellent flexibility and reliability. By optimizing the electrode layout and element interconnection scheme, the process ensures superior electrical performance and mechanical robustness even under high-density element arrangements. Based on this innovative process, a 10 × 10 element two-dimensional flexible phased array with a center frequency of 1 MHz was successfully developed. Experimental results demonstrate a maximum crosstalk of - 43.2 dB between adjacent array elements, which is significantly lower than that of commercial transducers. While maintaining high flexibility, the device exhibits outstanding ultrasonic modulation capability. Owing to these advantages, the device shows great potential for diverse biomedical and therapeutic applications, especially in flexible wearable ultrasound systems, ultrasound-mediated stimulation, and focused therapeutic treatments.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117551"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Piezoelectric-driven soft robotics: Multifunctional materials, actuation mechanisms, challenges, and future prospects 压电驱动软体机器人：多功能材料、驱动机制、挑战与未来展望

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-02-02 DOI: 10.1016/j.sna.2026.117552

Ritik Raj , Jia-Yang Juang

{"title":"Piezoelectric-driven soft robotics: Multifunctional materials, actuation mechanisms, challenges, and future prospects","authors":"Ritik Raj , Jia-Yang Juang","doi":"10.1016/j.sna.2026.117552","DOIUrl":"10.1016/j.sna.2026.117552","url":null,"abstract":"<div><div>Piezoelectric actuation offers a distinctive pathway for soft robotic systems by enabling precise, fast, and energy-efficient motion within compliant structures. Through direct and converse electromechanical coupling, piezoelectric materials allow actuation, sensing, and energy transduction to be inherently integrated, differentiating them from conventional rigid and fluidic actuation approaches. This review provides an overview of recent advances in piezoelectric materials, actuator architectures, and integrated soft robotic systems, with emphasis on flexible ceramics, polymeric and composite hybrids, and lead-free and biodegradable alternatives. The review examines different classes of piezoelectric materials and their functional roles in soft robotic actuation, sensing, and system integration. It surveys applications spanning locomotion and soft grippers, precision manufacturing and optical systems, as well as biomedical and wearable soft robotic platforms. Beyond material development, the review discusses system-level integration aspects, including hybrid actuation, embedded sensing, low-voltage operation, and data-driven approaches, which support the development of more efficient and integrated soft robotic systems. Persistent challenges such as hysteresis, creep, limited strain output, and power consumption are discussed alongside representative mitigation strategies including nonlinear compensation, learning-based control, and resonant operation. The review also outlines future research directions that emphasize sustainable material choices and improved control frameworks. By synthesizing developments in piezoelectric materials and actuation strategies, this review clarifies their role in advancing biomedical and human-interactive soft robotic technologies.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117552"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Flexible actuators with photothermal-responsive and humidity-responsive properties via electrohydrodynamic direct writing 通过电流体动力直接写入具有光热响应和湿度响应特性的柔性执行器

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-30 DOI: 10.1016/j.sna.2026.117538

Mengqin Zhang, Libing Zhang, Ting Wu, Haijun Song

{"title":"Flexible actuators with photothermal-responsive and humidity-responsive properties via electrohydrodynamic direct writing","authors":"Mengqin Zhang, Libing Zhang, Ting Wu, Haijun Song","doi":"10.1016/j.sna.2026.117538","DOIUrl":"10.1016/j.sna.2026.117538","url":null,"abstract":"<div><div>Single-function flexible actuators have limitations in practical dynamic environmental interactions, restricting their application potential in smart materials and soft robotics. To address this issue, a bilayer actuator composed of MXene (Ti₃C₂Tₓ)/carboxylated cellulose nanofibers (cCNFs) and polyethylene (PE) was successfully fabricated. The fabrication process involved integrating MXene and cCNFs as functional layers via near-field electrohydrodynamic (EHD) direct-write printing, followed by lamination with commercial PE tape. This actuator exhibits dual-responsive properties to both photothermal stimulation and humidity variation. Characterization results show that the introduction of cCNF increased the interlayer spacing of MXene, effectively inhibiting MXene nanosheet stacking between nanosheets, while significantly enhancing the mechanical properties of the composite film. Performance tests demonstrate excellent dual-responsive characteristics: in terms of photothermal response, MXene converts near-infrared (NIR) light energy into thermal energy. The bending deformation is induced by utilizing the difference in thermal expansion coefficients (CTE) between the MXene/cCNF layer and the PE layer, combined with the moisture desorption effect of the MXene/cCNF layer. Among the samples, MXene/cCNF-PE with MXene of 0.3 g (MC3-PE) exhibits optimal performance, with a maximum bending curvature of 3.46 cm⁻¹ under 400 mW·cm⁻² NIR irradiation. In a relative humidity (RH) range of 50 % - 80 %, the MXene/cCNF layer generated internal stress via water absorption and swelling, while the hydrophobic PE layer maintains structural stability, thereby driving the actuator to bend. The maximum bending curvature of MC3-PE reaches 3.14 cm⁻¹ . This study provides a feasible strategy for the preparation of multi-responsive flexible actuators, which hold broad application prospects in intelligent regulation, environmental interaction, and micromechanical systems.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117538"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146170767","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Design and application of multimodal visual-tactile sensor for object information perception 面向物体信息感知的多模态视触觉传感器的设计与应用

IF 4.9 3区工程技术

Sensors and Actuators A-physical Pub Date : 2026-04-01 Epub Date: 2026-01-29 DOI: 10.1016/j.sna.2026.117529

Shixin Wang, Ling Weng, Lanyang Hao, Shichao Zuo, Zipeng Yang, Mingyuan Wang, Xiaotao Du

{"title":"Design and application of multimodal visual-tactile sensor for object information perception","authors":"Shixin Wang, Ling Weng, Lanyang Hao, Shichao Zuo, Zipeng Yang, Mingyuan Wang, Xiaotao Du","doi":"10.1016/j.sna.2026.117529","DOIUrl":"10.1016/j.sna.2026.117529","url":null,"abstract":"<div><div>Aiming at the problem of single perception modality in existing tactile sensing systems, this paper designs and implements a multimodal visual-tactile sensor tailored for robotic grasping. This sensor adopts a modular hierarchical design and integrates three functional modules: the texture perception layer, the temperature and force perception layer, and the visual perception layer. The texture perception layer achieves high-precision 3D shape reconstruction through translucent elastomer and a dual-layer surface reflection coating, with a mean absolute error (MAE) of 0.0512 mm. The temperature and force perception layer utilizes thermochromic materials and a 5 × 7 marking point array to achieve temperature and multi-dimensional force perception respectively, among which the response time of the thermochromic material is 0.1 s and the recovery time is 0.2 s. The visual perception layer adopts transparent PDMS material to ensure visual information acquisition in a non-contact state. By integrating sensors into the UR5e robotic arm system and combining the YOLOv11 object detection algorithm with ArUco visual positioning technology, a complete vision-guided robotic grasping system was constructed. Through the grasping experiments with three distinct fruit types, namely mandarin, lychee, and nectarine, the effectiveness of the multimodal collaborative perception was validated across object recognition, pose detection, texture reconstruction, and temperature and force perception. The experimental results demonstrate that this sensor enables comprehensive information acquisition ranging from macro-level scene understanding to micro-level contact details. This improves the environment adaptability and operational precision of robots while optimizing robotic tactile perception technology.</div></div>","PeriodicalId":21689,"journal":{"name":"Sensors and Actuators A-physical","volume":"400 ","pages":"Article 117529"},"PeriodicalIF":4.9,"publicationDate":"2026-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"146079873","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0