International Symposium on Laser Metrology最新文献_第6页

A polarization sensitive interferometer for stress analysis 用于应力分析的偏振敏感干涉仪

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814545

M. Sarkar, S. Sarkar, A. Basuray

引用次数: 0

The measurement of polymerization shrinkage of composite resins with ESPI ESPI法测定复合树脂的聚合收缩率

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814592

Zhang Zhang, Guo-biao Yang

{"title":"The measurement of polymerization shrinkage of composite resins with ESPI","authors":"Zhang Zhang, Guo-biao Yang","doi":"10.1117/12.814592","DOIUrl":"https://doi.org/10.1117/12.814592","url":null,"abstract":"In the current study, we used the method of electronic speckle pattern interferometry (ESPI) to measure polymerization shrinkage of composite resins. Standardized cavities were prepared and placed into the ESPI apparatus before the cavities were filled with composites (n=2) .The ESPI apparatus was constructed to measure the out-of-plane displacement of the resins surface during the polymerization. Experiments demonstrated that the ESPI technique was a viable method to measure the deformation of composite resins. It was responsive and sensitive to dimensional changes. We found that cavity shape, size and C- factor influenced the date of resins shrinkage. And the tooth deformation in response to polymerization of resins was measured by the ESPI too. We concluded that ESPI was a feasible method for assessing resins deformation induced by its polymerization shrinkage when it was bonded in tooth cavities. And the results were greatly influenced by the dimensions of cavities , or interface adhesive and so on. It could also measure the tooth deformation induced by shrinkage of bonded composite resins. We found that resins polymerization shrinkage date may overestimate shrinkage-induced tooth deformation.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128812195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Random-phase-shift Fizeau interferometer 随机相移菲索干涉仪

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814528

N. R. Doloca, R. Tutsch

{"title":"Random-phase-shift Fizeau interferometer","authors":"N. R. Doloca, R. Tutsch","doi":"10.1117/12.814528","DOIUrl":"https://doi.org/10.1117/12.814528","url":null,"abstract":"In the context of this article we demonstrate a novel Fizeau interferometric system that copes with the presence of vibrations. Besides the conventional high spatial, but low temporal resolution detector system (the CCD camera) used in phase shifting interferometry, an additional high temporal, but low spatial resolution detector system was integrated, in order to measure the random phase shifts that are induced under the influence of the vibrations. The additional sensor consists of three photodiodes. The acquired analog signals enable the measurement of the occurring phase shifts at three non-collinear locations on the test surface. Under the assumption of the rigid body shifts and tilts of the test object, the resulting phase shifts at the three individual locations enable the determination of the random phase shifts over the entire image aperture. While the random oscillations of the test object are continuously measured, the CCD camera acquires several interferograms. In consequence, a phase shifting algorithm for random phase shifts was applied. In order to prove the validity of the new interferometer, a test surface of known topography was measured. The results of the measurements in presence of vibrations show very good concordance with the surface data given by the supplier. The analysis of the root mean square (RMS) over ten different measurements shows a measurement repeatability of about 0.004 waves (approximately 2.5 nm for 632.8 nm laser wavelength).","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116695216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry 线边缘粗糙度对角分辨和光谱散射测量的影响

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814532

T. Schuster, S. Rafler, K. Frenner, W. Osten

{"title":"Influence of line edge roughness (LER) on angular resolved and on spectroscopic scatterometry","authors":"T. Schuster, S. Rafler, K. Frenner, W. Osten","doi":"10.1117/12.814532","DOIUrl":"https://doi.org/10.1117/12.814532","url":null,"abstract":"Scatterometry or optical CD metrology (OCD) has become one of the most common techniques in quantitative wafer metrology within the recent years. Different tool configurations are either available in commercial inspection tools or subject of recent and present research activities. Among these are normal incidence reflectometry, 2-θ scatterometry, spectroscopic ellipsometry and angle resolved Fourier scatterometry. The two latter techniques appear to be promising for future use in semiconductor fabs. Spectroscopic ellipsometry is well established, and Fourier scatterometry has become of increasing interest within the recent time. Line edge roughness, i.e. an edge position variation of printed lines in lithography, has been of less importance up to now, as its amplitude could largely be neglected with respect to the feature dimensions. This will, however, not be the case for future nodes, as on the one hand CDs are getting smaller and smaller, and on the other hand, even the absolute amplitude is expected to increase due to the higher complexity of lithography and etch processes. In this paper a comparison of scatterometric reconstructions in both spectroscopic and angle resolved techniques considering LER afflicted samples is presented. The validity and benefit of a simple effective medium model is investigated.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117036162","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 12

Rigorous accuracy analysis of the fiber point diffraction interferometer 对光纤点衍射干涉仪进行了严格的精度分析

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814609

Jun Han, Liang Nie, Xun Yu, Xu Jiang, F. Wang

{"title":"Rigorous accuracy analysis of the fiber point diffraction interferometer","authors":"Jun Han, Liang Nie, Xun Yu, Xu Jiang, F. Wang","doi":"10.1117/12.814609","DOIUrl":"https://doi.org/10.1117/12.814609","url":null,"abstract":"The fiber phase shifting point-diffraction interferometer (FPS/PDI) has recently been designed to measure spherical surface with high precision. The wavefront shape emerging from the fiber, which acts as the referenced wave in FPS/PDI, must be controlled precisely in design. The rigorous theory model of fiber point diffraction is studied for instrument realization. To execute such high accurate (10-4λ) simulation, vector diffraction method must be adopted because conventional scalar diffraction theory is unsuitable when the fiber core size is comparable to wavelength. Based on the model, the influence of fiber core diameter, end-face figure and so on is studied. Some important conclusions are inferred. Firstly, the residual aberration is reduced with decreasing of fiber core size, so that the available numerical aperture decreases. Secondly, when the end face of the optical fiber is ellipse, the effect of the ellipticity should be considered. Thirdly, the oblique fiber, like ordinary fibers cut with zero face angle, generates a high quality spherical wave, but the propagation direction changes with the oblique angle. Finally, the residual aberration of diffraction wavefront becomes larger when the surface error of the end-face figure increases. The result shows that the single mode fiber used in experiment is available for instrument design and its influence over systematic error is negligible within certain numerical aperture.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131723298","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 6

Experimental study of unconveniant static and dynamic deformations of piezoelectric actuators 压电致动器静、动态变形的实验研究

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814513

D. Borza

引用次数: 0

Investigation of laser produced Fe plasma plume dynamics using time resolved imaging and snow plow model 利用时间分辨成像和雪犁模型研究激光产生的铁等离子体羽流动力学

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814577

S. Mahmood, L. Jiaji, S. V. Springham, T. Tan, R. Rawat, P. Lee

引用次数: 1

Error analysis and compensation of binocular-stereo-vision measurement system 双目-立体视觉测量系统误差分析与补偿

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814600

Zhang Tao, Junjie Guo

引用次数: 2

A radial in-plane DSPI interferometer using diffractive optics for residual stresses measurement 径向平面内DSPI干涉仪使用衍射光学残余应力测量

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814579

A. Albertazzi G, M. Viotti, W. Kapp

引用次数: 4

3D investigation of photonics elements by means of interferometric and photoelastic tomography 干涉法和光弹性层析成像技术对光子元件的三维研究

International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814563

N. Kumar, M. Kujawińska, P. Kniażewski

引用次数: 0