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International Symposium on Laser Metrology最新文献

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Application of laser tracker used in the measuring and the adjusting of the workbench for SAR antenna 应用激光跟踪仪测量和调整合成孔径雷达天线的工作台
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814596
B. Yan, Jun Wang, N. Lu, W. Deng, M. Dong, Xiaoping Lou
{"title":"Application of laser tracker used in the measuring and the adjusting of the workbench for SAR antenna","authors":"B. Yan, Jun Wang, N. Lu, W. Deng, M. Dong, Xiaoping Lou","doi":"10.1117/12.814596","DOIUrl":"https://doi.org/10.1117/12.814596","url":null,"abstract":"In order to accurately position the nodes of a SAR(synthetic aperture radar), a special assemble workbench is designed and a laser tracker named LTS-1100 from the API is used to measure it. The two stations layout of laser tracker along the lengthways center line of the workbench are adopted. The six common points used when the laser tracker moving from one station to the other are selected based on the stability experiment under the working environment. The laser tracker measures the positions of all the points real time and directs their adjustments. The distance error of the points from the ideal on the workbench is less than ±0.105mm. The close range photogrammetric method is then used to measure the nodes position of the SAR antenna assembled on the workbench. The result indicates the coincidence with that obtained by the laser tracker.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130741869","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
An endoscopic optical system for inner cylindrical measurement using fringe projection 一种内窥镜光学系统，用条纹投影测量内圆柱体
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814540
A. Albertazzi G, A. Hofmann, A. Fantin, J. M. Santos
{"title":"An endoscopic optical system for inner cylindrical measurement using fringe projection","authors":"A. Albertazzi G, A. Hofmann, A. Fantin, J. M. Santos","doi":"10.1117/12.814540","DOIUrl":"https://doi.org/10.1117/12.814540","url":null,"abstract":"This paper presents an endoscopic optical system to measure 3D shapes of inner cylindrical surfaces that combines photogrammetry and fringe projection. The device has two identical cameras aligned with the optical axis and facing each other, two conical lenses and one 360° helical fringe projector. The helical fringe pattern is projected in the inner surface to be measured, phase shifted and acquired by both cameras. The phase patterns are used to identify corresponding points and to reconstruct the surface in a regular cylindrical mesh using an alternative approach. A prototype was built, calibrated and tested. The paper presents the results and an application to inspect internal welding seams in 150 mm (6\") diameter pipelines.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"7155 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128878917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Ultra-thin-film characterization with vacuum ultraviolet spectroscopic reflectometry (VUV-SR) 真空紫外光谱反射法(VUV-SR)表征超薄膜
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814588
I. Burki, C. Rivas
{"title":"Ultra-thin-film characterization with vacuum ultraviolet spectroscopic reflectometry (VUV-SR)","authors":"I. Burki, C. Rivas","doi":"10.1117/12.814588","DOIUrl":"https://doi.org/10.1117/12.814588","url":null,"abstract":"Vacuum ultraviolet spectroscopic reflectometry (VUV SR) is a non-destructive, thin film measurement technique extending traditional reflectance spectroscopy to complex, multi band-gap, films stacks. The VUV SR system is a high throughput, production worthy metrology tool, able to resolve ultra-thin, multi-layer films in a single, broad band (800nm down to 120nm) spectral measurement. The dispersion in the films at the smaller VUV wavelengths allows high resolution of disparate thickness, optical properties and composition within thin film systems, not possible with existing UV optical methods. Optical systems such as spectroscopic ellipsometers (SE) are unable to resolve wide band gap films such as the SiO2-like interface layer between a Hf-based high-k layer and a Si substrate due to intrinsic hardware limitations of the low wavelength range (typically below 150nm). Absorption in the films begins to dominate at incident wavelengths below 190nm, resulting in enhanced reflectance resolution. The resolution of multiple band-gap films being used in sub-45nm semiconductor device manufacturing technology, includes individual films with absorption peaks in the broadband, and less than 190nm (190-150nm, 150-130nm and 130-120nm) wavelength ranges. Applying fitting models and optical properties to the reflectance data, the thicknesses of individual films and their composition can be determined.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123914307","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Study on key algorithm for scanning white-light interferometry 扫描白光干涉测量关键算法研究
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814597
A. Tian, Chunhui Wang, Zhuangde Jiang, Hongjun Wang, Bingcai Liu
{"title":"Study on key algorithm for scanning white-light interferometry","authors":"A. Tian, Chunhui Wang, Zhuangde Jiang, Hongjun Wang, Bingcai Liu","doi":"10.1117/12.814597","DOIUrl":"https://doi.org/10.1117/12.814597","url":null,"abstract":"Determining the location of the zero order fringes is one of the key aspects in scanning white-light interferometry. The measurement principle of the scanning white-light interferometry is introduced at first; then the location of the zero order fringes as calculated by four different algorithms; namely Weight-center, Phase-shift, Frequency Domain Analysis (FDA), and Coherent Correlation are compared. Finally, numerical simulations on random generated surfaces are done to reach conclusions by comparing and analyzing the results. The research is important in the understanding and development of white-light interferometry.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"36 ","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120932561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
Determination of third-order optical absorptive nonlinearity of ZnO nanoparticles by Z-scan technique 用z扫描技术测定ZnO纳米粒子的三阶光学吸收非线性
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814575
R. Sreeja, R. Reshmi, G. Manu, M. Jayaraj
{"title":"Determination of third-order optical absorptive nonlinearity of ZnO nanoparticles by Z-scan technique","authors":"R. Sreeja, R. Reshmi, G. Manu, M. Jayaraj","doi":"10.1117/12.814575","DOIUrl":"https://doi.org/10.1117/12.814575","url":null,"abstract":"A sensitive single-beam technique for measuring the nonlinear absorption coefficient of ZnO nanoparticles is reported here. The transmittance T(z) of the sample is measured by open aperture Z-scan technique as the sample is moved along the propagation path(z) of a focused Gaussian laser beam. The ZnO nanoparticles synthesized by wet chemical method, by mixing zinc acetate dehydrate and NaOH in ethanol is a clear transparent colloidal solution. The average size of ZnO nanoparticles is 6nm as confirmed by TEM analysis. Two-photon absorption of colloidal solutions of ZnO nanoparticles in ethanol is investigated by the Z-scan method using the nanosecond pulses from the second harmonics of Nd:YAG laser (532nm). The value of β for ZnO dispersed in ethanol extracted from the Z-scan data are 2.1cm/GW. ZnO nanoparticles of various sizes were embedded in PVA matrix on glass substrate and size dependence on β value was analyzed. The high value of two photon absorption coefficient (β) demonstrate that ZnO nanoparticle is a potential material for optical limiting applications.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"2640 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115863692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
High-resolution interferometry with Nd:YAG laser for local probe microscopy Nd:YAG激光局部探针显微的高分辨率干涉测量
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814520
J. Lazar, O. Cíp, M. Čížek, M. Sery
{"title":"High-resolution interferometry with Nd:YAG laser for local probe microscopy","authors":"J. Lazar, O. Cíp, M. Čížek, M. Sery","doi":"10.1117/12.814520","DOIUrl":"https://doi.org/10.1117/12.814520","url":null,"abstract":"We present a system of positioning a sample for various types of local probe microscopes with interferometric measurement of displacement. The positioning extends significantly the field of view of the local probe microscopy where not only the probe can be displaced over a small range by piezoelectric transducers but the sample can be positioned over a larger scale. The stage allows positioning with nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132066325","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Infrared of thin film graphene in a magnetic field and the Hall effect 红外薄膜石墨烯在磁场中的作用和霍尔效应
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814589
K. Shrivastava
{"title":"Infrared of thin film graphene in a magnetic field and the Hall effect","authors":"K. Shrivastava","doi":"10.1117/12.814589","DOIUrl":"https://doi.org/10.1117/12.814589","url":null,"abstract":"The infrared absorption of a mono-atomic thin film of carbon, called graphene, in a magnetic field is studied. Its interpretation in terms of the square root of the product of the cyclotron frequency and the Fermi energy is examined. The interpretation in terms of the Dirac points which are at the centre of the positive and negative energies, is examined and found not to fit well. The spin properties are used to obtain the energy levels correctly. A set of fractional values are tabulated which give the correct Hall effect plateaus. The energy levels arising from the Landau levels are usually of the type of a harmonic oscillator. In the present problem, the harmonic oscillator type levels are just like the equally spaced spin levels in which the number of levels is not limited by 2S+1. The oscillator type series and the proper spin properties are sufficient to get the correct fractions. The flux quantization is needed to get the plateaus in the Hall effect. We are thus able to obtain the correct fractions without the use of relativistic effects. The theory presented is thus non-relativistic. The normal infrared absorption arises from the equally spaced energy levels so that there is only one line. The additional lines occur due to spin properties.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"7155 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131326631","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A cube splitter interferometer for phase shifting interferometry and birefringence analysis 用于移相干涉和双折射分析的立方体分路干涉仪
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814547
K. Bhattacharya, N. Ghosh
{"title":"A cube splitter interferometer for phase shifting interferometry and birefringence analysis","authors":"K. Bhattacharya, N. Ghosh","doi":"10.1117/12.814547","DOIUrl":"https://doi.org/10.1117/12.814547","url":null,"abstract":"A cube beam splitter (CBS), which is more often used in two beam interferometers to generate orthogonally directed light beams, can be used to construct a two beam interferometer by aligning its beam-splitting interface parallel to the direction of propagation of light. The monolithic design of the CBS interferometer renders sufficient immunity to ambient vibrations and is worth considering as a convenient arrangement for interferometric testing. The proposed set-up can be used to construct a phase shifting interferometer as well by suitably incorporationg a quarter-wave plate and two polarizers for polarization phase shifting. It is also shown that the CBS interferometer, in a slightly different testing configuration, is birefringence sensitive in the sense that the displacement of the fringes is solely dependent on the birefringence of the sample and not on its surface quality.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131616585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fast auto-focusing based on partial image characteristics 基于局部图像特征的快速自动对焦
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814523
Jiwen Cui, Jiubin Tan
{"title":"Fast auto-focusing based on partial image characteristics","authors":"Jiwen Cui, Jiubin Tan","doi":"10.1117/12.814523","DOIUrl":"https://doi.org/10.1117/12.814523","url":null,"abstract":"Focusing is started with partial image characteristics and its region attained through Sampling Restraint Hough Transform. Both rough and fine focusing procedures are used to avoid partial interference caused by noise; the values of pixels in the 8-neighbouring area of each point are used in the improved gradient gray square function used as sharpness function; searching step is changed at real time in both rough and fine searching processes to enhance the focusing sensitivity; Field Programmable Gate Array is used to expedite the calculation of sharpness function. Experimental results indicate this way of focusing features fine singe peak, fast response, and good robustness; the caulcualtion of one frame image takes less than 20 ms, and auto-focusing is possible in a a range of 200μm with a uncertainty of less than 1μm.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124053187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Application of plate vibration and DSPI in evaluation of elastic modulus 板振动和DSPI在弹性模量评价中的应用
International Symposium on Laser Metrology Pub Date : 2008-09-29 DOI: 10.1117/12.814530
R. Kumar, C. Shakher
{"title":"Application of plate vibration and DSPI in evaluation of elastic modulus","authors":"R. Kumar, C. Shakher","doi":"10.1117/12.814530","DOIUrl":"https://doi.org/10.1117/12.814530","url":null,"abstract":"Due to change in the plate constants/plate stiffness which is a function of elastic modulus, change in natural frequencies takes place. At each natural frequency, the plate has a unique mode shape of vibration which can be easily differentiated from mode shapes at other natural frequencies. In this paper, a technique for the evaluation of the elastic modulus is proposed which is based on the vibration analysis of the plate using digital speckle pattern interferometry (DSPI) and Rayleight's method. Large numbers of experiments were conducted on square aluminium plate for the boundary condition; one edge is fixed and other edges free. The experimental result reveals that a single observation of frequency at first torsional mode is sufficient to evaluate the elastic modulus for all practical purposes. The evaluated experimental error was found to be less than 1%. Ease in sample preparation, simplicity in evaluation, non destructive nature of the DSPI and speed of DSPI has good prospect to evaluate elastic modulus of a material.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115076985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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