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2005 International Conference on MEMS,NANO and Smart Systems最新文献

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Techniques for biocells sensing, detection and characterization 生物细胞传感、检测和表征技术
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.117
Y. Ghallab, Wael Badawy
{"title":"Techniques for biocells sensing, detection and characterization","authors":"Y. Ghallab, Wael Badawy","doi":"10.1109/ICMENS.2005.117","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.117","url":null,"abstract":"This paper reviewed and discussed the different techniques used for biocells sensing, detection and characterization. Also, a new technique, which has been successfully used for biocells sensing and analyzing, will be presented and discussed.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132848427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Self assembly-promises and challenges 自组装——承诺与挑战
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.107
J. Pelesko
{"title":"Self assembly-promises and challenges","authors":"J. Pelesko","doi":"10.1109/ICMENS.2005.107","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.107","url":null,"abstract":"This paper surveys the field of self-assembly particularly in designing MEMS/NEMS system where many individual devices work together without central control to achieve a desired end. It illustrates both the promises and challenges ahead.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"25 17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115508717","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique 用微冲击波蚀刻技术制造内热沉材料的多重pcr室
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.49
Hyoung-Jin Park, D. Eun, D. Kong, Seong-Jin Kong, S. Kong, Jong-Hyun Lee
{"title":"Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique","authors":"Hyoung-Jin Park, D. Eun, D. Kong, Seong-Jin Kong, S. Kong, Jong-Hyun Lee","doi":"10.1109/ICMENS.2005.49","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.49","url":null,"abstract":"In this paper, we propose a new design for a PCR (polymerase chain reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (thermal imaging system). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114560982","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Switching time, impact velocity and release response, of voltage and charge driven electrostatic switches 电压和电荷驱动静电开关的切换时间、冲击速度和释放响应
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.116
D. Elata, V. Leus
{"title":"Switching time, impact velocity and release response, of voltage and charge driven electrostatic switches","authors":"D. Elata, V. Leus","doi":"10.1109/ICMENS.2005.116","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.116","url":null,"abstract":"In this work we analyze the undamped response of charge-driven and voltage-driven electrostatic switches. We show that charge actuation can drastically reduce the impact velocity between the movable and fixed electrodes and reduce unwanted vibrations during switch release. In voltage-driven switches, a considerable reduction of the impact velocity and switch-release vibrations can only be achieved by damping forces, which inevitably increase the switching time. We also show that in capacitive switches, charge actuation considerably reduces the maximal electrostatic field within the dielectric layer. This suggests that charge actuation can be used to reduce dielectric charging of capacitive switches.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128304567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Performance of a 512/spl times/3 pixel microbolometer detector for space imaging applications 用于空间成像应用的512/spl倍/3像素微辐射热计探测器的性能
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.98
T. Pope, C. Alain, L. L. Noc, H. Jerominek, L. Phong, W. Zheng
{"title":"Performance of a 512/spl times/3 pixel microbolometer detector for space imaging applications","authors":"T. Pope, C. Alain, L. L. Noc, H. Jerominek, L. Phong, W. Zheng","doi":"10.1109/ICMENS.2005.98","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.98","url":null,"abstract":"A 512/spl times/3 pixel microbolometer detector array has been developed for space imaging applications. Each pixel includes thermally sensitive and reference microbolometer detectors fabricated by surface micromachining and arranged in a Wheatstone bridge configuration. The detector array is sensitive to thermal infrared radiation and early characterisation shows good uniformity of response between the three lines and among pixels in a given line. The pixel bridge configuration reduces the impact of die temperature drift on pixel output to approximately 40 /spl mu/V/K, a three hundred fold improvement over a single microbolometer detector.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127093457","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Analysis of electroosmotic flow with linear variable zeta potential 线性变zeta电位的电渗透流分析
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.25
Ji Feng, Z. Chuncheng, Zhang Peng, Z. Deyi
{"title":"Analysis of electroosmotic flow with linear variable zeta potential","authors":"Ji Feng, Z. Chuncheng, Zhang Peng, Z. Deyi","doi":"10.1109/ICMENS.2005.25","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.25","url":null,"abstract":"The electroosmotic flow induced by an applied potential through microchannels between two parallel plates is analyzed in this study. A 2D Poisson-Boltzmann equation is used to model the electrical double layer (EDL), and the 2D modified Navier-Stokes equation which includes the body force caused by the interaction between the charge density and the applied electrical potential field is also used. These coupled equations are numerically solved with a finite difference method. The detailed results indicate that, in general, the essence of the zeta potential effect on the feature of EOF is significant and clear. The traits of electroosmotic flow with uniform, step change, especially linear variable zeta potential are discussed.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130676959","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A study on the effects of humidity, temperature, and pressure sensor on the piezoresistive film co-structure 湿度、温度和压力传感器对压阻膜共结构影响的研究
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.19
Lu-Ping Chao, Chih-Wei Lin, Y. Lau
{"title":"A study on the effects of humidity, temperature, and pressure sensor on the piezoresistive film co-structure","authors":"Lu-Ping Chao, Chih-Wei Lin, Y. Lau","doi":"10.1109/ICMENS.2005.19","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.19","url":null,"abstract":"The purpose of this paper is to analyze a polyimide-based co-structure membrane sensor, especially the effect of temperature, humidity and pressure on the sensor. Following the membrane theory, the finite element model constructed by the software ANSYS was employed to simulate different payloads. In order to determine the significance levels of different payloads, the Pearson linear correlation coefficient (PLCC) of the data resulting from the Monte Carlo simulation method was calculated.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130771056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Characteristics of fiber Bragg grating temperature sensor at elevated temperatures 光纤布拉格光栅温度传感器在高温下的特性
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.33
Bowei Zhang, M. Kahrizi
{"title":"Characteristics of fiber Bragg grating temperature sensor at elevated temperatures","authors":"Bowei Zhang, M. Kahrizi","doi":"10.1109/ICMENS.2005.33","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.33","url":null,"abstract":"This report is a part of ongoing research to develop high temperature optical sensors. We report our design and analyze of a hydrogen loaded fiber Bragg grating (FBG) temperature sensor range from room temperature to over 1000/spl deg/C. FBGs were fabricated in hydrogen loaded Ge-doped fibers using 248 nm excimer laser and their performance characteristics were tested. The gratings have shown stabilized at temperatures in excess of 700/spl deg/C and survived at temperatures in excess of 930/spl deg/C. These testing reveal the thermal reliability of tested gratings is related to the refractive index modulation inside the core of FBGs. In this research, we also found the high temperature resistance FBG could be formatted using conventional hydrogen loaded FBG, and stabilized in excess of 1000/spl deg/C. Our experimental results provide a better understanding of the formation to the hydrogen loaded FBGs and their decay behavior at elevated temperatures.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131938633","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Microneedle arrays for drug delivery and fluid extraction 用于药物输送和液体提取的微针阵列
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.71
P. Zhang, G. Jullien
{"title":"Microneedle arrays for drug delivery and fluid extraction","authors":"P. Zhang, G. Jullien","doi":"10.1109/ICMENS.2005.71","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.71","url":null,"abstract":"Fabrication results for a novel MEMS-based microneedle array are presented in this paper. The microneedle array design is introduced following a brief survey of previously published design techniques. The microneedle array is fabricated by employing a bi-mask technique to facilitate sharp tips, a cylindric body and side ports. The array has advantages over previously published results including ease of fabrication and bonding, and high needle density and robustness. In addition, the microneedle comprises side ports which minimizes the potential for clogging. This microneedle array can be used for fluid extraction and drug delivery systems; e.g., biological sampling, and insulin delivery into the human body.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122508617","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
New trends in rough surface characterization: when the wrinkle is beautiful 粗糙表面表征的新趋势:当皱纹是美丽的
2005 International Conference on MEMS,NANO and Smart Systems Pub Date : 2005-07-24 DOI: 10.1109/ICMENS.2005.82
P. Ramón-Torregrosa, M. Rodríguez-Valverde, M. Cabrerizo-Vílchez
{"title":"New trends in rough surface characterization: when the wrinkle is beautiful","authors":"P. Ramón-Torregrosa, M. Rodríguez-Valverde, M. Cabrerizo-Vílchez","doi":"10.1109/ICMENS.2005.82","DOIUrl":"https://doi.org/10.1109/ICMENS.2005.82","url":null,"abstract":"The rough material can improve the friction, the adhesion, as well as reduce the wetting which were characterised by Brownian surface. The work is to analyse the possible relationship between different classical roughness parameters, the maximum surface amplitude, the Hurst exponent, the lacunarity. The topographies were obtained using the atomic force microscopy.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131281192","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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