Hyoung-Jin Park, D. Eun, D. Kong, Seong-Jin Kong, S. Kong, Jong-Hyun Lee
{"title":"Fabrication of the multi-PCR chamber with inner heat-sink materials using a micro-blaster etching technique","authors":"Hyoung-Jin Park, D. Eun, D. Kong, Seong-Jin Kong, S. Kong, Jong-Hyun Lee","doi":"10.1109/ICMENS.2005.49","DOIUrl":null,"url":null,"abstract":"In this paper, we propose a new design for a PCR (polymerase chain reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (thermal imaging system). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.","PeriodicalId":185824,"journal":{"name":"2005 International Conference on MEMS,NANO and Smart Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2005-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2005 International Conference on MEMS,NANO and Smart Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMENS.2005.49","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this paper, we propose a new design for a PCR (polymerase chain reaction) chamber with a temperature sensor under a top glass wafer and heaters on the bottom glass wafer. These chamber sensors are thermally isolated from the heater. The multi PCR chamber has an inner heat-sink material of etched silicon mass or glass mass using a micro-blaster. Then we will capture the image of the thermal mass temperature profile among the chambers by using the TIS (thermal imaging system). The performance of the inner heat-sink materials is analyzed during the PCR cycles and the thermal interference of the chamber, respectively.