A study on the effects of humidity, temperature, and pressure sensor on the piezoresistive film co-structure

The purpose of this paper is to analyze a polyimide-based co-structure membrane sensor, especially the effect of temperature, humidity and pressure on the sensor. Following the membrane theory, the finite element model constructed by the software ANSYS was employed to simulate different payloads. In order to determine the significance levels of different payloads, the Pearson linear correlation coefficient (PLCC) of the data resulting from the Monte Carlo simulation method was calculated.