Materials Science in Semiconductor Processing最新文献

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Regulating preparation process of CuSb(S, Se)2 absorber layer for thin films solar cells via a low-toxic solution method 低毒溶液法制备薄膜太阳能电池用CuSb(S, Se)2吸收层工艺
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-17 DOI: 10.1016/j.mssp.2025.109579
Rui Wang , Yanchun Yang , Guonan Cui , Lulu Bai , Zhihui Gong , Chengjun Zhu
{"title":"Regulating preparation process of CuSb(S, Se)2 absorber layer for thin films solar cells via a low-toxic solution method","authors":"Rui Wang ,&nbsp;Yanchun Yang ,&nbsp;Guonan Cui ,&nbsp;Lulu Bai ,&nbsp;Zhihui Gong ,&nbsp;Chengjun Zhu","doi":"10.1016/j.mssp.2025.109579","DOIUrl":"10.1016/j.mssp.2025.109579","url":null,"abstract":"<div><div>CuSb(S, Se)<sub>2</sub>(CASSe) is known to have great potential for copper-based low-cost thin-film solar cells due to its excellent stability, earth-abundant raw materials, and suitability for the low-temperature preparation process. In this work, CASSe thin-film solar cells were prepared using the green n-butylammonium butyrate ionic solution-based method for the first time. The phase purity, crystallinity, morphology, and electrical properties of films prepared at different conditions (sintering and selenization conditions) were studied. With the help of the XRD, Raman spectra, SEM, and c-AFM measurements, the optimal preparation of CASSe thin film is confirmed at 230 °C for 3 min (sintering condition) and 390 °C for 20 min (selenization condition). Using glass/Mo/CuSb(S, Se)<sub>2</sub>/CdS/i-ZnO/ITO/Al as the structure of the device, the corresponding thin film solar cell can be fabricated, which presents a photoelectric conversion efficiency (PCE) of 0.14 %. Although the performance of the device is poor, our conclusions are meaningful in the development of CASSe material, supplementing the blank of preparing CASSe thin film solar cells by the green solution-based method.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109579"},"PeriodicalIF":4.2,"publicationDate":"2025-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143843841","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Controllable synthesis of janus Cu2O/ZnO nanoarchitectures for photothermal enhanced fenton catalytic-driven dye contaminant degradation 可控合成用于光热增强fenton催化降解染料污染物的janus Cu2O/ZnO纳米结构
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-16 DOI: 10.1016/j.mssp.2025.109554
Zhigang Hu , Tian Gao , Jinghua Li
{"title":"Controllable synthesis of janus Cu2O/ZnO nanoarchitectures for photothermal enhanced fenton catalytic-driven dye contaminant degradation","authors":"Zhigang Hu ,&nbsp;Tian Gao ,&nbsp;Jinghua Li","doi":"10.1016/j.mssp.2025.109554","DOIUrl":"10.1016/j.mssp.2025.109554","url":null,"abstract":"<div><div>A janus polydopamine-coated Cu<sub>2</sub>O/ZnO nanoarchitectures (ZnCuO@PDA) is presented and show favorable applications in environmental remediation, specifically dye degradation. The nanoarchitectures consisted of a heterostructure co-composed of the N-type semiconductor ZnO and the narrow bandgap P-type semiconductor Cu<sub>2</sub>O as the core. The formation of the Cu<sub>2</sub>O/ZnO heterojunction lowered the rate of electron-hole complexation, and the PDA provided the nanomaterials with excellent photo-thermal properties and active sites, which worked together to enhance the degradation rate for dye by photothermal enhanced Fenton catalytic effect. Rhodamine B (RhB) was served as modal dye contaminant, then the degradation experiments showed that the low concentration of ZnCuO@PDA exhibited excellent dye degradation over a wide pH range. Furthermore, ZnCuO@PDA exhibits favorable biocompatibility and recyclability, making it an environmentally sustainable and economically multiphase catalytic system. This innovation presents a novel approach for effective dye degradation.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109554"},"PeriodicalIF":4.2,"publicationDate":"2025-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143838233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Constructing Z-scheme CoIn2S4/BiOBr heterostructures for efficient photocatalytic degradation of tetracycline hydrochloride 构建z -方案co2s4 /BiOBr异质结构用于高效光催化降解盐酸四环素
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-13 DOI: 10.1016/j.mssp.2025.109549
Xiaoya Shangguan, Kehan Zhou, Lishang Liu
{"title":"Constructing Z-scheme CoIn2S4/BiOBr heterostructures for efficient photocatalytic degradation of tetracycline hydrochloride","authors":"Xiaoya Shangguan,&nbsp;Kehan Zhou,&nbsp;Lishang Liu","doi":"10.1016/j.mssp.2025.109549","DOIUrl":"10.1016/j.mssp.2025.109549","url":null,"abstract":"<div><div>In this work, the novel composite CoIn<sub>2</sub>S<sub>4</sub>/BiOBr was synthesized by a combination of hydrothermal and solvothermal methods. The degradation efficiency of tetracycline hydrochloride (TCH) was used as an index to assess the photodegradation efficiency of the synthesized novel complex catalysts. We investigated the effect of the content of CoIn<sub>2</sub>S<sub>4</sub> on the catalytic efficiency of the complex. Ultimately, we obtained the best catalytic performance of CoIn<sub>2</sub>S<sub>4</sub>/BiOBr at 5 wt%. Subsequently, we characterized the material in a variety of physical phases, and the material also showed excellent stability in the cycling test session. Finally, we revealed the Z-scheme photocatalytic mechanism by electron spin resonance (ESR) technique and radical trapping experiments.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109549"},"PeriodicalIF":4.2,"publicationDate":"2025-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143824519","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhancing solar cell performance through controllable perovskite crystallization via water additive in DMF DMF中水添加剂钙钛矿可控结晶提高太阳能电池性能
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-13 DOI: 10.1016/j.mssp.2025.109560
Wen-Ying Yu , Thangaraji Vasudevan , Praveenkumar Subramani, Lung-Chien Chen
{"title":"Enhancing solar cell performance through controllable perovskite crystallization via water additive in DMF","authors":"Wen-Ying Yu ,&nbsp;Thangaraji Vasudevan ,&nbsp;Praveenkumar Subramani,&nbsp;Lung-Chien Chen","doi":"10.1016/j.mssp.2025.109560","DOIUrl":"10.1016/j.mssp.2025.109560","url":null,"abstract":"<div><div>Achieving long-term stability under standard ambient conditions remains a major obstacle for perovskite solar cells (PSCs), as exposure to moisture often compromises their structure despite significant advancements in efficiency. This study demonstrates an efficient strategy to enhance the crystallization and stability of perovskites (CsFAMAPbX<sub>3</sub>) by introducing water as an additive throughout crystallization. Incorporating H<sub>2</sub>O into N, N-dimethylformamide (DMF) enables controlled crystallization, as water's lower boiling point and higher vapor pressure regulate solvent evaporation and film formation. The XRD and SEM analyses of the 3 % H<sub>2</sub>O samples show large crystalline sizes, well-formed grains, and smooth surfaces, indicating a significant reduction in defects within the perovskite material. Hence, the optimized solar cells reach a power conversion efficiency (PCE) of 20.5 % and maintain 85 % of their original performance after seven days of exposure to air, demonstrating significantly enhanced ambient stability. These findings propose a viable strategy for fine-tuning crystal growth processes, offering a pathway to increase both the efficiency and durability of organic-inorganic halide PSC.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109560"},"PeriodicalIF":4.2,"publicationDate":"2025-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143824520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Study on the photocatalytic performance of photocatalytic fixed polishing plate and its effect on the polishing performance of single-crystal SiC 光催化固定抛光片的光催化性能及其对单晶SiC抛光性能的影响研究
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-12 DOI: 10.1016/j.mssp.2025.109556
Chen Lin , Jilong Xie , Jiabin Lu , Qiusheng Yan
{"title":"Study on the photocatalytic performance of photocatalytic fixed polishing plate and its effect on the polishing performance of single-crystal SiC","authors":"Chen Lin ,&nbsp;Jilong Xie ,&nbsp;Jiabin Lu ,&nbsp;Qiusheng Yan","doi":"10.1016/j.mssp.2025.109556","DOIUrl":"10.1016/j.mssp.2025.109556","url":null,"abstract":"<div><div>To efficiently polish single-crystal silicon carbide (SiC), an Ultraviolet photocatalytic (UV-PC) fixed polishing plate containing TiO<sub>2</sub> was developed. The influence of UV-PC parameters on the concentration of hydroxyl radicals (·OH) and the polishing performance of SiC was studied. The influence of photocatalytic parameters, including TiO<sub>2</sub> mass fraction, H<sub>2</sub>O<sub>2</sub> mass fraction, and light intensity, on the concentration of ·OH was investigated using a spectrophotometric system. Based on this, the polishing experiment was conducted on single-crystal SiC. Results show that material removal rate (MRR) and ·OH concentration were significantly correlated. As the mass fraction of TiO<sub>2</sub>, mass fraction of H<sub>2</sub>O<sub>2</sub>, and light intensity increase, the concentration of ·OH radicals initially rises before declining, while the MRR of SiC initially increases before decreasing. Conversely, the surface roughness Ra of SiC exhibits first decreases before increasing. Under the conditions of 10 wt% TiO<sub>2</sub>, 10 wt% H<sub>2</sub>O<sub>2</sub>, and light intensity of 40 mW/cm<sup>2</sup>, the concentration of ·OH was highest, leading to the most significant fading of the methyl orange (MO) solution. Within 40 min, the degradation rate of the MO solution reached 99.3 %. At this time, the MRR of SiC was highest, reaching 4.05 μm/h, and the surface roughness Ra was lowest, at 1.09 nm. Compared to conventional methods without UV-PC processing, the MRR of SiC processed by UV-PC fixed polishing plate is significantly increased by 73.1 %, and peak-valley (PV) value and surface roughness are reduced by 58.1 % and 45.8 %, respectively. These research findings offer essential reference values for developing visible light-assisted SiC chemical mechanical polishing technology.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109556"},"PeriodicalIF":4.2,"publicationDate":"2025-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143821119","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Metal nitrides as an alternative material for SERS platforms: TiN and beyond 作为 SERS 平台替代材料的金属氮化物:TiN 及其他
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-12 DOI: 10.1016/j.mssp.2025.109555
Libor Nozka , Robert Ambroziak , Jan Krajczewski
{"title":"Metal nitrides as an alternative material for SERS platforms: TiN and beyond","authors":"Libor Nozka ,&nbsp;Robert Ambroziak ,&nbsp;Jan Krajczewski","doi":"10.1016/j.mssp.2025.109555","DOIUrl":"10.1016/j.mssp.2025.109555","url":null,"abstract":"<div><div>Currently, SERS spectroscopy is one of the most sensitive analytical techniques. The method is rapid, accurate, and non-destructive, relying on plasmonic nanostructures at its core. To date, the literature has been dominated by SERS platforms based on plasmonic metals, primarily gold and silver. The optical properties and applications of noble metal nanoparticles in SERS spectroscopy have been studied in depth for over 40 years. As a result, the potential of well-established noble metal plasmonic nanostructures is nearing its limit. Despite decades of development, the main challenge remains the design and production of highly efficient and reliable plasmonic substrates suitable for SERS. A high-quality SERS platform should provide a stable enhancement factor (EF) across the entire substrate (point-to-point uniformity) and between different substrates (sample-to-sample reproducibility), while also exhibiting high chemical and temporal stability. For potential biomedical and biological applications, a novel SERS platform must exhibit low cytotoxicity and good biocompatibility.</div><div>Therefore, the synthesis of novel, metal-free plasmonic nanomaterials continues to be an area of active research. One of the most promising materials is metal nitrides. Recent literature has demonstrated the formation of metal nitride-based SERS platforms with activity comparable to, or even surpassing, that of standard platforms based on noble metals. In this review, we describe the current state of the art and the prospects for applying metal nitride-based nanomaterials as SERS platforms.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109555"},"PeriodicalIF":4.2,"publicationDate":"2025-04-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143820406","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synthesis of CdSe/CISe core-shell structured quantum dots using seed growth method and their photovoltaic applications 种子生长法合成CdSe/CISe核壳结构量子点及其光伏应用
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-11 DOI: 10.1016/j.mssp.2025.109561
Xiaowei Zhao , Hui Zhang , Xinjian Xie , Yi Fang , Guifeng Chen
{"title":"Synthesis of CdSe/CISe core-shell structured quantum dots using seed growth method and their photovoltaic applications","authors":"Xiaowei Zhao ,&nbsp;Hui Zhang ,&nbsp;Xinjian Xie ,&nbsp;Yi Fang ,&nbsp;Guifeng Chen","doi":"10.1016/j.mssp.2025.109561","DOIUrl":"10.1016/j.mssp.2025.109561","url":null,"abstract":"<div><div>Quantum dots of I-III-VI ternary compounds, such as CuInSe<sub>2</sub>(CISe) and CuInS<sub>2</sub>(CIS), have great potential as light absorbing materials in solar cells due to their excellent optoelectronic properties. However, their performance is often hindered by many surface defects. In this study, environmentally friendly inverted CdSe/CISe core-shell quantum dots were successfully synthesized by thermal injection using triethylene glycol as a green solvent. Using XRD, UV Vis spectroscopy TEM, Raman spectroscopy, EDS, and fluorescence spectroscopy were used to comprehensively characterize the structure and optical properties of the synthesized core-shell quantum dots. A solar cell with FTO/TiO<sub>2</sub>/ZnS/CdSe/CISe/Mo structure was assembled using CdSe/CISe core-shell quantum dots as the light absorbing layer. The device efficiency using CdSe/CISe core-shell quantum dots under AM 1.5G solar spectrum and 100 mW cm<sup>−2</sup>illumination is 0.84 %, an increase of 0.36 % compared to single component CISe quantum dots.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109561"},"PeriodicalIF":4.2,"publicationDate":"2025-04-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143821118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of flat monoclinic Sm2O3 films by sputtering and post-deposition annealing for solar cell applications 用溅射和沉积后退火法制备太阳能电池用单斜Sm2O3薄膜
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-10 DOI: 10.1016/j.mssp.2025.109514
Tomoaki Yazaki , Shin Kunieda , Keisuke Arimoto , Junji Yamanaka , Kosuke O. Hara
{"title":"Development of flat monoclinic Sm2O3 films by sputtering and post-deposition annealing for solar cell applications","authors":"Tomoaki Yazaki ,&nbsp;Shin Kunieda ,&nbsp;Keisuke Arimoto ,&nbsp;Junji Yamanaka ,&nbsp;Kosuke O. Hara","doi":"10.1016/j.mssp.2025.109514","DOIUrl":"10.1016/j.mssp.2025.109514","url":null,"abstract":"<div><div>Monoclinic Sm<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span>O<span><math><msub><mrow></mrow><mrow><mn>3</mn></mrow></msub></math></span> is a promising material for the electron transport layer in double-heterojunction BaSi<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span> solar cells. This study aims to develop a technique for fabricating flat monoclinic Sm<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span>O<span><math><msub><mrow></mrow><mrow><mn>3</mn></mrow></msub></math></span> films through systematic investigation of the structural evolution during radio-frequency magnetron sputtering and post-deposition annealing. On synthetic quartz glass substrates, monoclinic Sm<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span>O<span><math><msub><mrow></mrow><mrow><mn>3</mn></mrow></msub></math></span> was successfully formed after annealing in Ar at 200–900 <span><math><mrow><mo>°</mo><mi>C</mi></mrow></math></span> for 10 min. In contrast, Sm<sub>9.33</sub>(SiO<sub>4</sub>)<span><math><msub><mrow></mrow><mrow><mn>6</mn></mrow></msub></math></span>O<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span> formed on Si substrates after annealing at 700–1100 <span><math><mrow><mo>°</mo><mi>C</mi></mrow></math></span>, accompanied by Si hillocks that increased surface roughness. X-ray photoelectron spectroscopy revealed excess oxygen in the as-deposited films, which triggered chemical reactions between the oxygen-rich Sm oxide and the Si substrate, leading to Sm<sub>9.33</sub>(SiO<sub>4</sub>)<span><math><msub><mrow></mrow><mrow><mn>6</mn></mrow></msub></math></span>O<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span> formation. Annealing in reducing atmospheres effectively suppressed these reactions, enabling the formation of flat monoclinic Sm<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span>O<span><math><msub><mrow></mrow><mrow><mn>3</mn></mrow></msub></math></span> films. Furthermore, we investigated the mechanism of monoclinic phase formation, confirming that it is independent of surface oxide effects and short annealing durations (10 min). These findings contribute to the advancement of BaSi<span><math><msub><mrow></mrow><mrow><mn>2</mn></mrow></msub></math></span> solar cell technology by enabling the fabrication of high-quality electron transport layers.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109514"},"PeriodicalIF":4.2,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143815372","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-performance Sn-doped Ga2O3 FETs by co-sputtering: Depletion mode versus enhancement mode 共溅射的高性能掺锡Ga2O3场效应管:耗尽模式与增强模式
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-10 DOI: 10.1016/j.mssp.2025.109552
Zi Chun Liu , Yang Hui Xia , De Dai , Jia Cheng Li , Hui Xia Yang , Yi Yun Zhang , Yuan Xiao Ma , Ye Liang Wang
{"title":"High-performance Sn-doped Ga2O3 FETs by co-sputtering: Depletion mode versus enhancement mode","authors":"Zi Chun Liu ,&nbsp;Yang Hui Xia ,&nbsp;De Dai ,&nbsp;Jia Cheng Li ,&nbsp;Hui Xia Yang ,&nbsp;Yi Yun Zhang ,&nbsp;Yuan Xiao Ma ,&nbsp;Ye Liang Wang","doi":"10.1016/j.mssp.2025.109552","DOIUrl":"10.1016/j.mssp.2025.109552","url":null,"abstract":"<div><div>High-performance Sn-doped gallium oxide (Ga<sub>2</sub>O<sub>3</sub>) films were deposited on Si/SiO<sub>2</sub> substrates to fabricate field-effect transistors (FETs) via room-temperature co-sputtering. The performances of the SiO<sub>2</sub>-supported FETs were optimized by varying the co-sputtering power of Sn to demonstrate a large on-state current (<em>I</em><sub>ON</sub>) of 2.5 mA/mm and a high on/off ratio of over 10<sup>6</sup>. However, it is accompanied by a normally-on behavior with a negative threshold voltage (<em>V</em><sub>TH</sub>), namely depletion mode (d-mode). Importantly, this d-mode can be converted to enhancement mode (e-mode) by adopting high-k Ta<sub>2</sub>O<sub>5</sub>/pristine Ga<sub>2</sub>O<sub>3</sub> dielectrics, and extra nitrogen (N) doping in the Sn-doped Ga<sub>2</sub>O<sub>3</sub> channels. Finally, the performances of the e-mode FETs with high-k dielectrics can be promoted via a Sn-doped Ga<sub>2</sub>O<sub>3</sub>/(Sn, N)-doped Ga<sub>2</sub>O<sub>3</sub> dual-layer channel structure, which presents a large <em>I</em><sub>ON</sub> over 2 mA/mm, a high on/off ratio exceeding 10<sup>7</sup>, and a small <em>V</em><sub>TH</sub> below 5 V. Furthermore, the FET with dual-layer channel shows excellent stability, which is reflected by the bias stress measurement and stable performances after 3-month exposure to air. This remarkably-improved performance is attributed to the enhanced field effect by the high-k dielectrics, and the dual-layer channel structure that possesses both high stability of the (Sn, N)-doped layer and high current capability of the Sn-doped layer.</div></div>","PeriodicalId":18240,"journal":{"name":"Materials Science in Semiconductor Processing","volume":"194 ","pages":"Article 109552"},"PeriodicalIF":4.2,"publicationDate":"2025-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143808529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fashioning all binary 3d transition metal oxides in the construction of dye-sensitized solar cells (DSSC) devices 染料敏化太阳能电池(DSSC)器件中所有二元三维过渡金属氧化物的成型
IF 4.2 3区 工程技术
Materials Science in Semiconductor Processing Pub Date : 2025-04-10 DOI: 10.1016/j.mssp.2025.109550
Tahta Amrillah , Lalu Jihad Al Jazeera , Viona Maria Djojo , Dewi Sintawati Try Sutrisno , Natalia Imelda Wulan , Yusuf Akmal Agam , Muhammad Farhan Afif Mauludin , Albert Rafael , Yuliar Firdaus
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