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Journal of The Vacuum Society of Japan最新文献

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Degradation Behaviors of Polymers due to Exposure of Active Oxygen Species Generated via Ultraviolet Lamps 紫外光产生的活性氧对聚合物降解行为的影响
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.275
Kazuki Hosoya, H. Matsumoto, S. Iwamori
{"title":"Degradation Behaviors of Polymers due to Exposure of Active Oxygen Species Generated via Ultraviolet Lamps","authors":"Kazuki Hosoya, H. Matsumoto, S. Iwamori","doi":"10.3131/JVSJ2.60.275","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.275","url":null,"abstract":"Active oxygen species (AOS) generated via ultraviolet lamps can be applied for various industrial processes owing to extremely strong oxidative abilities. It is well known that excited singlet oxygen atom [O(1D)], excited oxygen molecule (O2), ozone (O3) and hydroxyl radicals (OH), are of interest and value in surface modiˆcation, cleaning and oxidation processes. We have been investigated a new sterilization method using the AOS, and it is important to evaluate damages of polymer devices due to the exposure of the AOS for using as a sterilization apparatus. In this paper, we evaluated degradation behaviors of polymers used for medical devices due to the exposure of the AOS by using a colorimeter, spectrometer and pull test apparatus. We found that these polymer characteristics as bulk materials were maintained, although those of the surfaces were deteriorated by the AOS exposure.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"18 1","pages":"275-278"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90589272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Micro-fabricated Field Emitter Arrays - For New Applications 微制造场发射阵列-用于新应用
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.47
M. Nagao
{"title":"Micro-fabricated Field Emitter Arrays - For New Applications","authors":"M. Nagao","doi":"10.3131/JVSJ2.60.47","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.47","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"4 1","pages":"47-54"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89248583","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Experiment on Gas Mixture Separation by the Molecular Exchange Flow 分子交换流分离气体混合物的实验
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.142
M. Matsumoto, H. Sugimoto
{"title":"Experiment on Gas Mixture Separation by the Molecular Exchange Flow","authors":"M. Matsumoto, H. Sugimoto","doi":"10.3131/JVSJ2.60.142","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.142","url":null,"abstract":"(Received November 28, 2016, Accepted January 25, 2017) A model gas separator that makes use of the molecular exchange ‰ow through porous membrane of 18 cm2 area is fabricated. The eŠect of molecular exchange ‰ow is accumulated by the counter ‰ow of gas mixture that ‰ows around the membrane. The half part of the device concentrates light molecules, and the other concentrates heavy molecules. This study demonstrates the capability of the device to make two ‰ows of diŠerent gases whose diŠerence of mole percentage is around 6.5 from a continuous feed ‰ow of 3 sccm helium-neon 50 mixture. The eŠect of the product ‰ow rate and the ‰ow rate around the membrane are also investigated.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"43 1","pages":"142-144"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89264570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
低エネルギー電子ビームによるペットボトル滅菌技術;低エネルギー電子ビームによるペットボトル滅菌技術;Low Energy Electron Beam Sterilization Process for Plastic Drink Containers 低能量电子束瓶装灭菌技术;低能量电子束瓶装灭菌技术;低Energy Electron Beam Sterilization Process for Plastic Drink Containers
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.40
Ichiro Sakai
{"title":"低エネルギー電子ビームによるペットボトル滅菌技術;低エネルギー電子ビームによるペットボトル滅菌技術;Low Energy Electron Beam Sterilization Process for Plastic Drink Containers","authors":"Ichiro Sakai","doi":"10.3131/JVSJ2.60.40","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.40","url":null,"abstract":"Two diŠerent types of compact low energy electron emitters have been developed for the sterilization of plastic drink containers. One is called ITB (In the bottle), and has an electron window of 10 mm in diameter at the nozzle end and can irradiate directly onto interior surfaces of a bottle. The other is called OTB (Outside the bottle), and has 400 mm length electron window for irradiating outside the bottle. Using low electron energy below 150 kV the harmful eŠect of containers being aŠected by thermal distortion, charging and fragrance, etc. can be avoided. We present dosimetric mapping of both emitters for plastic container. The measured values of the dose ranged from a few to several tenths of kGy. These experimental indicates that it helps to provide the information about process parameters and dose of emitters veriˆed experimentally are found to be suitable for a sterilization system. The compact size and the light weight of low energy emitters have also advantages for sterilization system of the plastic container.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"52 1","pages":"40-46"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84652226","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Report on the 56 th Vacuum Summer School 第56届真空暑期学校报告
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.119
A. Kuwajima
{"title":"Report on the 56 th Vacuum Summer School","authors":"A. Kuwajima","doi":"10.3131/JVSJ2.60.119","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.119","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"11 1","pages":"119-121"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78658132","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Another Possible Origin of Temperature and Pressure Gradients across Vane in the Crookes Radiometer 克鲁克斯辐射计叶片上温度和压力梯度的另一种可能来源
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.471
K. Denpoh
{"title":"Another Possible Origin of Temperature and Pressure Gradients across Vane in the Crookes Radiometer","authors":"K. Denpoh","doi":"10.3131/JVSJ2.60.471","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.471","url":null,"abstract":"In conventional studies on the Crookes radiometer, vane temperature was presumed to be higher at the black side than at the shiny side. In this study, a new hypothesis – vane is isothermal but accommodation coe‹cients are diŠerent at the black side and at the shiny side – has been proposed and examined using heat transfer and Direct Simulation Monte Carlo (DSMC) simulations. The results prove that the vane is indeed isothermal under the sunlight and that gas temperature and pressure at the black side with the perfect accommodation coe‹cient become higher than those at the shiny side with a small accommodation coe‹cient. The pressure gradient across the vane acts as an area force to push the vane from the black side. It is also found the glass bulb temperature strongly aŠects the revolution of the vanes.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"11 1","pages":"471-474"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78929991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Recent developments of numerical calculation in crystal growth of SiC SiC晶体生长数值计算的新进展
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.313
K. Kakimoto, S. Nakano
{"title":"Recent developments of numerical calculation in crystal growth of SiC","authors":"K. Kakimoto, S. Nakano","doi":"10.3131/JVSJ2.60.313","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.313","url":null,"abstract":"The eŠect of nitrogen and aluminum as doped impurities on the stability of SiC polytypes (Cor Siface 4H and 6H substrates) formed by physical vapor transport (PVT) was investigated. The stability of the polytypes was analyzed using classical thermodynamic nucleation theory with numerical results obtained from a global model including heat, mass and species transfer in a PVT furnace. The results reveal that the formation of 4HSiC was more stable than that of 6HSiC when a grown crystal was doped with nitrogen using Cface 4Hand 6HSiC as seed crystals. In contrast, formation of 6HSiC was favored over 4HSiC when Siface 4Hand 6H SiC seed crystals were used. Meanwhile, the formation of 4HSiC was more stable than that of 6HSiC when aluminum was the dopant and Cand Sifaces of 6HSiC were used as seed crystals. 6HSiC was preferred to grow rather than 4HSiC in the cases of C and Sifaces of 4HSiC as seed crystals.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"91 1","pages":"313-320"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80496071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of Thermal Plasma Jet Induced Annealing Technology and Its Application to Electronic Device Fabrication 热等离子体射流诱导退火技术的发展及其在电子器件制造中的应用
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.77
S. Higashi
{"title":"Development of Thermal Plasma Jet Induced Annealing Technology and Its Application to Electronic Device Fabrication","authors":"S. Higashi","doi":"10.3131/JVSJ2.60.77","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.77","url":null,"abstract":"Atmospheric pressure micro-thermal-plasma-jet (mTPJ) irradiation on amorphous silicon (aSi) strips and its application to thin ˆlm transistor (TFT) fabrication have been investigated. Strip channel with the width smaller than 3 mm is eŠective to eliminate random grain boundaries by ˆltering eŠect. High speed scanning of mTPJ suppresses mass transfer of molten Si and generation of in grain defects. By introducing strip channel, high performance TFTs with a high average ˆeld eŠect mobility (mFE) of 503 cm2V-1s-1 (nchannel) are successfully fabricated with small device to device variation. CMOS shift register fabricated with strip channel TFTs was operated by 5V power supply at 50MHz. These results indicate that mTPJ crystallization of strip channel is quite promising for next generation TFT applications.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"31 1","pages":"77-80"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81659859","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synthesis of Graphene by Magnetron-Plasma-Enhanced Chemical Vapor Deposition on Different Substrate Materials 磁控管-等离子体增强化学气相沉积在不同衬底材料上合成石墨烯
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/jvsj2.60.459
Akito Nonomura, K. Kawakami, S. Ishidoshiro, Y. Kawamura, Y. Hayashi
{"title":"Synthesis of Graphene by Magnetron-Plasma-Enhanced Chemical Vapor Deposition on Different Substrate Materials","authors":"Akito Nonomura, K. Kawakami, S. Ishidoshiro, Y. Kawamura, Y. Hayashi","doi":"10.3131/jvsj2.60.459","DOIUrl":"https://doi.org/10.3131/jvsj2.60.459","url":null,"abstract":"Graphene was synthesized by radio-frequency magnetron-plasma-enhanced chemical vapor deposition on Si and SiO2 substrates along with on Cu substrate. Although the incubation period was longer and the nucleation density was smaller than the growth on Cu substrate, graphene was grown on Si and SiO2 substrates. It was speculated that the incubation period and nucleation density depend on the density of carbon precursor on substrate that is aŠected by the desorption speed of carbon or hydrocarbon.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"152 1","pages":"459-462"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83694932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Surface Potential Measurements of Organic Thin-Film Transistors by Kelvin-Probe Force Microscopy 用开尔文探针力显微镜测量有机薄膜晶体管的表面电位
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.392
K. Kobayashi, Hirofumi Yamada
{"title":"Surface Potential Measurements of Organic Thin-Film Transistors by Kelvin-Probe Force Microscopy","authors":"K. Kobayashi, Hirofumi Yamada","doi":"10.3131/JVSJ2.60.392","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.392","url":null,"abstract":"2017, Accepted August 23, 2017 ) Kelvin-probe force microscopy ( KPFM ) is a surface potential mapping technique based on dynamic-mode atomic force microscopy ( AFM ) . It is useful to visualize carrier injection barriers and trapped charges in operating organic thin-ˆlm transistors ( OTFTs ) . Since it is desirable to perform KPFM experiments in vacuum conditions, frequency modulation ( FM ) technique is often used to oper-ate AFM / KPFM. We review two operating modes of KPFM using FM-AFM in vacuum and demonstrate visualization of the carrier injection barriers and trapped charges in OTFTs. We also introduce a method to visualize the transient distribution of the trapped charges being evacuated from","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"128 1","pages":"392-396"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80238171","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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