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Journal of The Vacuum Society of Japan最新文献

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真空技術者資格認定試験の問題解説(8);真空技術者資格認定試験の問題解説(8);Guidance for the Vacuum Engineer Examination (8) 真空技术者资格认定试験の问题解说(8);真空技术者资格认定试験の问题解说(8);Guidance for the Vacuum Engineer Examination (8)
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.507
Kazue Takahashi
{"title":"真空技術者資格認定試験の問題解説(8);真空技術者資格認定試験の問題解説(8);Guidance for the Vacuum Engineer Examination (8)","authors":"Kazue Takahashi","doi":"10.3131/JVSJ2.60.507","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.507","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"12 1","pages":"507-510"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89698411","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Evaluation of Temperature Dependency of Gas Permeability on Various Kinds of Elastomers 不同弹性体透气性对温度依赖性的评价
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.502
Yasutaka Yamada, S. Sogo
{"title":"Evaluation of Temperature Dependency of Gas Permeability on Various Kinds of Elastomers","authors":"Yasutaka Yamada, S. Sogo","doi":"10.3131/JVSJ2.60.502","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.502","url":null,"abstract":"Gas permeation test equipment was developed to measure the gas permeability through O-ring shape elastomers under actual condition of semiconductor manufacturing such as high vacuum and high temperature. The temperature dependencies of gas permeability on three kinds of elastomers, silicone (VMQ), ‰uoroelastomer (FKM) and per‰uoroelastomer (FFKM), were investigated. Permeation rate for all materials increased as temperature increased. O2 and N2 gas permeation rate through VMQ was much higher than that through the other materials, especially in lower temperature. Moreover, the temperature dependencies of gas permeability with VMQ were completely diŠerent from those of FKM and FFKM. This was coming from diŠerent polymer structure which caused diŠerence of solubility and diŠusivity between silicon and ‰uoroelastomers.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"15 1","pages":"502-506"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79649359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
いよいよ運転を開始したSuperKEKBの真空システム;いよいよ運転を開始したSuperKEKBの真空システム;Vacuum System in the First Operation of SuperKEKB 终于开始运行的SuperKEKB真空系统;终于开始运行的SuperKEKB真空系统;Vacuum System in the First Operation of SuperKEKB
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.123
Yusuke Suetsugu, Kyoko Shibata, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, H. Hisamatsu
{"title":"いよいよ運転を開始したSuperKEKBの真空システム;いよいよ運転を開始したSuperKEKBの真空システム;Vacuum System in the First Operation of SuperKEKB","authors":"Yusuke Suetsugu, Kyoko Shibata, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, H. Hisamatsu","doi":"10.3131/JVSJ2.60.123","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.123","url":null,"abstract":"The ˆrst (Phase-1) commissioning of SuperKEKB, an asymmetric-energy electron-positron collider at KEK, began in February 2016, after more than 5 years of upgrade work on KEKB and successfully ended in June 2016. A major task of the Phase-1 commissioning was the vacuum scrubbing of new beam pipes in anticipation of a su‹ciently long beam lifetime in the next commissioning. The pressure rise per unit beam current decreased steadily with increasing beam dose, as expected. Another important task was to check the stabilities of various new vacuum components at high beam currents of approximately 1 A. The temperature increases of the bellows chambers, gate valves, connection ‰anges, and so on were less than several degrees at 1 A, and no serious problems were found. The eŠectiveness of the antechambers and TiN coating in suppressing the electron-cloud eŠect (ECE) in the positron ring was also conˆrmed. However, the ECE in the Al-alloy bellows chambers was observed where TiN had not been coated. The use of permanent magnets with an axial magnetic ˆeld of approximately 100 G successfully suppressed this eŠect. Pressure bursts accompanying beam losses were also frequently observed in the positron ring. The preparation for the next Phase-2 commissioning, such as the installations of new beam pipes at the collision point and of six more beam collimators, are now in progress.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"21 1","pages":"123-130"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82599528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
10 Kの氷から光脱離する水の核スピン異性体比と宇宙の水の起源について;10 Kの氷から光脱離する水の核スピン異性体比と宇宙の水の起源について;Ortho-to-para Ratio of Water Photodesorbed from Ice at 10 K and the Origin of Interstellar Water 关于从10k的冰中光脱离的水的核自旋异构体比和宇宙中水的起源;关于从10k的冰中光脱离的水的核自旋异构体比和宇宙中水的起源;orto -to-para Ratio of Water Photodesorbed from Ice at 10k and the Origin of Interstellar Water
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.264
Tetsuya Hama, Akira Kouchi, Naoki Watanabe
{"title":"10 Kの氷から光脱離する水の核スピン異性体比と宇宙の水の起源について;10 Kの氷から光脱離する水の核スピン異性体比と宇宙の水の起源について;Ortho-to-para Ratio of Water Photodesorbed from Ice at 10 K and the Origin of Interstellar Water","authors":"Tetsuya Hama, Akira Kouchi, Naoki Watanabe","doi":"10.3131/JVSJ2.60.264","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.264","url":null,"abstract":"Chemistry of interstellar H2O is essential for understanding the formation of stars and planetary systems because of the ubiquity of H2O in space. The abundance ratio of nuclear spin isomers (the ortho-to-para ratio, OPR) can be a key for interstellar water chemistry, when assuming that the OPR desorbed from ice is closely related to the ice formation temperature. However, the above assumption has not been experimentally validated. Here, we report that H2O photodesorbed from ice at 10 K shows a statistical OPR of 3, even when the ice is produced in situ by hydrogenation of O2, a known formation process of interstellar H2O. This invalidates the hypothesis for relation between OPR and temperature. Reinterpretation of previous observations is necessary to improve our understanding of interstellar chemistry and the formation of the solar system and comets.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"3 1","pages":"264-274"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83796239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;Characteristics and Applications of Diamond Like Carbon (DLC) Films 钻石莱克碳(DLC)膜及其应用展开;钻石莱克碳(DLC)膜及其应用展开;Characteristics and Applications of Diamond Like Carbon (DLC) Films
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/jvsj2.60.428
Koji Miyake
{"title":"ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;Characteristics and Applications of Diamond Like Carbon (DLC) Films","authors":"Koji Miyake","doi":"10.3131/jvsj2.60.428","DOIUrl":"https://doi.org/10.3131/jvsj2.60.428","url":null,"abstract":"Diamond Like Carbon (DLC) ˆlms have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies. In this paper, we describe their deposition processes, ˆlm structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"40 1","pages":"428-436"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76735430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Photoassisted Field Emission from Gated Silicon Field Emitter Arrays 门控硅场发射极阵列的光辅助场发射
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.8
H. Shimawaki
{"title":"Photoassisted Field Emission from Gated Silicon Field Emitter Arrays","authors":"H. Shimawaki","doi":"10.3131/JVSJ2.60.8","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.8","url":null,"abstract":"Field emitter arrays (FEAs) have been investigated as potential cold cathodes in variety of applications such as ‰atpanel displays and image sensors, microwave and further high frequency vacuum electronic devices. The density modulated electron beam (a train of electron bunches) at high frequency generated directly from the cathodes oŠers opportunities for dramatic improvements in performance of microwave vacuum electronic devices. The paper discusses the emission characteristics and optical response of gated ptype silicon ˆeld emitter arrays under irradiation of laser pulses.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"1 1","pages":"8-12"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76122248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Structural Observation of Electron Emitting Tip Using UHV STM 用特高压STM观察电子发射尖端的结构
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.437
Kazuki Noda, Miyuki. Tanaka, N. Watanabe, T. Kubo, Tetsuo Shimizu
{"title":"Structural Observation of Electron Emitting Tip Using UHV STM","authors":"Kazuki Noda, Miyuki. Tanaka, N. Watanabe, T. Kubo, Tetsuo Shimizu","doi":"10.3131/JVSJ2.60.437","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.437","url":null,"abstract":"Electron emitting tip is widely used in many research ˆelds such as microfabrication, electron microscopy, surface science and so on. There are mainly three types of electron emitter as thermionic, ˆeld-emission and Schottky electron emitter. Because of the high stability with large emission current, tungsten〈100〉single crystal coated with ZrO2 is widely used as Schottky electron emitter of an electron microscope. In order to develop a new technique for evaluating electron emitter, we thought that it was possible to observe the surface topographic structures of the electron emitting tip with a scanning probe microscope and succeeded in observing the nanostructure of the electron emitting tip in air. In this study, we have tried to observe tip nanostructure using ultra high vacuum scanning tunneling microscope (UHVSTM), because electron emitter is generally used under UHV condition. Using UHVSTM, high resolution STM images which are related to scanning electron microscope images were acquired. This indicated that UHVSTM could be a plausible tool for electron tip characterization.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"106 1","pages":"437-439"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80420195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS) 无功大功率脉冲磁控溅射(R-HiPIMS)的过渡模式控制
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.346
Tetsuhide Shimizu, M. Villamayor, J. Kéraudy, D. Lundin, U. Helmersson
{"title":"Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)","authors":"Tetsuhide Shimizu, M. Villamayor, J. Kéraudy, D. Lundin, U. Helmersson","doi":"10.3131/JVSJ2.60.346","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.346","url":null,"abstract":"346 平成28年11月30日 第57回真空に関する連合講演会で発表 1 首都大学東京大学院システムデザイン研究科知能機械システム 学域(〒1910065 東京都日野市旭が丘 66) 2 リンシェーピン大学 計測・物理学研究科(SE 58183 リン シェーピン,スウェーデン) 3 パリ第11大学 ガス・プラズマ物理研究所(91405 オル セー,フランス) Fig. 1 Cathode voltage and current waveforms measured during HiPIMS of TiAl alloy in Ar/N2 gas mixtures at a constant mean power of 8 kW, a frequency of 1 kHz, a pulse length of 50 ms, and a working pressure of 0.5 Pa.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"6 1","pages":"346-351"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74378837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Report on SSVS 2017, 2017 Joint Symposium of the Surface Science Society of Japan (SSSJ) and the Vacuum Society of Japan (VSJ), Concurrently with SSSJ's 37th Annual Meeting and VSJ's 58th Annual Symposium 2017年日本表面科学学会(SSSJ)和日本真空学会(VSJ)联合学术研讨会，同时召开SSSJ第37届年会和VSJ第58届年会
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.519
Ken Nakamura
{"title":"Report on SSVS 2017, 2017 Joint Symposium of the Surface Science Society of Japan (SSSJ) and the Vacuum Society of Japan (VSJ), Concurrently with SSSJ's 37th Annual Meeting and VSJ's 58th Annual Symposium","authors":"Ken Nakamura","doi":"10.3131/JVSJ2.60.519","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.519","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"56 1","pages":"519-522"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82262033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則;コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則;Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation 计算机模拟对粉体和线材离子注入分布的一般规律;计算机模拟对粉体和线材离子注入分布的一般规律;Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target bycomputer simulation
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.463
Shotaro Tawara, Yukio Yamamoto, Masakazu Arakawa, Satoshi Saijo, Junsei Horikawa, Tomoaki Yoneda
{"title":"コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則;コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則;Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation","authors":"Shotaro Tawara, Yukio Yamamoto, Masakazu Arakawa, Satoshi Saijo, Junsei Horikawa, Tomoaki Yoneda","doi":"10.3131/JVSJ2.60.463","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.463","url":null,"abstract":"Ion implantation into microspheres and wires may open a new application ˆeld. Therefore, we extended the TRIM (Transport of Ions in Matter) code that simulates ion distributions for substrates to be applicable to spherical and cylindrical targets. Next, we ˆtted simulated proˆles calculated by the TRIM code to the experimental ones to determine adequate parameters of electronic stopping powers. And, we simulated about various combinations to use the extended TRIM code which used parameters. Calculated projected ranges and implantation energies are reduced to modiˆed reduced projected ranges and average reduced energy. Also, we derive the relations between the average reduced energy and the modiˆed reduced projected ranges for spherical and cylindrical targets.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"80 1","pages":"463-466"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85358875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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