钻石莱克碳(DLC)膜及其应用展开;钻石莱克碳(DLC)膜及其应用展开;Characteristics and Applications of Diamond Like Carbon (DLC) Films

Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI:10.3131/jvsj2.60.428

Koji Miyake

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引用次数: 4

摘要

类金刚石(DLC)具有几个独特的特性:高硬度、耐磨性、低摩擦和良好的化学稳定性。因此，它们的应用非常广泛，例如，汽车和机械滑动件，切削工具和成型模具。本文介绍了它们的沉积工艺、结构、特性和力学性能，以及它们的应用。最后，我们提到了一些最近的发展和可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;Characteristics and Applications of Diamond Like Carbon (DLC) Films

Diamond Like Carbon (DLC) ˆlms have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies. In this paper, we describe their deposition processes, ˆlm structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.

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Journal of The Vacuum Society of Japan

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