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半導体表面における光励起キャリアダイナミクスの時間・空間分解計測;半導体表面における光励起キャリアダイナミクスの時間・空間分解計測;Spatio-temporal Observation of Photogenerated Carrier Dynamics on a Semiconductor Surface 半导体表面的光激发载流子动力学的时间、空间分解计测;半导体表面的光激发载流子动力学的时间、空间分解计测;光电generated Spatio-temporal Observation Carrier Dynamics on a Semiconductor Surface
Journal of The Vacuum Society of Japan Pub Date : 2017-10-01 DOI: 10.3131/JVSJ2.60.388
K. Fukumoto
{"title":"半導体表面における光励起キャリアダイナミクスの時間・空間分解計測;半導体表面における光励起キャリアダイナミクスの時間・空間分解計測;Spatio-temporal Observation of Photogenerated Carrier Dynamics on a Semiconductor Surface","authors":"K. Fukumoto","doi":"10.3131/JVSJ2.60.388","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.388","url":null,"abstract":"27, 2017, Accepted June 20, 2017 ) A system for time-resolved photoemission electron microscopy ( TR  PEEM ) conducted with femtosecond laser pulses has been de-veloped to explore the photogenerated electron dynamics on semiconductor surfaces. Attained space and time resolutions were 100 nm and 100 fs, respectively. The present manuscript introduces the TR  PEEM system, and also reports the observation of diŠerent photogenerated electron lifetimes in diŠerent nanoscale structural defects randomly distributed on a semiconductor surface. The results were explained based on Schockley-Read-Hall ( SRH ) model relating the carrier recombination time and the defect state density. The","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86805158","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High Degree Reduction of Graphene Oxide toward a High Carrier Mobility 高载流子迁移率的氧化石墨烯的高度还原
Journal of The Vacuum Society of Japan Pub Date : 2017-08-01 DOI: 10.3131/jvsj2.60.300
Seiji Obata, Minoru Sato, K. Saiki
{"title":"High Degree Reduction of Graphene Oxide toward a High Carrier Mobility","authors":"Seiji Obata, Minoru Sato, K. Saiki","doi":"10.3131/jvsj2.60.300","DOIUrl":"https://doi.org/10.3131/jvsj2.60.300","url":null,"abstract":"Graphene: a monolayer sheet of graphite shows many attractive properties, which are expected to be applied to various devices. Development of a high throughput method has been required to realize the applications. Chemical exfoliation via graphene oxide (GO) has been considered one of the promising methods. However, the graphene reduced from GO showed poor crystallinity and mobility than that of mechanically exfoliated graphene. Many reduction methods have been investigated to obtain high mobility graphene from GO lately. In this review, we introduce a novel reduction method which we have developed to convert GO to graphene by explaining their advantages and some ‰aws to be solved.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88579526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma 电弧等离子体高性能ZnO导电薄膜的设计
Journal of The Vacuum Society of Japan Pub Date : 2017-08-01 DOI: 10.3131/JVSJ2.60.292
Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto
{"title":"Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma","authors":"Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto","doi":"10.3131/JVSJ2.60.292","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.292","url":null,"abstract":"Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma Tetsuya YAMAMOTO1, Junichi NOMOTO1, Hisashi KITAMI1,2, Toshiyuki SAKEMI2, Hisao MAKINO1, Keisuke KOBAYASHI1, Yasushi AOKI2 and Seiichi KISHIMOTO3 1Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 7828502, Japan 2Technology Research Center, Sumitomo Heavy Industries Ltd., 19 Natsushima-cho, Yokosuka-shi, Kanagawa 2378555, Japan 3Department of Mechanical Engineering, Kochi National College of Technology, 2001 Otsu Monobe, Nankoku-shi, Kochi 7838508, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86794807","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Infrared Absorption Spectroscopy of Water Clusters Isolated in Cryomatrices 低温基质中水团簇的红外吸收光谱研究
Journal of The Vacuum Society of Japan Pub Date : 2017-07-01 DOI: 10.3131/JVSJ2.60.256
K. Yamakawa
{"title":"Infrared Absorption Spectroscopy of Water Clusters Isolated in Cryomatrices","authors":"K. Yamakawa","doi":"10.3131/JVSJ2.60.256","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.256","url":null,"abstract":"Infrared spectroscopy combined with the matrix isolation method, where samples are trapped by a cold and inert-molecular solid, has been used for the investigations of small water clusters. After the descriptions of the stable structures and vibrations of the clusters, the author explains experimental techniques of the matrix isolation and demonstrates recent works on the clusters isolated in the solids of rare gases, para-hydrogen, and methane as well as the hydrogen adsorption layer on a vapor deposited NaCl ˆlm. The relation between the frequency shift of the hydrogen-bonded OH stretch and the matrix critical-temperature is also shown.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87867235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
プラズマ化学気相堆積におけるグラフェン成長過程の偏光解析モニタリング;プラズマ化学気相堆積におけるグラフェン成長過程の偏光解析モニタリング;Ellipsometric Monitoring of First Stages of Graphene Growth in Plasma-Enhanced Chemical Vapor Deposition 等离子化学气相沉积中石墨烯生长过程的偏振分析监测;等离子化学气相沉积中石墨烯生长过程的偏振分析监测;Ellipsometric Monitoring of First Stages of Graphene Growth in plasma -增强化学装置deposition
Journal of The Vacuum Society of Japan Pub Date : 2017-04-01 DOI: 10.3131/JVSJ2.60.135
Yasuaki Hayashi, Satoshi Ishidoshiro, Shinya Yamada, Yuma Kawamura
{"title":"プラズマ化学気相堆積におけるグラフェン成長過程の偏光解析モニタリング;プラズマ化学気相堆積におけるグラフェン成長過程の偏光解析モニタリング;Ellipsometric Monitoring of First Stages of Graphene Growth in Plasma-Enhanced Chemical Vapor Deposition","authors":"Yasuaki Hayashi, Satoshi Ishidoshiro, Shinya Yamada, Yuma Kawamura","doi":"10.3131/JVSJ2.60.135","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.135","url":null,"abstract":"Ellipsometry monitoring was carried out in-situ for the analyses of substrate surface in the ˆrst stages of graphene growth in magnetron plasma-enhanced chemical vapor deposition. By the comparison of the experimentally obtained trajectory of ellipsometric parameters on the CD coordinate plane to that of the calculated ones, it has been found that graphene tends to grow parallel to substrate surface under the pressure of 10 Pa while perpendicularly under that of 200 Pa.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90441180","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Characteristics of Crystal/Cold Cathode Wide Range Vacuum Gauge 晶体/冷阴极宽量程真空计的特性
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.193
N. Ohsako, Masahide Kuroiwa
{"title":"Characteristics of Crystal/Cold Cathode Wide Range Vacuum Gauge","authors":"N. Ohsako, Masahide Kuroiwa","doi":"10.3131/JVSJ2.60.193","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.193","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76398266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
大気圧プラズマアクチュエータの流体制御によるメタン-水素改質の特性;大気圧プラズマアクチュエータの流体制御によるメタン-水素改質の特性;Characteristic of the Methane-hydrogen Reforming by the Fluid Control Using DBD Plasma Actuator 大气压力等离子体致动器流体控制下的甲烷-氢改性的特性;大气压力等离子体致动器流体控制下的甲烷-氢改性的特性;Characteristic of the methan -hydrogen Reforming by the Fluid Control Using DBD Plasma Actuator
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.334
S. Yamanaka, Masako Shindo, Akiyoshi Nagata
{"title":"大気圧プラズマアクチュエータの流体制御によるメタン-水素改質の特性;大気圧プラズマアクチュエータの流体制御によるメタン-水素改質の特性;Characteristic of the Methane-hydrogen Reforming by the Fluid Control Using DBD Plasma Actuator","authors":"S. Yamanaka, Masako Shindo, Akiyoshi Nagata","doi":"10.3131/JVSJ2.60.334","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.334","url":null,"abstract":"Characteristic of the methane-hydrogen reforming is studied on the plasma reforming eŠects by the electrode structure and the additional magnetic ˆeld using the dielectric barrier discharge plasma actuator (DBDPA). The hydrogen production rate was improved by using the multiple electrode structure of DBDPA that achieved high rate of 10.6 as compared with 1.1 on single structure. Moreover, it was found that the DBD plasma conˆnement was improved by the eŠect of ‰uid control around DBDPA resulting from the addition of the magnetic ˆeld and the hydrogen product rate could increase to 13.4 by using the cusp ˆeld conˆguration.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79231903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes 医用类碳金刚石(DLC)薄膜制备工艺中作为高功率脉冲磁控溅射(HiPIMS)设备组件的脉冲电源的开发
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.372
Masahide Kuroiwa, T. Nakatani
{"title":"Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes","authors":"Masahide Kuroiwa, T. Nakatani","doi":"10.3131/JVSJ2.60.372","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.372","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89572006","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Field Emission from Carbon Films with No Protrusions with High Aspect Ratios 高纵横比无凸碳膜的场发射特性
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.13
S. Horie, K. Asanagi, T. Myojin, T. Higuchi, Y. Yamada, M. Sasaki
{"title":"Field Emission from Carbon Films with No Protrusions with High Aspect Ratios","authors":"S. Horie, K. Asanagi, T. Myojin, T. Higuchi, Y. Yamada, M. Sasaki","doi":"10.3131/JVSJ2.60.13","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.13","url":null,"abstract":"Field emission features from Si and W tips are drastically improved upon coating even with simple carbon ˆlms. In this paper, in order to obtain clues to clarify the mechanism, we examine atomistic STM observations including local barrier height (LBH) and ˆeld emission imagings of the carbon ˆlms. And we also examine the ˆeld emission features from the shape-controlled W tips before and after the carbon coatings, enabling us to estimate the local electric ˆeld at the tip apex. From the STM observations, we ˆnd that the carbon ˆlm consists of nm-scale grains with various electronic properties and that the FE current varies grain by grain and is higher near the edge of each grain. The eŠective work functions evaluated from the slopes of the Fowler-Nordheim (FN) plot are constant regardless of the thickness of the carbon coating, although they are largely scattered for the ˆlms thinner than 1 nm. On the basis of the observed results, we discuss the mechanism of low macroscopic ˆeld emission from carbon ˆlms.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90966754","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
平成29年度熊谷記念真空科学論文賞，真空技術賞，真空進歩賞，真空会誌賞の審査経過と受賞業績紹介 平成29年度熊谷记念真空科学论文赏，真空技术赏，真空进歩赏，真空会志赏の审查経过と受赏业绩绍介
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.244
大介 藤田
{"title":"平成29年度熊谷記念真空科学論文賞，真空技術賞，真空進歩賞，真空会誌賞の審査経過と受賞業績紹介","authors":"大介 藤田","doi":"10.3131/JVSJ2.60.244","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.244","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76827113","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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