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Journal of The Vacuum Society of Japan最新文献

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Critical Layer Thickness for Columnar Growth Nanostructures of CoPt-based Alloy-Oxide Granular Media used for Perpendicular Magnetic Recording 垂直磁记录用钴基氧化合金颗粒介质柱状生长纳米结构的临界层厚
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.112
S. Sasaki, Y. Sasaki, S. Saito
{"title":"Critical Layer Thickness for Columnar Growth Nanostructures of CoPt-based Alloy-Oxide Granular Media used for Perpendicular Magnetic Recording","authors":"S. Sasaki, Y. Sasaki, S. Saito","doi":"10.3131/JVSJ2.60.112","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.112","url":null,"abstract":"Critical Layer Thickness for Columnar Growth Nanostructures of CoPtbased AlloyOxide Granular Media used for Perpendicular Magnetic Recording Shingo SASAKI1, Yuzo SASAKI2 and Shin SAITO2 1Department of Intelligent Systems Engineering, National Institute of Technology, Ichinoseki College, Takanashi, Hagisho, Ichinoseki-shi, Iwate 0218511, Japan 2Department of Electronic Engineering, Graduate School of Engineering, Tohoku University, 6605, Aoba, Aramaki, Aoba-ku, Sendai-shi, Miyagi 9808579, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78051678","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Dislocations in 4H-SiC Epilayers 4H-SiC脱毛层中的位错
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.285
H. Saka
{"title":"Dislocations in 4H-SiC Epilayers","authors":"H. Saka","doi":"10.3131/JVSJ2.60.285","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.285","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85426599","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
2017「青少年のための科学の祭典」東京大会 in 小金井への真空実験の出展報告;2017「青少年のための科学の祭典」東京大会 in 小金井への真空実験の出展報告;Report on Exhibition of Vacuum Experiments at the 2017 Youngsters' Science Festival in Koganei 2017“为青少年的科学祭典”东京大会in小金井真空实验参展报告;2017“为青少年的科学祭典”东京大会in小金井真空实验参展报告;Vacuum Experiments at the 2017 Youngsters' Science Festival in Koganei Report on Exhibition
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/jvsj2.60.514
Masuaki Matsumoto
{"title":"2017「青少年のための科学の祭典」東京大会 in 小金井への真空実験の出展報告;2017「青少年のための科学の祭典」東京大会 in 小金井への真空実験の出展報告;Report on Exhibition of Vacuum Experiments at the 2017 Youngsters' Science Festival in Koganei","authors":"Masuaki Matsumoto","doi":"10.3131/jvsj2.60.514","DOIUrl":"https://doi.org/10.3131/jvsj2.60.514","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81820155","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
走査トンネル顕微鏡（STM）による有機薄膜太陽電池の局所性能評価 扫描隧道显微镜(STM)有机薄膜太阳能电池的局部性能评估
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/jvsj2.60.381
修 武内, 貴大 落合, 昭二 吉田, 秀実 重川
{"title":"走査トンネル顕微鏡（STM）による有機薄膜太陽電池の局所性能評価","authors":"修 武内, 貴大 落合, 昭二 吉田, 秀実 重川","doi":"10.3131/jvsj2.60.381","DOIUrl":"https://doi.org/10.3131/jvsj2.60.381","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80529013","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
走査トンネル顕微鏡で見る近藤効果：Au(111)表面上の鉄フタロシアニン分子を例として 扫描隧道显微镜下的近藤效应:以Au(111)表面上的铁酞菁分子为例
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.165
規志 塚原
{"title":"走査トンネル顕微鏡で見る近藤効果：Au(111)表面上の鉄フタロシアニン分子を例として","authors":"規志 塚原","doi":"10.3131/JVSJ2.60.165","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.165","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82400843","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
平成29年度学会賞，真空の匠，フェローの審査経過と顕彰業績紹介 平成29年度学会奖，“真空之匠”的评审经过和表彰业绩介绍
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.239
鎭明 財満
{"title":"平成29年度学会賞，真空の匠，フェローの審査経過と顕彰業績紹介","authors":"鎭明 財満","doi":"10.3131/JVSJ2.60.239","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.239","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86760037","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Report on Topical Meeting of the Vacuum Society of Japan in June 2017 “Low Temperature Science and Vacuum Science” 2017年6月日本真空学会专题会议报告“低温科学与真空科学”
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.410
A. Itakura
{"title":"The Report on Topical Meeting of the Vacuum Society of Japan in June 2017 “Low Temperature Science and Vacuum Science”","authors":"A. Itakura","doi":"10.3131/JVSJ2.60.410","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.410","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88061088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of Thin Film Formation Technique Using Ion Irradiation Effect Control in Sputtering Method 溅射法中离子辐照效应控制薄膜形成技术的发展
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.81
H. Toyota
{"title":"Development of Thin Film Formation Technique Using Ion Irradiation Effect Control in Sputtering Method","authors":"H. Toyota","doi":"10.3131/JVSJ2.60.81","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.81","url":null,"abstract":"We fabricated Ni ˆlms on a Polyimide (PI) ˆlm and an Acrylonitrile-Butadiene-Styrene (ABS) resin substrate using unbalanced magnetron sputtering assisted by inductively coupled plasma. For the PI ˆlm, the eŠect of ion irradiation was controlled by substrate DC bias VS and magnetic ‰ux density toward the substrate BC. For the ABS resin substrate, the eŠect of ion irradiation was controlled by target DC power PT and magnetic ‰ux density toward the substrate BC. For each substrate, we investigated the eŠect of ion irradiation on the Ni ˆlm structures in detail. The eŠect of ion irradiation E was estimated by measured physical quantities with respect to sputtered atom ‰ux, ion ‰ux and ion energy. From xray diŠraction measurement, the crystallite size t(111) increased with the eŠect of ion irradiation. Minimum ˆlm resistivities of 9.0×10-6 and 1.4×10-5 Qcm were measured for BC=3 mT and E=0.24 on the PI ˆlm and BC=5 mT and E=0.98 on the ABS resin substrate, respectively. We conclude that controlling the eŠect of ion irradiation is eŠective for high quality Ni ˆlm formation on the PI ˆlm and the ABS resin substrate.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85824671","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
真空エレクトロスプレーを用いるイオン銃の開発;真空エレクトロスプレーを用いるイオン銃の開発;Development of an Ion Gun Using Vacuum Electrospray 开发使用真空电子喷胶的离子枪;开发使用真空电子喷胶的离子枪;Development of an Ion Gun Using Vacuum Electrospray
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.321
Satoshi Ninomiya, Yuji Sakai, Lee Chuin Chen, Kenzo Hiraoka
{"title":"真空エレクトロスプレーを用いるイオン銃の開発;真空エレクトロスプレーを用いるイオン銃の開発;Development of an Ion Gun Using Vacuum Electrospray","authors":"Satoshi Ninomiya, Yuji Sakai, Lee Chuin Chen, Kenzo Hiraoka","doi":"10.3131/JVSJ2.60.321","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.321","url":null,"abstract":"Atmospheric pressure electrospray had been used previously in our laboratory to generate massive cluster ion beam for charged droplet ionization; a method we called electrospray droplet impact (EDI). Previous ion gun that employed atmospheric pressure electrospray lacks adequate beam current and density for surface and interface analysis. To improve the EDI beam performance, we have proposed a technique for producing a stable electrospray of aqueous solution under vacuum. It is well known that vacuum electrospray of volatile liquids is di‹cult because of the freezing of the liquids by evaporative cooling under vacuum. Vacuum electrospray of aqueous solution was achieved by irradiating the tip of the electrospray emitter with infrared or near-infrared laser to prevent the freezing under high vacuum (<0.05 Pa). A stable and large beam current was also obtained by optimizing the vacuum electrospray conditions. On the basis of these results, the vacuum electrospray can be expected to be a high-performance massive cluster ion gun.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83883697","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Development of Miniature Sputtering Deposition Equipment for Minimal Fab with HiPIMS Operations 采用hiims操作的微型晶圆厂溅射沉积设备的开发
Journal of The Vacuum Society of Japan Pub Date : 2017-01-01 DOI: 10.3131/JVSJ2.60.365
H. Ogiso, K. Yukimura, S. Nakano, Hiroyuki Tanaka, S. Khumpuang, Yuuki Yabuta, Ryuichiro Kamei, S. Hara
{"title":"Development of Miniature Sputtering Deposition Equipment for Minimal Fab with HiPIMS Operations","authors":"H. Ogiso, K. Yukimura, S. Nakano, Hiroyuki Tanaka, S. Khumpuang, Yuuki Yabuta, Ryuichiro Kamei, S. Hara","doi":"10.3131/JVSJ2.60.365","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.365","url":null,"abstract":"Development of Miniature Sputtering Deposition Equipment for Minimal Fab with HiPIMS Operations Hisato OGISO1, Ken YUKIMURA2, Shizuka NAKANO1, Hiroyuki TANAKA2, Sommawan KHUMPUANG2, Yuuki YABUTA3, Ryuichiro KAMEI3 and Shiro HARA2 1Advanced Manufacturing Research Institute, National Institute of Industrial Science and Technology (AIST), 121 Namiki, Tsukuba-shi, Ibaraki 3058564 Japan 2Nanoelectronics Research Institute, National Institute of Industrial Science and Technology (AIST), 111 Umezono, Tsukuba-shi, Ibaraki 3058568, Japan 3Seinan-kogyo Co., Ltd., 4324 Kitakagaya, Summinoe-ku, Osaka-shi, Osaka 5590011 Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87636518","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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