Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto
{"title":"Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma","authors":"Tetsuya Yamamoto, J. Nomoto, H. Kitami, T. Sakemi, H. Makino, Keisuke L. I. Kobayashi, Y. Aoki, S. Kishimoto","doi":"10.3131/JVSJ2.60.292","DOIUrl":null,"url":null,"abstract":"Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma Tetsuya YAMAMOTO1, Junichi NOMOTO1, Hisashi KITAMI1,2, Toshiyuki SAKEMI2, Hisao MAKINO1, Keisuke KOBAYASHI1, Yasushi AOKI2 and Seiichi KISHIMOTO3 1Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 7828502, Japan 2Technology Research Center, Sumitomo Heavy Industries Ltd., 19 Natsushima-cho, Yokosuka-shi, Kanagawa 2378555, Japan 3Department of Mechanical Engineering, Kochi National College of Technology, 2001 Otsu Monobe, Nankoku-shi, Kochi 7838508, Japan","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"49 1","pages":"292-299"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of The Vacuum Society of Japan","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.3131/JVSJ2.60.292","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Design of Advanced Functional ZnO Conductive Thin Films with Arc Plasma Tetsuya YAMAMOTO1, Junichi NOMOTO1, Hisashi KITAMI1,2, Toshiyuki SAKEMI2, Hisao MAKINO1, Keisuke KOBAYASHI1, Yasushi AOKI2 and Seiichi KISHIMOTO3 1Research Institute, Kochi University of Technology, 185 Miyanokuchi, Tosayamada-cho, Kami-shi, Kochi 7828502, Japan 2Technology Research Center, Sumitomo Heavy Industries Ltd., 19 Natsushima-cho, Yokosuka-shi, Kanagawa 2378555, Japan 3Department of Mechanical Engineering, Kochi National College of Technology, 2001 Otsu Monobe, Nankoku-shi, Kochi 7838508, Japan
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