Journal of Photopolymer Science and Technology最新文献

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The Measurement of the Refractive Index n and k Value of the EUV Resist by EUV Reflectivity Measurement Method 用EUV反射率测量法测量EUV电阻折射率n和k值
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.105
Yosuke Ohta, A. Sekiguchi, T. Harada, Takeo Watanabe
{"title":"The Measurement of the Refractive Index n and k Value of the EUV Resist by EUV Reflectivity Measurement Method","authors":"Yosuke Ohta, A. Sekiguchi, T. Harada, Takeo Watanabe","doi":"10.2494/photopolymer.34.105","DOIUrl":"https://doi.org/10.2494/photopolymer.34.105","url":null,"abstract":"Up to now, we have been researching methods for measuring the simulation parameters of EUV resist. These parameters include the development parameter, the Dill C parameter, the diffusion length of acid generated from PAG, and the deprotection reaction parameter. By using these parameters, we have attempted to simulate EUV resist. As a result, we could investigate the conditions for reducing LER and for enhancing resolution. We hereby report on the methods of calculating the refractive index n and k values of photoresist with EUV light (13.5 nm), which has been difficult to measure until now, and the Dill B parameter, which is an absorption parameter. The three types of photoresists we investigated are the main chain scission type resist, chemically amplified resist, and metal resist.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"17 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84953252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Electrical and Optical Model of Reverse Mode Liquid Crystal Cells with Low Driving Voltage 低驱动电压反模液晶电池的电学和光学模型
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.315
R. Yamaguchi, K. Inoue
{"title":"Electrical and Optical Model of Reverse Mode Liquid Crystal Cells with Low Driving Voltage","authors":"R. Yamaguchi, K. Inoue","doi":"10.2494/photopolymer.34.315","DOIUrl":"https://doi.org/10.2494/photopolymer.34.315","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"493 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81428839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of Glycerol in Developer on Novolak-Type Positive-Tone Resist Solubility 显影剂中甘油对novolak型正音抗溶解度的影响
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.495
Shunpei Kajita, Yukiko Miyaji, H. Horibe
{"title":"Influence of Glycerol in Developer on Novolak-Type Positive-Tone Resist Solubility","authors":"Shunpei Kajita, Yukiko Miyaji, H. Horibe","doi":"10.2494/photopolymer.34.495","DOIUrl":"https://doi.org/10.2494/photopolymer.34.495","url":null,"abstract":"Photoresist is used for circuit fabrication in semiconductor devices. The material generally used for manufacturing semiconductor devices is the novolak-type positive-tone resist; however, it is necessary to minimize its line width while improving the resolution. To improve the resolution of novolak-type positive-tone resist, in this study, developers containing water-soluble organic solvents or surface-activating agents have been designed for controlling the resist solubility. The addition of glycerol, as a water-soluble organic solvent in the developer, inhibits the dissolution of the novolak resist, particularly in the unexposed area. The developer containing glycerol improves the novolak resist resolution, thereby developing a fine pattern.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"2022 28","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72536531","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Designed, Flexible Electrochromic Display Device with Fe(II)-Based Metallo-Supramolecular Polymer Using Mechanically Etched ITO Film 采用机械蚀刻ITO薄膜的Fe(II)基金属超分子聚合物设计柔性电致变色显示器件
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.175
M. Higuchi, Y. Fujii
{"title":"Designed, Flexible Electrochromic Display Device with Fe(II)-Based Metallo-Supramolecular Polymer Using Mechanically Etched ITO Film","authors":"M. Higuchi, Y. Fujii","doi":"10.2494/photopolymer.34.175","DOIUrl":"https://doi.org/10.2494/photopolymer.34.175","url":null,"abstract":"J. Raman Spectrosc. , 27 (1996) 351. 38. A. J. Bovill, A. A. McConnel, J. A. Nimmo, and W. E. Smith, J. Phys. Chem. , 90 (1986) 569. 39. A. Asano, M. Omichi, S. Tsukuda, K. Takano, M. Sugimoto, A. Saeki, and S. Seki, J. Phys. Chem. C , 116 (2012) 17274. Electrochromic (EC) displays are expected as energy-saving smart windows or digital signages because of the memory property. We succeeded in developing a designed and flexible electrochromic (EC) display device with Fe(II)-based metallo-supramolecular polymer (polyFe) using a mechanically etched ITO film. Mechanical etching an ITO film was performed with a cutting machine having a blade of which length was adjusted so as not to cut off the film. The fabricated EC device was composed of the etched ITO film, a polyFe layer, an electrolyte layer, a nickel hexacyanoferrate layer as the counter material, and another ITO film. The EC device showed unique changes of the display upon applying a voltage of 1.5 V between the two ITO electrodes. It was revealed that the EC changes were controlled by the etching pattern such as a closed circle or the formation of a narrow ITO path.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"124 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86799063","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Effect of 2-propanol Immersing on Organohalide Perovskite Layer in Perovskite Solar Cells Fabricated by Two-step Method 二步法制备钙钛矿太阳能电池中2-丙醇浸泡对有机卤化物钙钛矿层的影响
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.279
Daiki Okawa, Yoshiyuki Seike, T. Mori
{"title":"Effect of 2-propanol Immersing on Organohalide Perovskite Layer in Perovskite Solar Cells Fabricated by Two-step Method","authors":"Daiki Okawa, Yoshiyuki Seike, T. Mori","doi":"10.2494/photopolymer.34.279","DOIUrl":"https://doi.org/10.2494/photopolymer.34.279","url":null,"abstract":"","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"44 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79936791","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synthesis and Characterization of High Refractive Index Polythiocyanurates 高折射率多硫氰脲酸盐的合成与表征
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.251
Songyan Shi, Yoshihisa Onodera, Tadashi Tsukamono, Y. Shibasaki, Y. Oishi
{"title":"Synthesis and Characterization of High Refractive Index Polythiocyanurates","authors":"Songyan Shi, Yoshihisa Onodera, Tadashi Tsukamono, Y. Shibasaki, Y. Oishi","doi":"10.2494/photopolymer.34.251","DOIUrl":"https://doi.org/10.2494/photopolymer.34.251","url":null,"abstract":"The polythiocyanurates with high molecular weights were successfully prepared by the phase-transfer catalyzed polycondensation of triazinedithiol with activated dibromides. These polymers were soluble in tetrahydrofuran (THF) and N -methyl-2-pyrrolidone (NMP), and readily afforded colorless and transparent cast films. The films of polythiocyanurates exhibited good thermal stabilities such as thermal decomposition temperatures of 320 ˚C in air. A relatively high glass transition temperatures of the polymers were in the range of 112-143 ˚C. The optical transmittance of the films was as high as 80% at 400 nm. The films exhibited high refractive index of 1.73 at d line, which is attributed to the triazine rings and sulfur atoms, and Abbe's number of around 18. Furthermore, the f ilms showed the low birefringence of 0.0007-0.0022 at d-line. The obtained polymers are promising candidates for thermoplastic optical lens application. Copolymers of polysilane and allyl methacrylate were prepared using the polysilane as a photoradical initiator. The polysilane block and allyl group were retained even after photopolymerization. The σ -conjugation of polysilane block in the copolymer allowed it to exhibit light absorption in the ultraviolet region. Subsequently, an ene-thiol reaction between the copolymer and mercapto-containing molecule was carried out by photocuring a thin film of the mixture. The photoreaction formed –CH–CH 2 –S– bonding between the organic component and a silica component that was formed by photolysis of the polysilane block in the copolymer. Therefore, the polysilane-allyl methacrylate copolymer successfully provided a silicon-rich organic–inorganic hybrid material.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"11 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78591448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Affinity Analysis of Photoacid Generator in the Thin Film of Chemical Amplification Resist by Contact Angle Measurement 用接触角测量法分析化学放大阻光刻膜中光酸产生源的亲和力
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.111
Shinji Yamakawa, Ako Yamamoto, S. Yasui, Takeo Watanabe, T. Harada
{"title":"Affinity Analysis of Photoacid Generator in the Thin Film of Chemical Amplification Resist by Contact Angle Measurement","authors":"Shinji Yamakawa, Ako Yamamoto, S. Yasui, Takeo Watanabe, T. Harada","doi":"10.2494/photopolymer.34.111","DOIUrl":"https://doi.org/10.2494/photopolymer.34.111","url":null,"abstract":"Photopolym. Sci. Technol., 27 (2014) 623. 6. A. Sekiguchi, Y. Kono, and Y. Sensu, J. Photopolym. Sci. Technol., 16 (2003) 209. 7. M. Yanagihara, J. Cao, M. Yamamoto, A. Arai, S. Nakayama, T. Mizuide, and T. Namioka, Applied Optics, 30 (1991) 2807. 8. M. Yoshifuji, S. Niihara, T. Harada, and T. Watanabe. Jpn. J. Appl. Phys., 58 (2019). 9. Y. Fukushima, T. Watanabe, T. Harada, and H. Kinoshita. J. Photopolym. Sci. Technol., 22 (2009) 85. 10. T. Ishiguro, J. Tanaka, T. Harada, and T. Watanabe. J. Photopolym. Sci. Technol., 32 (2019) 333. 11. B. Cardineau, R. D. Re, H. Al-Mashat, M. Marnell, M. Vockenhuber, Y. Ekinci, C. Sarma, M. Neisser, D. A. Freedman, and R. L. Brainard, Proc. SPIE, 9051 (2014). 12. A. Sekiguchi, T. Harada, and T. Watanabe, Proc. SPIE, 10143 (2017). 13. A. Sekiguchi, Y. Matsumoto, M. Isono, M. Naito, Y. Utsumi, T. Harada, and T. Watanabe, Proc. SPIE, 10583 (2018). 14. F. H. Dill, W. P. Hornberger, P. S. Hauge, and J. M. Shaw, IEEE Trans. Electron Devices, 22 (1975) 445. 15. F. H. Dill, IEEE Trans. Electron Devices, 22 (1975) 440. Affinity Analysis of Photoacid Generator in the Thin Film of Chemical Amplification Resist by Contact Angle Measurement","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"121 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74224473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synthesis of Ordered Fluorinated BCPs with One Block Composed of Random Copolymer 无规共聚物单嵌段有序氟化bcp的合成
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.335
Min Cao, H. Deng
{"title":"Synthesis of Ordered Fluorinated BCPs with One Block Composed of Random Copolymer","authors":"Min Cao, H. Deng","doi":"10.2494/photopolymer.34.335","DOIUrl":"https://doi.org/10.2494/photopolymer.34.335","url":null,"abstract":"A series of fluorinated block copolymers (BCPs), with one block composed of random vinyl copolymers were synthesized by reversible addition fragmentation chain-transfer (RAFT) polymerization. Despite of the hugely different properties of the two monomers in the random copolymer block, highly ordered lamellar structure with sub-10 nm resolution was observed by SAXS after 160 ºC annealing for 24 h. Each micro-domain consisted of two uniformly distributed monomers, with a low T g down to 24 o C.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"11 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74442772","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Siloxane Oligomer with Random Structure for Use in Photosensitive White Decorative Coatings 无规结构硅氧烷低聚物在光敏白色装饰涂料中的应用
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.517
Mitsuhito Suwa, Toru Okazawa, Hideyuki Kobayashi
{"title":"Siloxane Oligomer with Random Structure for Use in Photosensitive White Decorative Coatings","authors":"Mitsuhito Suwa, Toru Okazawa, Hideyuki Kobayashi","doi":"10.2494/photopolymer.34.517","DOIUrl":"https://doi.org/10.2494/photopolymer.34.517","url":null,"abstract":"A siloxane oligomer (Si-OLIGO-1) was produced by introduction of a bifunctional alkoxysilane into a silsesquioxane composed of a trifunctional alkoxysilane. The oligomer, which can form a thick film, was synthesized by a sol–gel method. This organic/inorganic hybrid material had good transparency and heat resistance. Infrared absorption spectroscopic analysis indicated that Si-OLIGO-1 had a random structure with many acidic silanol groups capable of alkaline development. A novel negative photosensitive white decorative coating that consisted of Si-OLIGO-1 as the base resin and 40 wt% TiO 2 (particle size 250 nm) as a white pigment was produced. The coating enabled facile complex decoration. A white cured film of thickness 10 µm had the brightness ( L *) and color ( a *, b *) required for the white frame of a display product. Although the coating did not transmit straight light of wavelength 300–700 nm, it gave a good patterning performance (resolution and pattern shape) on irradiation with ultraviolet light at a dose of 200–250 mJ/cm 2 . This is because it transmitted both g-line and h-line scattered light.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"152 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86228228","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Improved Hole-Transporting Properties in Conjugated Polymers Mixed with Polystyrene as an Insulating Polymer 与聚苯乙烯混合的共轭聚合物作为绝缘聚合物的空穴输运性能的改进
IF 0.8 4区 化学
Journal of Photopolymer Science and Technology Pub Date : 2021-06-11 DOI: 10.2494/photopolymer.34.291
Yuya Horiuchi, Koshiro Midori, H. Kim, H. Ohkita
{"title":"Improved Hole-Transporting Properties in Conjugated Polymers Mixed with Polystyrene as an Insulating Polymer","authors":"Yuya Horiuchi, Koshiro Midori, H. Kim, H. Ohkita","doi":"10.2494/photopolymer.34.291","DOIUrl":"https://doi.org/10.2494/photopolymer.34.291","url":null,"abstract":"4. Conclusion New, arch-shaped NFAs, vNTz-TehR and vNTz-TboR, were developed by introducing a vNTz unit into the central part of a π-conjugated backbone. Upon comparing vNTz-TboR to NTz-TboR, it was evident that the low-symmetry unit (vNTz) of the former material provided it with a higher solubility than that of the latter. Furthermore, electrochemical measurements indicated that vNTz-TboR and NTz-TboR showed almost identical LUMO energy levels. An OSC based on P3HT/vNTz-TehR showed a PCE of 2.06%, and the contact angle measurements implied that the vNTz-TehR film has a favorable surface for photo-carrier generation. Thus, this study demonstrated the potential applicability of arch-shaped NTz derivatives in organic electronics.","PeriodicalId":16810,"journal":{"name":"Journal of Photopolymer Science and Technology","volume":"2 1","pages":""},"PeriodicalIF":0.8,"publicationDate":"2021-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88123546","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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