2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)最新文献

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CMOS bi-directional ultra-wideband galvanically isolated die-to-die communication utilizing a double-isolated transformer 利用双隔离变压器的CMOS双向超宽带电隔离模对模通信
M. Javid, K. Ptáček, R. Burton, J. Kitchen
{"title":"CMOS bi-directional ultra-wideband galvanically isolated die-to-die communication utilizing a double-isolated transformer","authors":"M. Javid, K. Ptáček, R. Burton, J. Kitchen","doi":"10.1109/ISPSD.2018.8393609","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393609","url":null,"abstract":"In this work, an ultra-wideband (UWB) bi-directional galvanic isolator (BDGI) is reported for the first time. The proposed design methodology uses time-division-duplex (TDD) protocol to merge the functionality of two passive galvanically isolated channels into one magnetically coupled communication channel between two chips, enabling up to 50% form-factor and assembly cost reduction while achieving state-of-art performance. A low-power UWB pulse polarity-modulated transceiver architecture is presented to maximize the channel's capacity to 300 Mb/s and minimize power consumption and propagation delay to 200 pj/b and 5 ns respectively. The communication channel utilizes a double-isolated transformer coupled channel consisting of two transformers connected in series using bondwires and achieves 11 kVpk (7.8 kVrms) high voltage isolation, the highest reported without adding extra steps or alternating the native CMOS fabrication process. The system is realized in a 0.25 um BCD (Bipolar-CMOS-DMOS) process with 0.8 mm2 silicon area per channel. The system uses odd-symmetry center-tapped transformers and differential transceivers to increase noise/transient immunity.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"111 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-06-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115850546","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A more accurate electromagnetic modeling of WBG power modules 更精确的WBG电源模块电磁建模
Ivana Kovačević-Badstübner, U. Grossner, D. Romano, G. Antonini, J. Ekman
{"title":"A more accurate electromagnetic modeling of WBG power modules","authors":"Ivana Kovačević-Badstübner, U. Grossner, D. Romano, G. Antonini, J. Ekman","doi":"10.1109/ISPSD.2018.8393652","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393652","url":null,"abstract":"A major requirement for further development of wide-band gap (WBG) power devices and their applications is the optimization of packages and PCB layouts to enable fast-switching capabilities. Electromagnetic modelling allows the prediction of parasitic inductances, capacitances, and resistances of the current paths within power modules, which cannot be easily approached in measurements. As a result, electromagnetic-circuit-coupled modeling enables the optimization of package layouts and interconnections before manufacturing actual power modules. The accuracy and limitations of present numerical techniques for three-dimensional (3D) electromagnetic modeling of power modules is still neither well understood nor verified. This paper presents the extraction of parasitics of power semiconductor packages using two electromagnetic modelling approaches. The first approach is based on a well-established 3D electromagnetic quasi-static solver, ANSYS Q3D Extractor. For the second approach, a numerical solver based on the Partial Element Equivalent Circuit (PEEC) method is developed and assessed in terms of modelling accuracy required by fast switching WBG-based power converters. The PEEC method is presented as a promising numerical technique, which can potentially be used to overcome the limitations of the EM modeling based on the ANSYS Q3D Extractor.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115628932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Investigation of threshold voltage stability of SiC MOSFETs SiC mosfet阈值电压稳定性研究
D. Peters, T. Aichinger, T. Basler, G. Rescher, K. Puschkarsky, H. Reisinger
{"title":"Investigation of threshold voltage stability of SiC MOSFETs","authors":"D. Peters, T. Aichinger, T. Basler, G. Rescher, K. Puschkarsky, H. Reisinger","doi":"10.1109/ISPSD.2018.8393597","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393597","url":null,"abstract":"Silicon carbide (SiC) based metal-oxide semiconductor-field-effect-transistors (MOSFETs) show excellent switching performance and reliability. However, compared to silicon devices the more complex properties of the semiconductor-dielectric interface imply some natural peculiarities in threshold voltage variation. This paper analyzes threshold voltage hysteresis effects, bias temperature instability effects (BTI) and their relevance for the switching behavior. Most of the effects can be understood by means of simple physical models and do not harm reliability and performance of the device. It turns out that the standard norm test and readout procedures typically used to characterize threshold voltage and threshold voltage drifts for Si devices are insufficient and need to be adapted for SiC MOSFETs in order to get reproducible and solid results.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124455052","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 52
Sn- and Cu-oxide reduction by formic acid and its application to power module soldering 甲酸还原锡、铜氧化物及其在电源模块焊接中的应用
Naoto Ozawa, T. Okubo, J. Matsuda, T. Sakai
{"title":"Sn- and Cu-oxide reduction by formic acid and its application to power module soldering","authors":"Naoto Ozawa, T. Okubo, J. Matsuda, T. Sakai","doi":"10.1109/ISPSD.2018.8393649","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393649","url":null,"abstract":"In this paper, surface analysis of a copper substrate and solder foil, and real time measurement of oxide film thickness during reduction by formic acid with an ellipsometer are described. From the measurement results, the native oxide films of the copper substrate and the solder foil are presumed to be Cu2O and SnO, respectively, and their thicknesses are confirmed as 4 nm and 5.3 nm, respectively. It is also found that SnO has a higher reduction rate by formic acid than Cu2O. Furthermore, the contact angle of the melted solder ball becomes smaller as the copper oxide film becomes thinner, but complete oxide removal is necessary to obtain favorable solder wettability. On the basis of these formic acid reduction data, a void rate of 1% or less is achieved in a soldered sample processed with a formic acid reduction reflow machine.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121631642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Gate architecture design for enhancement mode p-GaN gate HEMTs for 200 and 650V applications 用于200和650V应用的增强模式p-GaN栅极hemt的栅极架构设计
N. Posthuma, S. You, S. Stoffels, H. Liang, M. Zhao, S. Decoutere
{"title":"Gate architecture design for enhancement mode p-GaN gate HEMTs for 200 and 650V applications","authors":"N. Posthuma, S. You, S. Stoffels, H. Liang, M. Zhao, S. Decoutere","doi":"10.1109/ISPSD.2018.8393634","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393634","url":null,"abstract":"Enhancement mode p-GaN gate HEMTs with two different gate architectures are compared. The gate is realized by stacked (1-mask) or separate patterning (3-mask) of the p-GaN and gate metal layers. The 3-mask gate architecture, in this work implemented with a novel TiN interlayer, offers the advantage of a low gate resistance, increased flexibility in field plate design and reduced dynamic RDS-ON at high VDS. Both for 200 and 650 V applications excellent device performance is demonstrated on 200 mm substrates using Au-free processing, with a threshold voltage of well above 2 V and a dynamic RDS-ON of below 20%. The 650 V rated device, with a hard breakdown voltage of 1000 V, passes the wafer level HTRB test at 150 °C.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123731297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 23
Uni-directional GaN-on-Si MOSHEMTs with high reverse-blocking voltage based on nanostructured Schottky drain 基于纳米结构肖特基漏极的单向高反向阻断电压GaN-on-Si MOSHEMTs
Jun Ma, E. Matioli
{"title":"Uni-directional GaN-on-Si MOSHEMTs with high reverse-blocking voltage based on nanostructured Schottky drain","authors":"Jun Ma, E. Matioli","doi":"10.1109/ISPSD.2018.8393635","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393635","url":null,"abstract":"In this work we present uni-directional GaN-on-Si MOSHEMTs with state-of-the-art reverse-blocking performance. We integrated tri-anode Schottky barrier diodes (SBDs) with slanted tri-gate field plates (FPs) as the drain electrode, and achieved a high reverse-blocking voltage (VRB) of −759 ± 37 V at 0.1 μA/mm with grounded substrate. The hybrid Schottky drain did not degrade the ON-state performance when compared with conventional ohmic drain, and the turn-ON voltage (VON) was as small as 0.64 ± 0.02 V. These results show the potential of GaN-on-Si transistors as high-performance uni-directional power switches, and open enormous opportunities for future highly integrated GaN power devices.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123749686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Investigation on single pulse avalanche failure of 900V SiC MOSFETs 900V SiC mosfet单脉冲雪崩失效研究
Na Ren, Hao Hu, Kang L. Wang, Zheng Zuo, Ruigang Li, Kuang Sheng
{"title":"Investigation on single pulse avalanche failure of 900V SiC MOSFETs","authors":"Na Ren, Hao Hu, Kang L. Wang, Zheng Zuo, Ruigang Li, Kuang Sheng","doi":"10.1109/ISPSD.2018.8393695","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393695","url":null,"abstract":"In this work, avalanche ruggedness and failure mechanisms of 900V SiC MOSFETs under single-pulse Unclamped Inductive Switching (UIS) test are investigated and compared with Si counterparts. It was found in this work that, due to the higher resistance to BJT latch-up, only uniform heating related device temperature limit failure exists in SiC MOSFETs. Experimental results also show that, SiC MOSFETs have 9 times higher avalanche energy per area and 50% higher avalanche current than Si MOSFETs in low inductance/short pulse condition. In large inductance/long pulse condition, SiC MOSFETs have shorter avalanche duration, lower avalanche current and only similar avalanche energy per area compared to Si, due to the much smaller (15∗) chip size, thinner active layer thickness and higher power density.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124990273","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Reduction of RonA retaining high threshold voltage in SiC DioMOS by improved channel design 通过改进通道设计降低SiC DioMOS中RonA保持高阈值电压
A. Ohoka, M. Uchida, T. Kiyosawa, N. Horikawa, K. Saitou, Y. Kanzawa, H. Sorada, K. Sawada, T. Ueda
{"title":"Reduction of RonA retaining high threshold voltage in SiC DioMOS by improved channel design","authors":"A. Ohoka, M. Uchida, T. Kiyosawa, N. Horikawa, K. Saitou, Y. Kanzawa, H. Sorada, K. Sawada, T. Ueda","doi":"10.1109/ISPSD.2018.8393600","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393600","url":null,"abstract":"Trade-off between threshold voltage and specific on-resistance is successfully overcome in a diode-integrated SiC MOSFET by improving the design of n-type epitaxial channel layer and p-type body region. This new design features enhanced transconductance, hence low on-state resistance, while retaining high threshold voltage. Obtained specific on-resistance of the fabricated 1200V SiC DioMOS is among the lowest achieved for SiC MOSFETs including trench devices. The transconductance enhancement is also demonstrated to be effective in increasing the turn-on switching speed, thus contributing to higher efficiency in power switching systems with reduced conduction and switching losses.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115608233","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Chip-scale cooling of power semiconductor devices: Fabrication of Jet impingement design 功率半导体器件的芯片级冷却:射流冲击设计的制造
Feng Zhou, K. Jung, Y. Fukuoka, E. Dede
{"title":"Chip-scale cooling of power semiconductor devices: Fabrication of Jet impingement design","authors":"Feng Zhou, K. Jung, Y. Fukuoka, E. Dede","doi":"10.1109/ISPSD.2018.8393716","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393716","url":null,"abstract":"Chip-scale cooling is proposed for future wide bandgap (WBG) power semiconductor devices to overcome challenges associated with device power dissipation, high heat fluxes up to 1 kW/cm2, and traditional package thermal resistance. In the current paper, fabrication of a chip-scale cooler that utilizes fluid jet impingement plus flow through an optimized branching microchannel topology is described. This chip-scale cooling structure is expected to provide an estimated 70% higher cooling performance for the same pumping power and more uniform cooling relative to a straight microchannel design based on prior numerical and experimental studies. The proposed embedded flow structure is defined by three layers, and each layer is fabricated by double-sided etching of a six-inch silicon wafer. The final device is obtained by bonding the three etched layers together and dicing the three-wafer stack into individual chips. The design and fabrication of the cooling chip, including process challenges and solutions, is the focus of the current paper. Discussion of the current technology and a vision of its future application is also provided.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128248836","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
High-temperature validated SiC power MOSFET model for flexible robustness analysis of multi-chip structures 用于多芯片结构柔性鲁棒性分析的高温验证SiC功率MOSFET模型
M. Riccio, V. d’Alessandro, G. Romano, L. Maresca, G. Breglio, A. Irace, A. Castellazzi
{"title":"High-temperature validated SiC power MOSFET model for flexible robustness analysis of multi-chip structures","authors":"M. Riccio, V. d’Alessandro, G. Romano, L. Maresca, G. Breglio, A. Irace, A. Castellazzi","doi":"10.1109/ISPSD.2018.8393698","DOIUrl":"https://doi.org/10.1109/ISPSD.2018.8393698","url":null,"abstract":"This paper presents a statistical analysis on the effect of parallel connection of SiC power MOSFETs in high current applications. To this purpose, a reliable temperature-dependent SPICE model is calibrated on static and dynamic experimental curves of 1.2kV-36A commercial SiC MOSFET. The statistical fluctuation of threshold voltage and on-resistance is evaluated on 20 device samples and modeled with Gaussian functions. The proposed analysis, based on SPICE electrothermal Monte Carlo simulations, is then aimed to improve the design of high current systems with multi-chip devices. Therefore, the study is focused on the evaluation of current and energy unbalance during device switching under inductive load. Results achieved for nominal switching condition and out-of-SOA current levels are discussed.","PeriodicalId":166809,"journal":{"name":"2018 IEEE 30th International Symposium on Power Semiconductor Devices and ICs (ISPSD)","volume":"367 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124606178","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
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