Journal of Micromechanics and Microengineering最新文献

{"title":"Manufacturing fused silica hemispherical resonators using polymer glass suspension and replication molding","authors":"Yahya Atwa, Hamza Shakeel","doi":"10.1088/1361-6439/ad5b6a","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5b6a","url":null,"abstract":"This work introduces a new method for manufacturing fused silica (FS)-based hemispherical resonators (HSRs) using a printable polymer glass mixture and replication molding. This process involves 3D printing to create the mold, followed by the casting of a photo-reactive pre-polymer glass mixture. This technique allows us to produce complex 3D geometries and offers faster production of resonators compared to other traditional methods. In this study, we manufactured three devices and successfully identified resonance modes with two (<italic toggle=\"yes\">N</italic> = 2), three (<italic toggle=\"yes\">N</italic> = 3) and four (<italic toggle=\"yes\">N</italic> = 4) nodes/antinodes in all three HSRs, demonstrating the repeatability of our new manufacturing method. The highest quality factor of 482 k was achieved for the <italic toggle=\"yes\">N</italic> = 3 resonance mode using the ring-down method. Some of the key advantages of our method include producing multiple devices efficiently with relatively good surface quality, making it a viable option for producing high-precision devices in the future. Our new fabrication technique results in a device surface roughness of ∼100 nm (measured over an area of 250 <italic toggle=\"yes\">μ</italic>m × 250 <italic toggle=\"yes\">μ</italic>m) and manufacturing yield of over 90%. Moreover, all the steps involved in this method can be completed outside of a specialized cleanroom environment.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"49 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141567686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Design optimization and experimental verification of ultrasonic stack for micro hot embossing of polymers","authors":"Ahmed Abdel-Aleem, Ahmed M R Fath El-Bab, Masahiko Yoshino, Hassan A El-Hofy and Mohsen A Hassan","doi":"10.1088/1361-6439/ad5c6e","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5c6e","url":null,"abstract":"Ultrasonic micro hot embossing (UMHE) is a prominent technique used in numerous sectors to produce micro parts since it is cheaper, faster, and more accurate. Amplitude uniformity is a crucial parameter in UMHE in order to manufacture micro parts with accurate dimensions and high-quality surfaces, even though limited research has been conducted on the uniformity of ultrasonic amplitude at the horn face during the embossing process. This paper presents an experimental and numerical study for designing an ultrasonic transducer and horn tailored to the micro hot embossing of polymer micro parts. A finite element (FE) simulation model combined with the Taguchi method has been developed to optimize the horn geometry and maximum amplitude uniformity. The Taguchi orthogonal array of 25 design runs has been generated and simulated using the developed FE modal analysis model, and then the optimized geometry was used to fabricate the horn. Applied torque and operating time calibrate and evaluate the transducer vibration characteristics. Experimental and simulation results revealed that the fabricated ultrasonic transducer and horn of a straight microfeature has a natural frequency of 28.8 kHz and has an 11 µm average peak-to-peak amplitude with 0.963 amplitude homogeneity along the microfeature face. The achieved frequency separation was greater than 0.85 kHz, whereas the gain ratio was 1.2. The design methodology developed in this paper showed great potential and has been numerically validated for various microfeature shapes across the horn face. Consequently, it can be applied to various ultrasonic applications beyond UMHE.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"24 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141551342","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfluidic carbon cloth-based enzymatic glucose biofuel cell for sustainably powering a microelectronic circuit *","authors":"S Vanmathi and Sanket Goel","doi":"10.1088/1361-6439/ad5b6b","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5b6b","url":null,"abstract":"Enhancing enzymatic microfluidic biofuel cells (EBFCs) devices has garnered significant attention due to the development of microfluidic ultra-low power energy-gathering techniques. To facilitate the ability to create microfluidic EBFCs, a carbon cloth (CC) has been considered since they are effective renewable energy sources and utilized as the ideal paper-based substitute for traditional power supplies for a variety of tiny devices due to their inherent qualities and exceptional performance. The developed microfluidic EBFC utilized glucose as a fuel, carbon cloth as the bioelectrode, Glucose oxidase for the anode, and laccase for the cathode. The maximum stable open circuit voltage of CC-EBFC was measured to be 475 mV with a peak power density of 85 µW cm−2 at 300 mV and a current density of 484 µA cm−2. The power performance of the device was improved by bovine serum albumin and a booster circuit, which was also coated and connected to the load to stabilize the performance. The novelty of the work is that using a flexible substrate of carbon cloth, with a microfluidic channel, has an added advantage in the biofuel cell. LTC3108EDE DC–DC booster was used to increase energy and attain a high charging voltage of 5 V to operate a digital watch up to 3 V. With minimal weight and flexibility; this minuscule device opens up new possibilities to sustainably power wearable and portable microelectronic devices.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"107 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141551341","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Neutron-absorption gratings fabricated by ultrasound-assisted filling method based on gadolinium particles","authors":"Yaohu Lei, Xiqi Li, Chi Wei, Zhuozhao Li, Guiwen Xu, Xin Liu, Jianheng Huang, Shengxiang Wang and Ji Li","doi":"10.1088/1361-6439/ad5b69","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5b69","url":null,"abstract":"Neutron differential phase-contrast imaging (DPCI) plays a pivotal role in analyzing magnetic domain structures and field gradients in materials, necessitating high-quality neutron absorption gratings for enhanced fringe contrast. Traditional fabrication techniques, typically filling gadolinium (Gd) or Gd-containing materials into the corresponding grating structures, face challenges in achieving optimal Gd filling ratios and thickness, limiting the neutron DPCI system’s performance. This paper introduces an approach utilizing ultrasound-assisted filling method to introduce Gd particles into grating trenches with dense deposition, achieving an absorption grating period of 42 μm. This method achieves an equivalent Gd thickness of 80.3 μm, corresponding to the filling ratio of 53.53%, as confirmed by scanning electron microscopy and x-ray micro-imaging. The utilization of an ultrasound not only improves the Gd filling ratio, but also suggests potential scalability for large-area grating production, marking a significant advancement in neutron DPCI technology by providing high-quality components.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"51 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141551343","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Insights into molecular and bulk mechanical properties of glassy carbon through molecular dynamics simulations and mechanical tensile testing","authors":"Manali Kunte, Lucía Carballo Chanfón, Surabhi Nimbalkar, James Bunnell, Emanuel Rodriguez Barajas, Mario Enrique Vazquez, David Trejo-Rodriguez, Carter Faucher, Skelly Smith and Sam Kassegne","doi":"10.1088/1361-6439/ad5693","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5693","url":null,"abstract":"With increasing interest in the use of glassy carbon (GC) for a broad range of application areas, the need for developing a fundamental understanding of its mechanical properties has come to the forefront. Furthermore, recent theoretical and modeling works that highlight the synthesis of GC via the pyrolysis of polymer precursors has explored the possibilities of a revisit to the investigation of their mechanical properties at a fundamental level. Although there are isolated reports on the experimental determination of its elastic modulus, insights into the stress-strain behavior of a GC material under tension and compression obtained through simulations, either at the molecular level or for the bulk materials, are missing. This study fills the gap at the molecular level and investigates the mechanical properties of GC using molecular dynamics (MD) simulations, which model the atomistic-level formation and breaking of bonds using bond-order-based reactive force field formulations. The molecular model considered in this simulation has a characteristic 3D cage-like structure of five-, six-, and seven-membered carbon rings and graphitic domains of a flat graphene-like structure. The GC molecular model was subjected to loading under varying strain rates (0.4, 0.6, 1.25, and 2.5 ns−1) and temperatures (300 K–800 K) in each of the three axes: x, y, and z. The simulations show that the GC nanostructure has distinct stress-strain curves under tension and compression. In tension, MD modeling predicted a mean elastic modulus of 5.71GPa for a single GC nanostructure with some dependency on the strain rate and temperature, whereas, in compression, the elastic modulus was also found to depend on the strain rate and temperature and was predicted to have a mean value of 35 GPa. To validate the simulation results and develop experimental insights into the bulk behavior, mechanical tests were conducted on dog-bone-shaped testing coupons that were subjected to uniaxial tension and loaded until failure. The GC test coupons demonstrated a bulk modulus of 17 ±2.69 GPa in tension, which compares well with those reported in the literature. However, comparing MD simulation outcomes to those of uniaxial mechanical testing reveals that the bulk modulus of GC in tension found experimentally is higher than the modulus of single GC nanostructures predicted by MD modeling, which inherently underestimates the bulk modulus. With regard to failure modes, the MD simulations predicted failure in tension accompanied by the breaking of carbon rings within the molecular structure. In contrast, the mechanical testing demonstrated that failure modes are dominated by brittle failure planes largely due to the amorphous structure of GC.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"44 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141551344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Edge smoothness enhancement of digital lithography based on the DMDs collaborative modulation","authors":"Jingya Zhang, Ningning Luo and Deyuan Chen","doi":"10.1088/1361-6439/ad58e9","DOIUrl":"https://doi.org/10.1088/1361-6439/ad58e9","url":null,"abstract":"The rough saw-tooth edge caused by the inherent microstructures of digital micromirror device (DMD) will reduce the quality of the lithography pattern. Comprehensively considering the manufacturing efficiency, precision and cost, we propose a DMDs collaborative modulation lithography method to improve the smoothness of the lithography pattern edge. Through combining two misaligned DMDs to collaboratively modulate exposure dose, the better edge smoothness can be achieved. Collaborative exposure with 1/2 DMD pixel misalignment and 1/4 DMD pixel misalignment are both implemented to form the step-shape lithography patterns. The experimental results show that the saw-tooth edge can approximate to a straight line when increasing the number of times of the collaborative exposure. Further error analysis indicates it is effective to improve the edge smoothness while ensuring the lithography quality by using the collaborative modulation lithography. These results indicate that the DMDs collaborative modulation lithography is a promising technique for fabrication of microstructures, which may be a solution for balancing the fabrication precision, efficiency and cost.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"26 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141504347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Nonlinear design, analysis, and testing of a single-stage compliant orthogonal displacement amplifier with a single input force for microgrippers","authors":"Weilin Chen, Zuyang Fan, Qinghua Lu, Yujie Xu, Zhihang Li, Huiling Wei, Qinghua Zhang and Lufeng Luo","doi":"10.1088/1361-6439/ad5a19","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5a19","url":null,"abstract":"To achieve dexterous and stable micro/nanomanipulation, a large grasping stroke, compact design, and parallel grasping are required for microgrippers; thus, a single-stage compliant orthogonal displacement amplifier (CODA) with a single input force would be an ideal transmission mechanism. However, the existing small-deflection-based design schemes cannot adapt to large deflections or shearing effect, thereby affecting the orthogonal movement transformation accuracy. This study proposed, analyzed, and experimentally investigated a nonlinear design scheme for a single-stage CODA with a single input force. First, the nonlinear design principle is described qualitatively. By combining closed-form analytical modelling, finite element analysis, and numerical fitting, the nonlinear extent of a pre-set variable cross-sectional beam in the CODA is formulated. By utilizing the beam constraint model and small-deflection-based modelling, the nonlinear extent of the undetermined uniform straight beam in the CODA is derived. Based on the design principle and nonlinear models, a nonlinear design scheme is proposed quantitatively. Finite element simulations and experimental tests are conducted to verify the proposed scheme, and the limitations of our previous study are revealed.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"4 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-06-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141504349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Micromechanical piezoelectric micromachined ultrasonic transducer array package enhancement with integrated frontliners","authors":"Hongxiang Shu, Weiliang Ji, Xiangyu Sun, Zhanqiang Xing and Xu He","doi":"10.1088/1361-6439/ad5a18","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5a18","url":null,"abstract":"In order to improve the susceptibility of ultrasonic transducers to damage and the mismatch in acoustic impedance with test specimens, an impedance-matching layer is introduced between the transducer and the specimen. The impact of the matching layer on acoustic propagation of transducer was analyzed through acoustic field simulation. The performance of the improved transducer was experimentally evaluated by using a dedicated echo testing system for transducers. The matching layer was optimized by considering different materials. The results show that for non-metallic materials, only a layer of acoustic matching layer (organic silicone gel) can be added to achieve acoustic impedance matching and avoid wear. For metal materials, two acoustic matching layers (organic silicone gel and epoxy resin) need to be added to achieve acoustic impedance matching. The propagation efficiency of sound waves is increased by 30% as a result of this process.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"11 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141504348","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Development of piezoresistive flexible sensor with dual-height cylindrical microstructure surfaces to achieve vehicle vibration monitoring","authors":"Decheng Zhang, Jiaqing Xie, Xiaoyu Meng, Haoran Pang, Ruqian Sun, Haiyan Fan, Xiaohui Nan and Zhikang Zhou","doi":"10.1088/1361-6439/ad5564","DOIUrl":"https://doi.org/10.1088/1361-6439/ad5564","url":null,"abstract":"This research proposed a vibration monitoring device based on a piezoresistive flexible sensor with microstructured surfaces to achieve a simple acquisition of vibration information in the driver’s cabin of automobiles. The shape, size and arrangement mode of microstructures on the piezoresistive flexible sensor performance were investigated by finite element simulation. The polydimethylsiloxane/hydroxylated multi walled carbon nanotubes (PDMS/MWCNTs-COOH) composite membranes were prepared by the combination of high-pressure spraying and spinning coating method. The electromechanical response curves of the piezoresistive flexible sensor composed of a double-layer PDMS/MWCNTs-COOH composite membranes based on a dual-height cylindrical microstructure were tested. A vibration monitoring device was developed to process the signals obtained by the fabricated piezoresistive flexible sensor, and the vibration response of the car cab under different driving conditions was investigated. The results indicated that the cylindrical microstructure with small size can improve the sensitivity of the fabricated piezoresistive flexible sensor. Compared with the single-height and dual-height cylindrical microstructure, the piezoresistive flexible sensor with dual-height cylindrical microstructure can expand the detection range, and improve the linearity and sensitivity. The piezoresistive flexible sensor exhibits excellent performance, with a sensitivity of 1.774 kPa−1 and a detection range is 0–0.5 kPa. The above advances can improve the authenticity of the collected data, and provide a basis for the processing and analysis of the vibration signal before improving the noise, vibration and harshness performance of the vehicle.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"55 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141504350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Data-driven estimation of battery state-of-health with formation features","authors":"Weilin He, Dingquan Li, Zhongxian Sun, Chenyang Wang, Shihai Tang, Jing Chen, Xin Geng, Hailong Wang, Zhimeng Liu, Linyu Hu, Dongchen Yang, Haiyan Tu, Yuanjing Lin and Xin He","doi":"10.1088/1361-6439/ad520c","DOIUrl":"https://doi.org/10.1088/1361-6439/ad520c","url":null,"abstract":"Accurately estimating the state-of-health (SOH) of a battery is crucial for ensuring battery safe and efficient operation. The lifetime of lithium-ion batteries (LIBs) starts from their manufacture, and the performance of LIBs in the service period is highly related to the formation conditions in the factory. Here, we develop a deep transfer ensemble learning framework with two constructive layers to estimate battery SOH. The primary approach involves a combination of base models, a convolutional neural network to combine electrical features with spatial relationships of thermal and mechanical features from formation to subsequent cycles, and long short-term memory to extract temporal dependencies during cycling. Gaussian process regression (GPR) then handles SOH prediction based on this integrated model. The validation results demonstrate highly accurate capacity estimation, with a lowest root-mean-square error (RMSE) of 1.662% and a mean RMSE of 2.512%. Characterization on retired cells reveals the correlation between embedded formation features and their impact on the structural, morphological, and valence states evolution of electrode material, enabling reliable prediction with the corresponding interplay mechanism. Our work highlights the value of deep learning with comprehensive analysis through the relevant features, and provides guidance for optimizing battery management.","PeriodicalId":16346,"journal":{"name":"Journal of Micromechanics and Microengineering","volume":"29 1","pages":""},"PeriodicalIF":2.3,"publicationDate":"2024-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141504351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}