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2014 International Conference on Optical MEMS and Nanophotonics最新文献

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High-precision integration approach based on alignment maintaining flip-chip bonding using cone shaped bump and truncated pyramid pad 基于锥形凸点和截形金字塔垫的对准保持倒装芯片键合的高精度集成方法
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924558
B. T. Tung, Laina Ma, T. Amano, K. Kikuchi, M. Aoyagi
{"title":"High-precision integration approach based on alignment maintaining flip-chip bonding using cone shaped bump and truncated pyramid pad","authors":"B. T. Tung, Laina Ma, T. Amano, K. Kikuchi, M. Aoyagi","doi":"10.1109/OMN.2014.6924558","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924558","url":null,"abstract":"In this paper, a high-precision heterogeneous integration approach based on a high alignment accuracy flip-chip bonding using nanoparticle deposition (NpD) cone shaped (CS) bumps and anisotropic wet-etching truncated pyramid (TIP) bonding pads is introduced to precisely control the post-bond position of the bonding chip. Experimental results show that the bonding chip could be confined within sub-micro ranges in all the X-, y- and z-axis. Moreover, reliable bonds with ohmic contacts were realized at 150°C, capable for edge emitting laser (EEL) chip staking applications.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114876645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors 一种双轴压电MEMS扫描镜及其在微型投影仪上的应用
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924610
K. Ikegami, T. Koyama, T. Saito, Y. Yasuda, H. Toshiyoshi
{"title":"A biaxial piezoelectric MEMS scanning mirror and its application to pico-projectors","authors":"K. Ikegami, T. Koyama, T. Saito, Y. Yasuda, H. Toshiyoshi","doi":"10.1109/OMN.2014.6924610","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924610","url":null,"abstract":"In this paper, we report a two-dimensional MEMS optical scanner that actuate and detect the angular motion through the piezoelectric effect of thin film PZT. Typical scan ranges were ±12° at 25 kHz for the horizontal resonance and ±8° at 60 Hz for the vertical non-resonance, and the overall power consumption was 100 mW or less. A newly designed mechanical rib structure on the backside of the mirror was found to suppress the dynamic deformation of the mirror to the level compatible with a high definition of 720 pixels or more. A scanning laser type pico-projector was developed for demonstration.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134375877","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Resonant PZT MEMS scanners with integrated angle sensors 带有集成角度传感器的谐振PZT MEMS扫描仪
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924612
U. Baran, S. Holmstrom, Dean R. Brown, W. Davis, O. Cakmak, H. Urey
{"title":"Resonant PZT MEMS scanners with integrated angle sensors","authors":"U. Baran, S. Holmstrom, Dean R. Brown, W. Davis, O. Cakmak, H. Urey","doi":"10.1109/OMN.2014.6924612","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924612","url":null,"abstract":"Several high performing PZT-actuated MEMS laser scanners utilizing mechanical coupling are designed, fabricated, and characterized. Optical angles up to 59.3 deg. and θoptD·fn-products up to 3052 deg.·mm·Hz are demonstrated. These are the highest performing MEMS scanners in the literature. An angle sensor is integrated into one scanner design without any additional processing. The sensor response shows a linear relationship with the mirror rotation. A closed-loop drive was demonstrated using the scanner output.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"209 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121204951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Photosensitive metamaterial for nanolithography 纳米光刻用光敏超材料
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924591
Youngseop Lee, Sang-Gil Park, S. Jeon, K. Jeong
{"title":"Photosensitive metamaterial for nanolithography","authors":"Youngseop Lee, Sang-Gil Park, S. Jeon, K. Jeong","doi":"10.1109/OMN.2014.6924591","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924591","url":null,"abstract":"This work presents the novel photosensitive metamaterial (metaphotoresist) with silver (Ag) and dielectric multilayer for ultraviolet nanolithography overcoming a diffraction limit. The metamaterial consists of multilayer with Ag and photoresist (PR) layers. A plasmonic UV light coupling under diffraction limit in the metamaterial was numerically demonstrated by using a finite difference time domain (FDTD) method. Nanolithography was demonstrated by using the metaphotoresist (meta-PR) and a conventional UV (λ=365 nm) alignment system. The meta-PR was fabricated by spin-coating of PR and angled deposition of Ag nanostructures. About 150 nm nanopatterns were fabricated. We believe that the metaphotoresist provides new direction for nanolithography industries.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121263985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings 基于亚波长光栅氮化硅膜的可调谐滤光片
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924515
Yue Wang, D. Stellinga, T. Krauss
{"title":"Tunable optical filters based on silicon nitride mem-branes with subwavelength gratings","authors":"Yue Wang, D. Stellinga, T. Krauss","doi":"10.1109/OMN.2014.6924515","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924515","url":null,"abstract":"We report the use of 500 nm thick silicon nitride membrane as a high reflective broad-band filter in the orange-red spectral range. The membrane is patterned into a high contrast grating with 560 nm period to act as a high-reflectivity mirror. Using electrostatic tuning, we have achieved a tunable filter based on a Fabry-Pérot cavity architecture. By applying 9 V to the MEMs device, we observe a 13 nm wavelength shift of a peak centred at 630 nm.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116093446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Compact hyperchromatic imaging systems based on tunable optical microsystems 基于可调光学微系统的紧凑型高色成像系统
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924554
A. Grewe, Csaba Endrody, M. Hillenbrand, Phuong-Ha Cu-Nguyen, A. Seifert, M. Hoffmann, S. Sinzinger
{"title":"Compact hyperchromatic imaging systems based on tunable optical microsystems","authors":"A. Grewe, Csaba Endrody, M. Hillenbrand, Phuong-Ha Cu-Nguyen, A. Seifert, M. Hoffmann, S. Sinzinger","doi":"10.1109/OMN.2014.6924554","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924554","url":null,"abstract":"We present hyperspectral imaging (HSI) systems based on a hyperchromatic confocal approach. Spatial filters are used to separate the spectral components of the light. The necessary multiplexing in time is realized by tuneable optics. In addition, we propose tunable systems with diffractive Alvarez-Lohmann lenses as well as fluidic micro lenses and present a demonstrator using Alvarez-Lohmann lenses. Micromechanical stepper actuators with large movement range are used to enhance the spatial resolution of those systems.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116141939","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electro-optically based liquid mass sensor using resonating micro-plate under harsh drop and spray conditions 基于谐振微板的电光液体质量传感器在恶劣的跌落和喷雾条件下工作
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924552
Y. Linzon, Said Mahajne, D. Guetta, Stella Lulinsky, S. Krylov
{"title":"Electro-optically based liquid mass sensor using resonating micro-plate under harsh drop and spray conditions","authors":"Y. Linzon, Said Mahajne, D. Guetta, Stella Lulinsky, S. Krylov","doi":"10.1109/OMN.2014.6924552","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924552","url":null,"abstract":"We perform in-situ sensing of volatile droplet and spray masses using plate-like single crystal Si micro-resonators with low stress, where robust and reusable operation was attained over harsh conditions and over multiple cycles. A home-built electro-optical sensing system has been used. The effects on the resonant frequency of altered mass loading, elasticity and strain are compared, where the latter two mechanisms are found to be negligible in the presence of low viscosity liquids deposited on top of our devices. In resonant mode, the loaded mass is estimated from measured frequency response shifts and interpreted from simple (uniformly deposited film) model.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125939243","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Tunable optical resonators by manipulating polystyrene microspheres through image-controlled dielectrophoretic force 通过图像控制介电泳力操纵聚苯乙烯微球的可调谐光学谐振器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924514
Ya-Tzu Chen, Te-Chang Chen, Tse-Chen Liao, Ming-Chang M. Lee
{"title":"Tunable optical resonators by manipulating polystyrene microspheres through image-controlled dielectrophoretic force","authors":"Ya-Tzu Chen, Te-Chang Chen, Tse-Chen Liao, Ming-Chang M. Lee","doi":"10.1109/OMN.2014.6924514","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924514","url":null,"abstract":"An image-controlled dielectrophoretic (ODEP) optofluidic system is demonstrated to manipulate microsphere resonators in an aqueous medium. Through this platform we can freely position the microshere resonator near a waveguide to manage the coupling condition. The spectral analysis shows the microsphere resonator can be operated in the under-coupling, critical coupling and over-coupling regimes.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131155239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High performance label-free biosensing by all dielectric metamaterial 全电介质超材料的高性能无标签生物传感
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924590
Sang-Gil Park, K. Jeong
{"title":"High performance label-free biosensing by all dielectric metamaterial","authors":"Sang-Gil Park, K. Jeong","doi":"10.1109/OMN.2014.6924590","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924590","url":null,"abstract":"This work presents high performance label-free biosensor by using an all dielectric metamaterial. The all dielectric metamaterial consists of nanohole arrays in rectangular lattice on a thin silicon substrate. The nanohole arrays were fabricated by using e-beam lithography and silicon reactive ion etching. The all dielectric metamaterial biosensor shows high sensitivity and high figure-of-merit of 21. This device can offer new opportunity for biosensing with high performance and reusability.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132566437","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
All-photonic SU-8 Variable Optical Attenuator 全光子SU-8可变光衰减器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924544
S. de Pedro, T. Ackermann, J. Plaza, Erica Alvarez, S. Buttgenbach, V. Cadarso, A. Llobera
{"title":"All-photonic SU-8 Variable Optical Attenuator","authors":"S. de Pedro, T. Ackermann, J. Plaza, Erica Alvarez, S. Buttgenbach, V. Cadarso, A. Llobera","doi":"10.1109/OMN.2014.6924544","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924544","url":null,"abstract":"A polymer-based Micro-optoelectromechanical system (MOEMS) design as a Variable Optical Attenuator (VOA) is presented. It consists on a SU-8 quad-beam structure containing a suspended waveguide aligned to input/output fiber optics. Actuation is achieved by defining photonic-heat transition regions at the anchoring of the mechanical beams. Such actuation points are manufactured by means of a dye-doped SU-8 with a strong absorption at specific wavelengths. When irradiated, the actuation points increase in size, entailing a displacement of the seismic mass, This causes a misalignment (i.e. an increase of the coupling losses) between the waveguides and the input/output fiber optics. Experimental results have validated this approach, by showing the effect of the pumping power on the optical losses, with an excellent repeatability and a response time of 1 ms.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114850193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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