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2014 International Conference on Optical MEMS and Nanophotonics最新文献

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Large-displacement electrostatic deformable mirror using movable bottom electrodes 采用可移动底电极的大位移静电变形镜
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924549
T. Tsuchiya, V. Singh, Y. Hirai, O. Tabata
{"title":"Large-displacement electrostatic deformable mirror using movable bottom electrodes","authors":"T. Tsuchiya, V. Singh, Y. Hirai, O. Tabata","doi":"10.1109/OMN.2014.6924549","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924549","url":null,"abstract":"We propose a new design of the electrostatically actuated deformable mirror with low voltage operation for adaptive optics especially for scanning laser ophthalmoscopy. By using torsional actuation and allowing the arrayed bottom fixed electrodes moving along vertical direction, the gaps between mirrors and the bottom electrodes keep small so that the electrostatic force is large enough to deform the mirror at low voltage. The operation concept was verified through both conventional and system level finite element analyses. The simulation results of 2-μm-thick and 8-mm square membrane showed over 7 μm deformation in the astigmatism mode at a 70 V actuation.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123432059","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
The Casimir effect between micromechanical components on a silicon chip 硅片上微机械元件之间的卡西米尔效应
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924543
H. B. Chan, J. Zou, Z. Marcet, A. Rodriguez, M. T. H. Reid, A. McCauley, I. Kravchenko, T. Lu, Y. Bao, S. Johnson
{"title":"The Casimir effect between micromechanical components on a silicon chip","authors":"H. B. Chan, J. Zou, Z. Marcet, A. Rodriguez, M. T. H. Reid, A. McCauley, I. Kravchenko, T. Lu, Y. Bao, S. Johnson","doi":"10.1109/OMN.2014.6924543","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924543","url":null,"abstract":"The Casimir force originates from quantum fluctuations. While this force is too weak to have any measurable effects between objects at separations larger than ~10 μm it dominates the interaction between electrically neutral surfaces at the nanoscale. By fabricating a doubly clamped microbeam for sensing the force and a comb actuator to control the distance, we demonstrate that the Casimir force can become the dominant interaction between components within the same silicon chip.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124680506","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Characterization of a micro tunable cat's eye array in an optical identification system and comparison between different types of ID tags 光学识别系统中微调谐猫眼阵列的特性及不同类型身份标签的比较
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924565
Chih-chieh Chang, Yu-cheng Yang, Ming-chun Su, J. Tsai
{"title":"Characterization of a micro tunable cat's eye array in an optical identification system and comparison between different types of ID tags","authors":"Chih-chieh Chang, Yu-cheng Yang, Ming-chun Su, J. Tsai","doi":"10.1109/OMN.2014.6924565","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924565","url":null,"abstract":"We have built an optical identification system, and tried different types of dynamic ID tags, including a tunable cat's eye retroreflector array, a liquid crystal (LC) spatial light modulator (SPM) with retroreflective tape, and a LC SPM with normal white paper. Their performance is compared and the tag implemented with the micro tunable cat's eye retroreflector array offers the best system security.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115060926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Vibrational IR MEMS sensor: Application of torsion-bars tension-enhanced by bio-nano crystallization for highly sensitive detection 振动红外MEMS传感器:生物纳米结晶增强扭杆张力的高灵敏度检测应用
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924605
J. Jeong, S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki
{"title":"Vibrational IR MEMS sensor: Application of torsion-bars tension-enhanced by bio-nano crystallization for highly sensitive detection","authors":"J. Jeong, S. Kumagai, I. Yamashita, Y. Uraoka, M. Sasaki","doi":"10.1109/OMN.2014.6924605","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924605","url":null,"abstract":"A thin-film MEMS infrared (IR) sensor using torsional resonators was developed to achieve high sensitivity. The torsional resonators consisted of bimaterial; a tense Si thin-film and a metal film for IR absorption. Light incidence induced out-of-plane displacement of the resonators thereby shifting the resonant frequency of torsional vibration. To improve the response of the frequency shift, tension in the Si thin-film was enhanced by metal-induced lateral crystallization using biomineralized Ni nanoparticles and a lightweight metal was deposited onto the resonator to obtain flat profile. Response to heat and light incidence were discussed for the fabricated devices.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122122358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Temperature insensitive optical MEMS pressure sensor using long period gratings on a circular diaphragm 温度不敏感光学MEMS压力传感器使用长周期光栅在一个圆形的膜片
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924574
Prasant Kumart Pattnaik, V. Neeharika
{"title":"Temperature insensitive optical MEMS pressure sensor using long period gratings on a circular diaphragm","authors":"Prasant Kumart Pattnaik, V. Neeharika","doi":"10.1109/OMN.2014.6924574","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924574","url":null,"abstract":"We present design and simulation of temperature insensitive optical MEMS pressure sensor using long period gratings on a circular diaphragm. The sensor consists of a curved waveguide with two identical long period gratings located on circular diaphragm. When pressure is applied on the diaphragm, the pitch of the gratings changes and hence there is a shift in the corresponding Bragg wavelength. As temperature shifts the Bragg wavelength of the two gratings equally, the error due to temperature change on pressure sensitivity is eliminated. Long period gratings provide higher pressure sensitivity compared to Bragg gratings but with a limited pressure range.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126151332","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Photonic-crystal-waveguide-assisted directional couplers for hybrid Si/GaN nanophotonics 用于硅/氮化镓杂化纳米光子学的光子晶体波导辅助定向耦合器
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924594
B. Thubthimthong, Takashi Sasaki, K. Hane
{"title":"Photonic-crystal-waveguide-assisted directional couplers for hybrid Si/GaN nanophotonics","authors":"B. Thubthimthong, Takashi Sasaki, K. Hane","doi":"10.1109/OMN.2014.6924594","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924594","url":null,"abstract":"Photonic-crystal-waveguide-assisted (PCW-assisted) directional coupler fabricated from a hybrid nanophotonic fabrication platform of Si and GaN was studied. The coupler consisted of a Si PCW stacked on top by a GaN ridge waveguide (GaN RdW). High scattered near-infrared intensity at the output ports of the coupler was observed. The maximum coupling found was around 50%. The study may be promising for complex nanophotonic systems such as optical interconnect or optical signal processors.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128383163","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of visored MEMS shutter array for cryogenic environment 低温环境下可视MEMS快门阵列的研制
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924564
T. Takahashi, M. Mita, M. Konishi, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, H. Toshiyoshi
{"title":"Development of visored MEMS shutter array for cryogenic environment","authors":"T. Takahashi, M. Mita, M. Konishi, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMN.2014.6924564","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924564","url":null,"abstract":"We report the development of the visored shutter structure for astronomical instrument and the electrostatic operation in a 140K cryogenic environment without thermo-mechanical failure.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128437549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
MEMS actuation for a continuously tunable optical buffer 连续可调光缓冲器的MEMS驱动
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924548
N. Podoliak, W. H. Ng, H. Liu, A. Kenyon, W. Stewart, P. Horák
{"title":"MEMS actuation for a continuously tunable optical buffer","authors":"N. Podoliak, W. H. Ng, H. Liu, A. Kenyon, W. Stewart, P. Horák","doi":"10.1109/OMN.2014.6924548","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924548","url":null,"abstract":"We present our work towards development of an optical buffer based on the InP platform that consists of two suspended coupled optical waveguides. A continuously tunable delay in the propagation time can be achieved by varying the spacing between the waveguides using MEMS actuation. Up to 100% variation of the delay time with a driving voltage of 3 V is predicted.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"386 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132206896","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
3D Nanofocusing plasmonic waveguide 三维纳米聚焦等离子体波导
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924523
H. Choo
{"title":"3D Nanofocusing plasmonic waveguide","authors":"H. Choo","doi":"10.1109/OMN.2014.6924523","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924523","url":null,"abstract":"We have demonstrated experimentally a highly efficient on-chip three-dimensional (3D) linearly tapered metal-insulator-metal (MIM) nanoplasmonic photon compressor (3D NPC) with a final aperture size of 14 × 80 nm2. An optimized and linearly tapered MIM gap plasmon waveguide could theoretically reduce the excessive losses that would occur during nanofocusing processes. In simulation study, this approach could enable nanofocusing into a 2 × 5 nm2 area with the coupling loss and maximum E2 enhancement of 2.5 dB and 3.0 × 104, respectively. We fabricated the 3D NPC on a chip employing electron beam-induced deposition and demonstrated its highly localized light confinement using a two-photon photoluminescence (TPPL) technique. From the TPPL measurements, we experimentally estimated an intensity enhancement of 400 within a 14 × 80 nm2 cross-sectional area and a coupling efficiency of -1.3 dB (or 74% transmittance).","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114224931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Modelling, design and fabrication of dielectric photonic crystal structures using temporally asymmetric shaped femtosecond laser pulses 利用时间不对称形状飞秒激光脉冲模拟、设计和制造介电光子晶体结构
2014 International Conference on Optical MEMS and Nanophotonics Pub Date : 2014-10-16 DOI: 10.1109/OMN.2014.6924525
Yousuf Khan, Nadine Gotte, Tamara Meinl, T. Kusserow, A. Senftleben, T. Baumert, H. Hillmer
{"title":"Modelling, design and fabrication of dielectric photonic crystal structures using temporally asymmetric shaped femtosecond laser pulses","authors":"Yousuf Khan, Nadine Gotte, Tamara Meinl, T. Kusserow, A. Senftleben, T. Baumert, H. Hillmer","doi":"10.1109/OMN.2014.6924525","DOIUrl":"https://doi.org/10.1109/OMN.2014.6924525","url":null,"abstract":"We present high aspect ratio Fano-resonance structures for optical filter application along with their fabrication technique, design and numerical simulation. The structuring of photonic crystal elements using temporally shaped femtosecond laser pulses is described. Performance considerations for the presented device due to angular spread of a real optical beam are discussed in addition.","PeriodicalId":161791,"journal":{"name":"2014 International Conference on Optical MEMS and Nanophotonics","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132297600","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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