H. B. Chan, J. Zou, Z. Marcet, A. Rodriguez, M. T. H. Reid, A. McCauley, I. Kravchenko, T. Lu, Y. Bao, S. Johnson
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The Casimir effect between micromechanical components on a silicon chip
The Casimir force originates from quantum fluctuations. While this force is too weak to have any measurable effects between objects at separations larger than ~10 μm it dominates the interaction between electrically neutral surfaces at the nanoscale. By fabricating a doubly clamped microbeam for sensing the force and a comb actuator to control the distance, we demonstrate that the Casimir force can become the dominant interaction between components within the same silicon chip.