T. Takahashi, M. Mita, M. Konishi, K. Motohara, N. Kobayashi, N. Kashikawa, H. Fujita, H. Toshiyoshi
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Development of visored MEMS shutter array for cryogenic environment
We report the development of the visored shutter structure for astronomical instrument and the electrostatic operation in a 140K cryogenic environment without thermo-mechanical failure.
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